DE69404337T2 - Kapazitiver Beschleunigungsmesser mit Schaltung zur Korrektur des störender Einflusses parasitärer Kapazitäten - Google Patents

Kapazitiver Beschleunigungsmesser mit Schaltung zur Korrektur des störender Einflusses parasitärer Kapazitäten

Info

Publication number
DE69404337T2
DE69404337T2 DE69404337T DE69404337T DE69404337T2 DE 69404337 T2 DE69404337 T2 DE 69404337T2 DE 69404337 T DE69404337 T DE 69404337T DE 69404337 T DE69404337 T DE 69404337T DE 69404337 T2 DE69404337 T2 DE 69404337T2
Authority
DE
Germany
Prior art keywords
correct
circuit
parasitic capacitances
disturbing influence
capacitive accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69404337T
Other languages
English (en)
Other versions
DE69404337D1 (de
Inventor
Michel Torregrosa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Application granted granted Critical
Publication of DE69404337D1 publication Critical patent/DE69404337D1/de
Publication of DE69404337T2 publication Critical patent/DE69404337T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
DE69404337T 1993-01-19 1994-01-17 Kapazitiver Beschleunigungsmesser mit Schaltung zur Korrektur des störender Einflusses parasitärer Kapazitäten Expired - Fee Related DE69404337T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9300752A FR2700614B1 (fr) 1993-01-19 1993-01-19 Accéléromètre capacitif à circuit de correction de l'effet perturbateur de capacités parasites.

Publications (2)

Publication Number Publication Date
DE69404337D1 DE69404337D1 (de) 1997-09-04
DE69404337T2 true DE69404337T2 (de) 1997-11-20

Family

ID=9443366

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69404337T Expired - Fee Related DE69404337T2 (de) 1993-01-19 1994-01-17 Kapazitiver Beschleunigungsmesser mit Schaltung zur Korrektur des störender Einflusses parasitärer Kapazitäten

Country Status (5)

Country Link
US (1) US5600066A (de)
EP (1) EP0613012B1 (de)
JP (1) JPH06281669A (de)
DE (1) DE69404337T2 (de)
FR (1) FR2700614B1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5576483A (en) * 1993-10-01 1996-11-19 Hysitron Incorporated Capacitive transducer with electrostatic actuation
FR2724463B1 (fr) * 1994-09-12 1996-12-13 Sagem Procede de mesure d'une acceleration par un capteur a armature mobile et capteur d'acceleration pour mettre en oeuvre le procede
JP2586406B2 (ja) * 1994-10-27 1997-02-26 日本電気株式会社 静電容量型加速度センサ
JP3216455B2 (ja) * 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
US5808198A (en) * 1997-05-19 1998-09-15 The Charles Stark Draper Laboratory, Inc. RF balanced capacitive vibration sensor system
DE19730443A1 (de) * 1997-07-16 1999-01-21 Deutsch Zentr Luft & Raumfahrt Mikromechanische Vorrichtung
US6035694A (en) * 1999-03-12 2000-03-14 I/O Of Austin, Inc. Method and apparatus for calibration of stray capacitance mismatch in a closed loop electro-mechanical accelerometer
DE19929767C2 (de) * 1999-06-29 2002-06-13 Litef Gmbh Beschleunigungsmeßeinrichtung
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US6879056B2 (en) * 2000-12-29 2005-04-12 Intel Corporation Converting sensed signals
KR100444235B1 (ko) * 2002-12-10 2004-08-16 삼성전기주식회사 자기 및 가속도 동시 검출 방법 및 장치
JP4515821B2 (ja) * 2004-05-25 2010-08-04 ルネサスエレクトロニクス株式会社 駆動回路、動作状態検出回路及び表示装置
EP2002213B1 (de) * 2006-03-29 2012-07-11 Rosemount, Inc. Kapazitätsmessschaltung
JP2009097932A (ja) * 2007-10-15 2009-05-07 Freescale Semiconductor Inc 容量型検出装置
US8499630B2 (en) * 2008-03-31 2013-08-06 Intel Corporation Piezoelectric sensor dynamic range improvement
DE102008023535B4 (de) * 2008-05-14 2011-05-12 Texas Instruments Deutschland Gmbh Elektronische Vorrichtung und Verfahren zur Auswertung einer variablen Kapazität
DE102009026496B4 (de) * 2009-05-27 2022-04-28 Robert Bosch Gmbh Kompensationskapazität für einen kapazitiven Sensor
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
US9032777B2 (en) * 2011-09-16 2015-05-19 Robert Bosch Gmbh Linearity enhancement of capacitive transducers by auto-calibration using on-chip neutralization capacitors and linear actuation
US8890045B2 (en) * 2012-03-01 2014-11-18 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical encoder with a current regulating circuit for a light emitter
US10309997B2 (en) * 2013-03-15 2019-06-04 Infineon Technologies Ag Apparatus and a method for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance
US20140372074A1 (en) * 2013-06-14 2014-12-18 Memsic, Inc. Tip-over sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3877313A (en) * 1973-07-23 1975-04-15 Singer Co Electrostatic accelerometer
US4009607A (en) * 1975-12-24 1977-03-01 The Bendix Corporation Force measuring system including combined electrostatic sensing and torquing means
FR2454103A1 (fr) * 1979-04-11 1980-11-07 Sagem Perfectionnements aux accelerometres pendulaires asservis
US4353254A (en) * 1980-12-18 1982-10-12 The Singer Company Control circuit for electro-static accelerometer
FR2617607B1 (fr) * 1987-06-30 1989-12-01 Applic Gles Electrici Meca Accelerometre pendulaire a reequilibrage et procede de fabrication d'un tel accelerometre
DE3831593A1 (de) * 1988-09-15 1990-03-22 Siemens Ag Schaltungsanordnung mit einer einer mechanischen verstimmung ausgesetzten differentialkondensator-anordnung
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5277053A (en) * 1990-04-25 1994-01-11 Litton Systems, Inc. Square law controller for an electrostatic force balanced accelerometer
US5142921A (en) * 1990-10-29 1992-09-01 Litton Systems, Inc. Force balance instrument with electrostatic charge control
US5343766A (en) * 1992-02-25 1994-09-06 C & J Industries, Inc. Switched capacitor transducer
FR2689627B1 (fr) * 1992-04-07 1997-06-20 Sextant Avionique Perfectionnement aux micro-capteurs pendulaires asservis.

Also Published As

Publication number Publication date
EP0613012A1 (de) 1994-08-31
DE69404337D1 (de) 1997-09-04
FR2700614A1 (fr) 1994-07-22
EP0613012B1 (de) 1997-07-23
US5600066A (en) 1997-02-04
FR2700614B1 (fr) 1995-04-14
JPH06281669A (ja) 1994-10-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee