CN105204097B - 二氧化硅微透镜及其制造方法 - Google Patents
二氧化硅微透镜及其制造方法 Download PDFInfo
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- CN105204097B CN105204097B CN201510553805.3A CN201510553805A CN105204097B CN 105204097 B CN105204097 B CN 105204097B CN 201510553805 A CN201510553805 A CN 201510553805A CN 105204097 B CN105204097 B CN 105204097B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
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CN201510553805.3A CN105204097B (zh) | 2015-09-02 | 2015-09-02 | 二氧化硅微透镜及其制造方法 |
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CN201510553805.3A CN105204097B (zh) | 2015-09-02 | 2015-09-02 | 二氧化硅微透镜及其制造方法 |
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CN105204097A CN105204097A (zh) | 2015-12-30 |
CN105204097B true CN105204097B (zh) | 2017-03-22 |
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CN201510553805.3A Active CN105204097B (zh) | 2015-09-02 | 2015-09-02 | 二氧化硅微透镜及其制造方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107247314A (zh) * | 2017-06-23 | 2017-10-13 | 河南仕佳光子科技股份有限公司 | 与光波导集成的二氧化硅微透镜的制作方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105278010B (zh) * | 2015-09-25 | 2017-01-11 | 河南仕佳光子科技股份有限公司 | 二氧化硅微透镜的制造方法 |
CN113267838A (zh) * | 2021-05-17 | 2021-08-17 | 苏州苏纳光电有限公司 | 微型透镜集成微型光路反射镜的一体化组件及其制作方法 |
Family Cites Families (3)
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US5286338A (en) * | 1993-03-01 | 1994-02-15 | At&T Bell Laboratories | Methods for making microlens arrays |
EP0706070A3 (de) * | 1994-10-04 | 1997-04-02 | Siemens Ag | Verfahren zum Trockenätzen eines Halbleitersubstrats |
KR100843968B1 (ko) * | 2007-05-16 | 2008-07-03 | 주식회사 동부하이텍 | 이미지센서의 제조방법 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107247314A (zh) * | 2017-06-23 | 2017-10-13 | 河南仕佳光子科技股份有限公司 | 与光波导集成的二氧化硅微透镜的制作方法 |
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Address after: Hebi City, Henan province 458000 City National Economic and Technological Development Zone Road No. 201 Applicant after: HENAN SHIJIA PHOTONS TECHNOLOGY CO., LTD. Address before: Hebi City, Henan province 458000 City National Economic and Technological Development Zone Road No. 201 Applicant before: Henan Shijia Photons Technology Co., Ltd. |
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GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Silicon dioxide micro-lens and production method thereof Effective date of registration: 20180124 Granted publication date: 20170322 Pledgee: National Development Bank Pledgor: HENAN SHIJIA PHOTONS TECHNOLOGY CO., LTD. Registration number: 2018990000074 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200102 Granted publication date: 20170322 Pledgee: National Development Bank Pledgor: HENAN SHIJIA PHOTONS TECHNOLOGY CO., LTD. Registration number: 2018990000074 |