DE69323253D1 - Optische integrierte Schaltung mit Lichtdetektor - Google Patents
Optische integrierte Schaltung mit LichtdetektorInfo
- Publication number
- DE69323253D1 DE69323253D1 DE69323253T DE69323253T DE69323253D1 DE 69323253 D1 DE69323253 D1 DE 69323253D1 DE 69323253 T DE69323253 T DE 69323253T DE 69323253 T DE69323253 T DE 69323253T DE 69323253 D1 DE69323253 D1 DE 69323253D1
- Authority
- DE
- Germany
- Prior art keywords
- integrated circuit
- light detector
- optical integrated
- optical
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4222487A JPH0667046A (ja) | 1992-08-21 | 1992-08-21 | 光集積回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69323253D1 true DE69323253D1 (de) | 1999-03-11 |
DE69323253T2 DE69323253T2 (de) | 1999-07-08 |
Family
ID=16783203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69323253T Expired - Lifetime DE69323253T2 (de) | 1992-08-21 | 1993-08-23 | Optische integrierte Schaltung mit Lichtdetektor |
Country Status (5)
Country | Link |
---|---|
US (1) | US5410622A (de) |
EP (1) | EP0585094B1 (de) |
JP (1) | JPH0667046A (de) |
CA (1) | CA2104278C (de) |
DE (1) | DE69323253T2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3896550B2 (ja) * | 1994-11-24 | 2007-03-22 | Smc株式会社 | リニアアクチュエータ |
US5568574A (en) * | 1995-06-12 | 1996-10-22 | University Of Southern California | Modulator-based photonic chip-to-chip interconnections for dense three-dimensional multichip module integration |
US6078707A (en) * | 1995-09-22 | 2000-06-20 | Sharp Kabushiki Kaisha | Waveguide-photodetector, method for producing the same, waveguide usable in the waveguide-photodetector, and method for producing the same |
FR2748604B1 (fr) * | 1996-05-13 | 1998-08-07 | Commissariat Energie Atomique | Photodetecteur a structure optique resonnante avec un reseau |
US6236773B1 (en) | 1998-12-15 | 2001-05-22 | Texas Instruments Incorporated | Single wavelength semiconductor laser with grating-assisted dielectric waveguide coupler |
GB2321130B (en) * | 1997-12-23 | 1998-12-23 | Bookham Technology Ltd | An integrated optical transceiver |
GB2339301B (en) * | 1998-07-07 | 2000-06-14 | Bookham Technology Ltd | Integrated optical device providing attenuation |
US6363096B1 (en) * | 1999-08-30 | 2002-03-26 | Lucent Technologies Inc. | Article comprising a plastic laser |
JP2001083349A (ja) * | 1999-09-14 | 2001-03-30 | Sumitomo Electric Ind Ltd | 光平面導波路型回路モジュール |
US6603902B1 (en) | 1999-10-26 | 2003-08-05 | Bti Photonics Inc. | Wavelength selective variable reflector |
US6693033B2 (en) * | 2000-02-10 | 2004-02-17 | Motorola, Inc. | Method of removing an amorphous oxide from a monocrystalline surface |
US20020096683A1 (en) * | 2001-01-19 | 2002-07-25 | Motorola, Inc. | Structure and method for fabricating GaN devices utilizing the formation of a compliant substrate |
US7039288B2 (en) * | 2001-03-21 | 2006-05-02 | Intel Corporation | Fabrication of optical waveguides for reduction of minimum waveguide spacing |
US6709989B2 (en) | 2001-06-21 | 2004-03-23 | Motorola, Inc. | Method for fabricating a semiconductor structure including a metal oxide interface with silicon |
US6693298B2 (en) | 2001-07-20 | 2004-02-17 | Motorola, Inc. | Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same |
US7019332B2 (en) * | 2001-07-20 | 2006-03-28 | Freescale Semiconductor, Inc. | Fabrication of a wavelength locker within a semiconductor structure |
US20030026310A1 (en) * | 2001-08-06 | 2003-02-06 | Motorola, Inc. | Structure and method for fabrication for a lighting device |
US6639249B2 (en) * | 2001-08-06 | 2003-10-28 | Motorola, Inc. | Structure and method for fabrication for a solid-state lighting device |
US6673667B2 (en) * | 2001-08-15 | 2004-01-06 | Motorola, Inc. | Method for manufacturing a substantially integral monolithic apparatus including a plurality of semiconductor materials |
US6987908B2 (en) * | 2001-08-24 | 2006-01-17 | T-Networks, Inc. | Grating dispersion compensator and method of manufacture |
US20030053753A1 (en) * | 2001-09-19 | 2003-03-20 | Agere Systems Inc. | Optical device having a grated coupler and a method of manufacture therefor |
US6916717B2 (en) * | 2002-05-03 | 2005-07-12 | Motorola, Inc. | Method for growing a monocrystalline oxide layer and for fabricating a semiconductor device on a monocrystalline substrate |
US7065271B2 (en) * | 2002-10-25 | 2006-06-20 | Intel Corporation | Optical grating coupler |
US7169619B2 (en) * | 2002-11-19 | 2007-01-30 | Freescale Semiconductor, Inc. | Method for fabricating semiconductor structures on vicinal substrates using a low temperature, low pressure, alkaline earth metal-rich process |
US6806202B2 (en) | 2002-12-03 | 2004-10-19 | Motorola, Inc. | Method of removing silicon oxide from a surface of a substrate |
US6963090B2 (en) | 2003-01-09 | 2005-11-08 | Freescale Semiconductor, Inc. | Enhancement mode metal-oxide-semiconductor field effect transistor |
DE10352741B4 (de) | 2003-11-12 | 2012-08-16 | Austriamicrosystems Ag | Strahlungsdetektierendes optoelektronisches Bauelement, Verfahren zu dessen Herstellung und Verwendung |
JP2005283435A (ja) * | 2004-03-30 | 2005-10-13 | Japan Aviation Electronics Industry Ltd | 赤外線センサ |
US20070041679A1 (en) * | 2005-07-01 | 2007-02-22 | Zhaoran Huang | Integrated thin film MSM photodetector/grating for WDM |
AU2008236529B2 (en) * | 2007-04-06 | 2013-09-05 | Terumo Bct, Inc. | Improved bioreactor surfaces |
US20130313668A1 (en) * | 2012-05-24 | 2013-11-28 | Gregory S. Spencer | Photronic device with reflector and method for forming |
US9165591B2 (en) | 2013-08-07 | 2015-10-20 | Seagate Technology Llc | Grating based laser and power monitor for a heat-assisted magnetic recording device |
US11543774B2 (en) * | 2018-07-02 | 2023-01-03 | Duke University | Out-of-plane computer-generated multicolor waveguide holography |
CN113474721B (zh) * | 2019-04-26 | 2023-10-20 | 松下知识产权经营株式会社 | 光设备 |
US11906351B1 (en) * | 2019-09-25 | 2024-02-20 | National Technology & Engineering Solutions Of Sandia, Llc | Monolithic integration of optical waveguides with metal routing layers |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6079788A (ja) * | 1983-10-06 | 1985-05-07 | Nec Corp | 光双安定素子 |
JPS60189712A (ja) * | 1984-03-10 | 1985-09-27 | Canon Inc | 光結合器の製作方法 |
JPS6286307A (ja) * | 1985-10-11 | 1987-04-20 | Canon Inc | グレ−テイングカツプラ |
JPS63114288A (ja) * | 1986-10-31 | 1988-05-19 | Fujitsu Ltd | 半導体発光素子 |
GB2197122B (en) * | 1986-11-03 | 1990-01-24 | Stc Plc | Injection laser and monitor photosensor combination |
US5070488A (en) * | 1988-06-29 | 1991-12-03 | Atsuko Fukushima | Optical integrated circuit and optical apparatus |
US5193130A (en) * | 1988-08-05 | 1993-03-09 | Matsushita Electric Industrial Co., Ltd. | Light deflecting device |
JPH0287581A (ja) * | 1988-09-26 | 1990-03-28 | Canon Inc | 波長分波光検出器 |
EP0386797B1 (de) * | 1989-03-10 | 1997-06-04 | Canon Kabushiki Kaisha | Photodetektor mit wellenlängenselektivem optischem Koppler |
US4942366A (en) * | 1989-03-21 | 1990-07-17 | General Electric Company | Amplifier device with coupled surface emitting grating |
JP3167391B2 (ja) * | 1992-01-16 | 2001-05-21 | 株式会社リコー | 光集積デバイス実装パッケージ |
-
1992
- 1992-08-21 JP JP4222487A patent/JPH0667046A/ja active Pending
-
1993
- 1993-08-17 CA CA002104278A patent/CA2104278C/en not_active Expired - Lifetime
- 1993-08-19 US US08/109,275 patent/US5410622A/en not_active Expired - Lifetime
- 1993-08-23 DE DE69323253T patent/DE69323253T2/de not_active Expired - Lifetime
- 1993-08-23 EP EP93306653A patent/EP0585094B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2104278A1 (en) | 1994-02-22 |
EP0585094B1 (de) | 1999-01-27 |
CA2104278C (en) | 1996-12-17 |
US5410622A (en) | 1995-04-25 |
EP0585094A1 (de) | 1994-03-02 |
DE69323253T2 (de) | 1999-07-08 |
JPH0667046A (ja) | 1994-03-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |