DE69318800D1 - Heizelement für thermischen Tintenstrahldruckkopf - Google Patents

Heizelement für thermischen Tintenstrahldruckkopf

Info

Publication number
DE69318800D1
DE69318800D1 DE69318800T DE69318800T DE69318800D1 DE 69318800 D1 DE69318800 D1 DE 69318800D1 DE 69318800 T DE69318800 T DE 69318800T DE 69318800 T DE69318800 T DE 69318800T DE 69318800 D1 DE69318800 D1 DE 69318800D1
Authority
DE
Germany
Prior art keywords
heating element
inkjet printhead
thermal inkjet
thermal
printhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69318800T
Other languages
English (en)
Other versions
DE69318800T2 (de
Inventor
Cathie J Burke
Daniel S Brennan
Keith G Kamekona
Roberto E Proano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE69318800D1 publication Critical patent/DE69318800D1/de
Publication of DE69318800T2 publication Critical patent/DE69318800T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
DE69318800T 1992-11-05 1993-11-02 Heizelement für thermischen Tintenstrahldruckkopf Expired - Fee Related DE69318800T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97227792A 1992-11-05 1992-11-05

Publications (2)

Publication Number Publication Date
DE69318800D1 true DE69318800D1 (de) 1998-07-02
DE69318800T2 DE69318800T2 (de) 1998-12-03

Family

ID=25519454

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318800T Expired - Fee Related DE69318800T2 (de) 1992-11-05 1993-11-02 Heizelement für thermischen Tintenstrahldruckkopf

Country Status (6)

Country Link
US (1) US5639386A (de)
EP (1) EP0596705B1 (de)
JP (1) JPH06143581A (de)
BR (1) BR9304491A (de)
DE (1) DE69318800T2 (de)
MX (1) MX9306882A (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0729834B1 (de) * 1995-03-03 2002-06-12 Canon Kabushiki Kaisha Tintenstrahlkopf, Substrat für einen Tintenstrahlkopf und Tintenstrahlgerät
US5774148A (en) * 1995-10-19 1998-06-30 Lexmark International, Inc. Printhead with field oxide as thermal barrier in chip
CA2306384A1 (en) * 1997-10-14 1999-04-22 Patterning Technologies Limited Method of forming an electronic device
US5980025A (en) * 1997-11-21 1999-11-09 Xerox Corporation Thermal inkjet printhead with increased resistance control and method for making the printhead
JP3559701B2 (ja) * 1997-12-18 2004-09-02 キヤノン株式会社 インクジェット記録ヘッド用基板、該基板の製造方法及びインクジェット記録ヘッド及びインクジェット記録装置
US6039436A (en) * 1998-03-12 2000-03-21 Xerox Corporation Thermal ink-jet printhead with lateral thermal insulation for the heating elements
US7323634B2 (en) * 1998-10-14 2008-01-29 Patterning Technologies Limited Method of forming an electronic device
US6146914A (en) * 1998-12-07 2000-11-14 Xerox Corporation Thermal ink jet printhead with increased heater resistor control
US6883894B2 (en) * 2001-03-19 2005-04-26 Hewlett-Packard Development Company, L.P. Printhead with looped gate transistor structures
US7020365B2 (en) * 2002-08-29 2006-03-28 Micron Technology, Inc. Resistive heater for thermo optic device
US7120336B2 (en) * 2002-08-29 2006-10-10 Micron Technology, Inc. Resonator for thermo optic device
US7006746B2 (en) * 2002-08-29 2006-02-28 Micron Technology, Inc. Waveguide for thermo optic device
KR100555739B1 (ko) * 2002-12-02 2006-03-03 삼성전자주식회사 잉크젯 프린트 헤드의 히터장치 및 그 제조방법
US6886921B2 (en) * 2003-04-02 2005-05-03 Lexmark International, Inc. Thin film heater resistor for an ink jet printer
US7366370B2 (en) * 2004-08-20 2008-04-29 Nortel Networks Limited Technique for photonic switching
TW201313490A (zh) * 2011-09-29 2013-04-01 Int United Technology Co Ltd 噴墨頭加熱晶片及其製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3516915A (en) * 1968-05-01 1970-06-23 Bell Telephone Labor Inc Sputtering technique
US4063210A (en) * 1976-02-17 1977-12-13 General Motors Corporation Temperature independent semiconductor resistor and method of making same
JPS5693564A (en) * 1979-12-28 1981-07-29 Canon Inc Recording method by jetting of liquid droplet
US4467519A (en) * 1982-04-01 1984-08-28 International Business Machines Corporation Process for fabricating polycrystalline silicon film resistors
US4532530A (en) * 1984-03-09 1985-07-30 Xerox Corporation Bubble jet printing device
DE3613372A1 (de) * 1986-03-21 1987-09-24 Siemens Ag Verfahren zur einstellung des schichtwiderstandes von duennen polykristallinen siliziumschichten in integrierten halbleiterschaltungen
JPS63216966A (ja) * 1987-03-06 1988-09-09 Toshiba Corp スパツタタ−ゲツト
US4947193A (en) * 1989-05-01 1990-08-07 Xerox Corporation Thermal ink jet printhead with improved heating elements
US5169806A (en) * 1990-09-26 1992-12-08 Xerox Corporation Method of making amorphous deposited polycrystalline silicon thermal ink jet transducers

Also Published As

Publication number Publication date
JPH06143581A (ja) 1994-05-24
MX9306882A (es) 1995-01-31
EP0596705B1 (de) 1998-05-27
US5639386A (en) 1997-06-17
DE69318800T2 (de) 1998-12-03
BR9304491A (pt) 1994-05-10
EP0596705A2 (de) 1994-05-11
EP0596705A3 (de) 1994-08-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee