DE69404053D1 - Verfahren zur Herstellung von Mikrolinsenmatrixen - Google Patents

Verfahren zur Herstellung von Mikrolinsenmatrixen

Info

Publication number
DE69404053D1
DE69404053D1 DE69404053T DE69404053T DE69404053D1 DE 69404053 D1 DE69404053 D1 DE 69404053D1 DE 69404053 T DE69404053 T DE 69404053T DE 69404053 T DE69404053 T DE 69404053T DE 69404053 D1 DE69404053 D1 DE 69404053D1
Authority
DE
Germany
Prior art keywords
microlens
matrixes
production
microlens matrixes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69404053T
Other languages
English (en)
Other versions
DE69404053T2 (de
Inventor
Avi Y Feldblum
Keith Owen Mersereau
Casimir Roman Nijander
Wesley Peter Townsend
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21818503&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69404053(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of DE69404053D1 publication Critical patent/DE69404053D1/de
Application granted granted Critical
Publication of DE69404053T2 publication Critical patent/DE69404053T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G02B6/1245—Geodesic lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Drying Of Semiconductors (AREA)
DE69404053T 1993-03-01 1994-02-16 Verfahren zur Herstellung von Mikrolinsenmatrixen Expired - Fee Related DE69404053T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/024,035 US5286338A (en) 1993-03-01 1993-03-01 Methods for making microlens arrays

Publications (2)

Publication Number Publication Date
DE69404053D1 true DE69404053D1 (de) 1997-08-14
DE69404053T2 DE69404053T2 (de) 1997-10-30

Family

ID=21818503

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69404053T Expired - Fee Related DE69404053T2 (de) 1993-03-01 1994-02-16 Verfahren zur Herstellung von Mikrolinsenmatrixen

Country Status (4)

Country Link
US (1) US5286338A (de)
EP (1) EP0614096B1 (de)
JP (1) JP2798600B2 (de)
DE (1) DE69404053T2 (de)

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US5346583A (en) * 1993-09-02 1994-09-13 At&T Bell Laboratories Optical fiber alignment techniques
US5370768A (en) * 1993-10-14 1994-12-06 At&T Corp. Method for making microstructures
US5435887A (en) * 1993-11-03 1995-07-25 Massachusetts Institute Of Technology Methods for the fabrication of microstructure arrays
US5666155A (en) * 1994-06-24 1997-09-09 Lucent Technologies Inc. Eye contact video telephony
US5770123A (en) * 1994-09-22 1998-06-23 Ebara Corporation Method and apparatus for energy beam machining
EP0706070A3 (de) * 1994-10-04 1997-04-02 Siemens Ag Verfahren zum Trockenätzen eines Halbleitersubstrats
GB9600469D0 (en) * 1996-01-10 1996-03-13 Secr Defence Three dimensional etching process
US5718830A (en) * 1996-02-15 1998-02-17 Lucent Technologies Inc. Method for making microlenses
US6410213B1 (en) 1998-06-09 2002-06-25 Corning Incorporated Method for making optical microstructures having profile heights exceeding fifteen microns
US6049430A (en) * 1998-11-12 2000-04-11 Seagate Technology High numerical aperture objective lens manufacturable in wafer form
DE19904307C2 (de) * 1999-01-28 2001-09-20 Bosch Gmbh Robert Verfahren zur Herstellung von dreidimensionalen Strukturen mittels eines Ätzprozesses
US7227817B1 (en) 1999-12-07 2007-06-05 Dphi Acquisitions, Inc. Low profile optical head
US7079472B2 (en) * 1999-06-23 2006-07-18 Dphi Acquisitions, Inc. Beamshaper for optical head
US6570903B2 (en) * 2000-03-07 2003-05-27 Neumann Information Systems, Inc. Electric-optical singlet sigma and singlet delta oxygen generator
US6420202B1 (en) 2000-05-16 2002-07-16 Agere Systems Guardian Corp. Method for shaping thin film resonators to shape acoustic modes therein
US6620333B2 (en) * 2000-10-23 2003-09-16 The Regents Of The University Of California CO2 laser and plasma microjet process for improving laser optics
JP2002321941A (ja) * 2001-04-20 2002-11-08 Sony Corp 光学素子の製造方法
US6563975B2 (en) * 2001-06-18 2003-05-13 Raytheon Company Method and apparatus for integrating optical fibers with collimating lenses
DE10135872A1 (de) * 2001-07-24 2003-02-27 Osram Opto Semiconductors Gmbh Verfahren zur Herstellung einer Linse
US6926850B2 (en) * 2001-07-26 2005-08-09 Lucent Technologies Inc. Method for making micro lenses
US6788423B2 (en) * 2001-08-31 2004-09-07 Digital Optics Corp. Conic constant measurement methods for refractive microlenses
US6869754B2 (en) 2001-10-23 2005-03-22 Digital Optics Corp. Transfer of optical element patterns on a same side of a substrate already having a feature thereon
US7128943B1 (en) * 2002-02-20 2006-10-31 University Of South Florida Methods for fabricating lenses at the end of optical fibers in the far field of the fiber aperture
US7531104B1 (en) 2002-03-20 2009-05-12 Ruey-Jen Hwu Micro-optic elements and method for making the same
JP3914124B2 (ja) * 2002-09-18 2007-05-16 沖電気工業株式会社 光モジュール
KR100537505B1 (ko) * 2003-01-27 2005-12-19 삼성전자주식회사 마이크로 렌즈 어레이의 제조방법
US6912090B2 (en) 2003-03-18 2005-06-28 Lucent Technologies Inc. Adjustable compound microlens apparatus with MEMS controller
WO2004104646A1 (en) * 2003-05-20 2004-12-02 Kansas State University Research Foundation Microlens comprising a group iii-nitride material
US7097778B2 (en) * 2004-04-28 2006-08-29 Chunghwa Telecom Co., Ltd. Process for fabricating a micro-optical lens
JP4747893B2 (ja) * 2006-03-15 2011-08-17 ヤマハ株式会社 マイクロレンズの製法
KR100786800B1 (ko) * 2006-08-02 2007-12-18 한국과학기술원 사진현상형 하이브리드 재료를 이용한 미세광학소자의제작방법
US7858156B2 (en) * 2006-11-27 2010-12-28 The University Of Massachusetts Surface buckling method and articles formed thereby
JP2007086819A (ja) * 2007-01-05 2007-04-05 Oki Electric Ind Co Ltd 光モジュール
US8906284B2 (en) * 2008-05-28 2014-12-09 The University Of Massachusetts Wrinkled adhesive surfaces and methods for the preparation thereof
TWI470278B (zh) * 2012-01-04 2015-01-21 Of Energy Ministry Of Economic Affairs Bureau 微透鏡結構製造方法
US9257478B2 (en) 2012-05-22 2016-02-09 The Regents Of The University Of California Spatially resolved spectral-imaging device
CN102730629B (zh) * 2012-06-21 2015-01-28 华中科技大学 一种微透镜的制备方法及其产品
CN105204097B (zh) * 2015-09-02 2017-03-22 河南仕佳光子科技股份有限公司 二氧化硅微透镜及其制造方法
CN106501884A (zh) * 2016-11-30 2017-03-15 电子科技大学 一种亚波长结构平凸微透镜阵列的制作工艺
CN110082845B (zh) * 2019-04-18 2021-03-09 中国科学技术大学 一种微透镜的制备方法
NL2023747B1 (en) * 2019-09-02 2021-05-12 Suss Microtec Lithography Gmbh Method and test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit
US11487066B2 (en) * 2020-11-12 2022-11-01 Mellanox Technologies, Ltd. Optical transceivers with protective layers
CN112834180B (zh) * 2020-12-28 2023-04-28 中国科学院紫金山天文台 用于探测器阵列芯片和微透镜阵列的安装装置和定位方法
CN113484940B (zh) * 2021-07-05 2023-05-23 苏州长光华芯光电技术股份有限公司 一种微透镜阵列及其制备方法、垂直腔面发射激光器结构

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154735A (en) * 1979-05-22 1980-12-02 Sharp Corp Manufacture of semiconductor device
US4813762A (en) * 1988-02-11 1989-03-21 Massachusetts Institute Of Technology Coherent beam combining of lasers using microlenses and diffractive coupling
US5021121A (en) * 1990-02-16 1991-06-04 Applied Materials, Inc. Process for RIE etching silicon dioxide
US5079130A (en) * 1990-05-25 1992-01-07 At&T Bell Laboratories Partially or fully recessed microlens fabrication
US5135590A (en) * 1991-05-24 1992-08-04 At&T Bell Laboratories Optical fiber alignment method

Also Published As

Publication number Publication date
JPH06308302A (ja) 1994-11-04
EP0614096B1 (de) 1997-07-09
DE69404053T2 (de) 1997-10-30
JP2798600B2 (ja) 1998-09-17
US5286338A (en) 1994-02-15
EP0614096A1 (de) 1994-09-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee