DE69326535T2 - Elektrostatische Halteplatte - Google Patents
Elektrostatische HalteplatteInfo
- Publication number
- DE69326535T2 DE69326535T2 DE1993626535 DE69326535T DE69326535T2 DE 69326535 T2 DE69326535 T2 DE 69326535T2 DE 1993626535 DE1993626535 DE 1993626535 DE 69326535 T DE69326535 T DE 69326535T DE 69326535 T2 DE69326535 T2 DE 69326535T2
- Authority
- DE
- Germany
- Prior art keywords
- holding plate
- electrostatic holding
- electrostatic
- plate
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP93301764A EP0615280B1 (de) | 1993-03-01 | 1993-03-09 | Elektrostatische Halteplatte |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69326535D1 DE69326535D1 (de) | 1999-10-28 |
DE69326535T2 true DE69326535T2 (de) | 2000-01-05 |
Family
ID=8214336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1993626535 Expired - Lifetime DE69326535T2 (de) | 1993-03-09 | 1993-03-09 | Elektrostatische Halteplatte |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE69326535T2 (de) |
-
1993
- 1993-03-09 DE DE1993626535 patent/DE69326535T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69326535D1 (de) | 1999-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |