DE69402283D1 - Energiefilter mit Korrektur von chromatischen Aberrationen zweiter ordnung - Google Patents

Energiefilter mit Korrektur von chromatischen Aberrationen zweiter ordnung

Info

Publication number
DE69402283D1
DE69402283D1 DE69402283T DE69402283T DE69402283D1 DE 69402283 D1 DE69402283 D1 DE 69402283D1 DE 69402283 T DE69402283 T DE 69402283T DE 69402283 T DE69402283 T DE 69402283T DE 69402283 D1 DE69402283 D1 DE 69402283D1
Authority
DE
Germany
Prior art keywords
correction
chromatic aberrations
energy filter
order chromatic
order
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69402283T
Other languages
English (en)
Other versions
DE69402283T2 (de
Inventor
Jong Alan Frank C O Interna De
Johan Gustaaf C O Inter Bakker
Harald C O Internationaal Rose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8213841&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69402283(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Application granted granted Critical
Publication of DE69402283D1 publication Critical patent/DE69402283D1/de
Publication of DE69402283T2 publication Critical patent/DE69402283T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Particle Accelerators (AREA)
DE69402283T 1993-05-21 1994-05-19 Energiefilter mit Korrektur von chromatischen Aberrationen zweiter ordnung Revoked DE69402283T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP93201459 1993-05-21

Publications (2)

Publication Number Publication Date
DE69402283D1 true DE69402283D1 (de) 1997-04-30
DE69402283T2 DE69402283T2 (de) 1997-09-18

Family

ID=8213841

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69402283T Revoked DE69402283T2 (de) 1993-05-21 1994-05-19 Energiefilter mit Korrektur von chromatischen Aberrationen zweiter ordnung

Country Status (4)

Country Link
US (1) US5448063A (de)
EP (1) EP0647960B1 (de)
JP (1) JPH0794299A (de)
DE (1) DE69402283T2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3139920B2 (ja) * 1994-07-25 2001-03-05 株式会社日立製作所 エネルギフィルタおよびこれを備えた透過電子顕微鏡
DE69610287T2 (de) * 1995-10-03 2001-04-12 Koninkl Philips Electronics Nv Korpuskularoptisches gerät mit einer festen blende für den monochromatorfilter
DE19618744A1 (de) * 1996-05-09 1997-11-13 Siemens Ag Vorrichtung zur Ablenkung eines Elektronenstrahls von einer Kreisbahn auf eine andere
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
JP3497336B2 (ja) * 1996-12-03 2004-02-16 日本電子株式会社 エネルギーフィルタ
US6140645A (en) * 1997-10-20 2000-10-31 Jeol Ltd. Transmission electron microscope having energy filter
JP3691954B2 (ja) * 1998-02-26 2005-09-07 日本電子株式会社 結像型エネルギフィルタ歪補正装置
DE19828741A1 (de) * 1998-06-27 1999-12-30 Leo Elektronenmikroskopie Gmbh Elektronenmikroskop mit einem abbildenden magnetischen Energiefilter
DE19845901B4 (de) * 1998-10-06 2008-03-27 Zierick Mfg. Corp. Auf Kapillarwirkung basierender, verbesserter oberflächenmontierter Stiftsockel
DE60037071T2 (de) * 1999-06-01 2008-02-28 Jeol Ltd. Magentischer Energiefilter
DE10005347A1 (de) * 2000-02-08 2001-08-09 Leo Elektronenmikroskopie Gmbh Elektronenenergiefilter mit magnetischen Umlenkbereichen
DE10252129A1 (de) * 2002-11-04 2004-05-27 Omicron Nano Technology Gmbh Energiefilter für elektrisch geladene Teilchen und Verwendung des Energiefilters
KR100752333B1 (ko) * 2005-01-24 2007-08-28 주식회사 메디슨 3차원 초음파 도플러 이미지의 화질 개선 방법
US7711164B2 (en) * 2005-08-02 2010-05-04 Siemens Medical Solutiions Usa, Inc. System and method for automatic segmentation of vessels in breast MR sequences
US7394069B1 (en) 2005-08-30 2008-07-01 Kla-Tencor Technologies Corporation Large-field scanning of charged particles
EP1783811A3 (de) * 2005-11-02 2008-02-27 FEI Company Korrektor zur Korrektion von chromatischen Aberrationen in einem korpuskularoptiachen Apparat
RU2362234C1 (ru) 2007-10-03 2009-07-20 Вячеслав Данилович Саченко Корпускулярно-оптическая система формирования изображения (варианты)
EP2128885A1 (de) 2008-05-26 2009-12-02 FEI Company Quelle für geladene Teilchen mit integriertem Energiefilter
EP2197018A1 (de) 2008-12-12 2010-06-16 FEI Company Verfahren zur Bestimmung von Verzeichnungen in einer teilchenoptischen Vorrichtung
US8053725B2 (en) * 2009-06-29 2011-11-08 Fei Company Beam quality in FIB systems
DE102009044989A1 (de) * 2009-09-24 2011-03-31 Funnemann, Dietmar, Dr. Bildgebender Energiefilter für elektrisch geladene Teilchen sowie Spektroskop mit einem solchen
EP2325862A1 (de) * 2009-11-18 2011-05-25 Fei Company Korrektor für axiale Aberrationen einer teilchenoptischen Linse
EP2453461A1 (de) 2010-11-10 2012-05-16 FEI Company Quelle für geladene Teilchen mit integriertem elektrostatischen Energiefilter
EP2511936B1 (de) 2011-04-13 2013-10-02 Fei Company Verzerrungsfreie Stigmation eines TEM
US9111715B2 (en) 2011-11-08 2015-08-18 Fei Company Charged particle energy filter
US9767984B2 (en) 2014-09-30 2017-09-19 Fei Company Chicane blanker assemblies for charged particle beam systems and methods of using the same
JP6808772B2 (ja) * 2019-04-08 2021-01-06 日本電子株式会社 エネルギーフィルタおよび荷電粒子線装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3532326A1 (de) * 1985-09-11 1987-03-19 Europ Lab Molekularbiolog Elektronenspektrometer
DE3532699A1 (de) * 1985-09-13 1987-03-26 Zeiss Carl Fa Elektronenenergiefilter vom omega-typ
DE4041495A1 (de) * 1990-12-22 1992-06-25 Zeiss Carl Fa Elektronenenergiefilter, vorzugsweise vom alpha- oder omega-typ

Also Published As

Publication number Publication date
EP0647960A1 (de) 1995-04-12
JPH0794299A (ja) 1995-04-07
DE69402283T2 (de) 1997-09-18
EP0647960B1 (de) 1997-03-26
US5448063A (en) 1995-09-05

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8331 Complete revocation