DE69401994T2 - Verfahren zur Herstellung von Siliciumnitridpulver hohem Alpha-Gehalt - Google Patents

Verfahren zur Herstellung von Siliciumnitridpulver hohem Alpha-Gehalt

Info

Publication number
DE69401994T2
DE69401994T2 DE69401994T DE69401994T DE69401994T2 DE 69401994 T2 DE69401994 T2 DE 69401994T2 DE 69401994 T DE69401994 T DE 69401994T DE 69401994 T DE69401994 T DE 69401994T DE 69401994 T2 DE69401994 T2 DE 69401994T2
Authority
DE
Germany
Prior art keywords
production
silicon nitride
nitride powder
high alpha
alpha content
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69401994T
Other languages
English (en)
Other versions
DE69401994D1 (de
Inventor
Masanori Fukuhira
Hirofumi Fukuoka
Yoshiharu Konya
Masaki Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE69401994D1 publication Critical patent/DE69401994D1/de
Publication of DE69401994T2 publication Critical patent/DE69401994T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
DE69401994T 1993-06-11 1994-05-25 Verfahren zur Herstellung von Siliciumnitridpulver hohem Alpha-Gehalt Expired - Fee Related DE69401994T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16618393 1993-06-11

Publications (2)

Publication Number Publication Date
DE69401994D1 DE69401994D1 (de) 1997-04-17
DE69401994T2 true DE69401994T2 (de) 1997-07-31

Family

ID=15826618

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69401994T Expired - Fee Related DE69401994T2 (de) 1993-06-11 1994-05-25 Verfahren zur Herstellung von Siliciumnitridpulver hohem Alpha-Gehalt

Country Status (3)

Country Link
US (1) US5441694A (de)
EP (1) EP0628514B1 (de)
DE (1) DE69401994T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1294639A1 (de) * 2000-06-17 2003-03-26 Kunkel, Klaus Verfahren zur gewinnung von siliciumnitrid
WO2009012455A1 (en) 2007-07-18 2009-01-22 Oxane Materials, Inc. Proppants with carbide and/or nitride phases
CN102712481A (zh) * 2009-12-14 2012-10-03 Jx日矿日石金属株式会社 太阳能电池用多晶硅及其制造方法
JP5706149B2 (ja) 2010-02-26 2015-04-22 パナソニックＩｐマネジメント株式会社 電気装置
CN116216662B (zh) * 2023-02-01 2023-10-27 江苏富乐华功率半导体研究院有限公司 一种氮化硅粉体的合成方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3206318A (en) * 1961-04-25 1965-09-14 Showa Denko Kk Refractory material
US4087500A (en) * 1973-12-20 1978-05-02 Ford Motor Company Method of making a duo density silicon nitride article
JPS5458700A (en) * 1977-10-19 1979-05-11 Chisso Corp Production of alpha-type silicon nitride
JPS54120298A (en) * 1978-03-10 1979-09-18 Denki Kagaku Kogyo Kk Production of type silicon nitride
JPS5992906A (ja) * 1982-11-19 1984-05-29 Mitsubishi Metal Corp 窒化ケイ素の製造方法
US4716133A (en) * 1986-03-31 1987-12-29 Kyocera Corporation Method for production of silicon nitride sintered body
US5160719A (en) * 1990-07-24 1992-11-03 Eaton Corporation Process for nitriding silicon containing materials

Also Published As

Publication number Publication date
US5441694A (en) 1995-08-15
EP0628514A1 (de) 1994-12-14
EP0628514B1 (de) 1997-03-12
DE69401994D1 (de) 1997-04-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee