DE69320856T2 - Verfahren zur elektrochemischen Feinbearbeitung - Google Patents
Verfahren zur elektrochemischen FeinbearbeitungInfo
- Publication number
- DE69320856T2 DE69320856T2 DE69320856T DE69320856T DE69320856T2 DE 69320856 T2 DE69320856 T2 DE 69320856T2 DE 69320856 T DE69320856 T DE 69320856T DE 69320856 T DE69320856 T DE 69320856T DE 69320856 T2 DE69320856 T2 DE 69320856T2
- Authority
- DE
- Germany
- Prior art keywords
- electrochemical finishing
- electrochemical
- finishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7473392A JPH05271998A (ja) | 1992-03-30 | 1992-03-30 | 微細加工装置 |
JP4078031A JP3041740B2 (ja) | 1992-03-31 | 1992-03-31 | 微細加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69320856D1 DE69320856D1 (de) | 1998-10-15 |
DE69320856T2 true DE69320856T2 (de) | 1999-02-04 |
Family
ID=26415914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69320856T Expired - Fee Related DE69320856T2 (de) | 1992-03-30 | 1993-03-22 | Verfahren zur elektrochemischen Feinbearbeitung |
Country Status (3)
Country | Link |
---|---|
US (1) | US5366613A (de) |
EP (1) | EP0563744B1 (de) |
DE (1) | DE69320856T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5641391A (en) * | 1995-05-15 | 1997-06-24 | Hunter; Ian W. | Three dimensional microfabrication by localized electrodeposition and etching |
JPH09330864A (ja) * | 1996-06-10 | 1997-12-22 | Ge Yokogawa Medical Syst Ltd | 複合圧電物質製造方法及び複合圧電物質製造用マスク |
AU4141697A (en) | 1996-09-06 | 1998-03-26 | Obducat Ab | Method for anisotropic etching of structures in conducting materials |
US5865978A (en) * | 1997-05-09 | 1999-02-02 | Cohen; Adam E. | Near-field photolithographic masks and photolithography; nanoscale patterning techniques; apparatus and method therefor |
IL120866A0 (en) * | 1997-05-20 | 1997-09-30 | Micro Components Systems Ltd | Process for producing an aluminum substrate |
IL127256A (en) | 1998-11-25 | 2002-09-12 | Micro Components Ltd | A device for packaging electronic components, a process for its manufacture and a pin device used in the process |
GB0416600D0 (en) * | 2004-07-24 | 2004-08-25 | Univ Newcastle | A process for manufacturing micro- and nano-devices |
US20080257867A1 (en) * | 2004-08-26 | 2008-10-23 | Ajay P Malshe | Apparatus and Method for Nano-Scale Electric Discharge Machining |
US20060207890A1 (en) | 2005-03-15 | 2006-09-21 | Norbert Staud | Electrochemical etching |
US7569490B2 (en) | 2005-03-15 | 2009-08-04 | Wd Media, Inc. | Electrochemical etching |
CN109292731A (zh) * | 2018-09-11 | 2019-02-01 | 西南交通大学 | 基于电化学摩擦诱导的微纳加工方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2492214A (en) * | 1945-10-25 | 1949-12-27 | Douglass C Fonda | Method of marking tungsten carbide |
CH352541A (fr) * | 1956-10-24 | 1961-02-28 | Spring Comte Yolande | Procédé de gravure électrolytique |
US3035990A (en) * | 1958-11-05 | 1962-05-22 | Collins Radio Co | Chemical blanking of aluminum sheet metal |
US3325384A (en) * | 1963-11-13 | 1967-06-13 | Buckbee Mears Co | Shaped cathode for electrolytic etching |
FR2559960B1 (fr) * | 1984-02-20 | 1987-03-06 | Solems Sa | Procede de formation de circuits electriques en couche mince et produits obtenus |
GB2206541A (en) * | 1987-07-02 | 1989-01-11 | Psi Star Inc | Manufacturing printed circuit boards |
US5149404A (en) * | 1990-12-14 | 1992-09-22 | At&T Bell Laboratories | Fine line scribing of conductive material |
-
1993
- 1993-03-22 EP EP93104710A patent/EP0563744B1/de not_active Expired - Lifetime
- 1993-03-22 DE DE69320856T patent/DE69320856T2/de not_active Expired - Fee Related
- 1993-03-29 US US08/038,921 patent/US5366613A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0563744A3 (de) | 1994-01-19 |
US5366613A (en) | 1994-11-22 |
EP0563744B1 (de) | 1998-09-09 |
DE69320856D1 (de) | 1998-10-15 |
EP0563744A2 (de) | 1993-10-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN |
|
8339 | Ceased/non-payment of the annual fee |