DE69316434D1 - Methode und Vorrichtung zur Bestimmung der interstitiellen Sauerstoffkonzentration in monokristallinem Silizium - Google Patents

Methode und Vorrichtung zur Bestimmung der interstitiellen Sauerstoffkonzentration in monokristallinem Silizium

Info

Publication number
DE69316434D1
DE69316434D1 DE69316434T DE69316434T DE69316434D1 DE 69316434 D1 DE69316434 D1 DE 69316434D1 DE 69316434 T DE69316434 T DE 69316434T DE 69316434 T DE69316434 T DE 69316434T DE 69316434 D1 DE69316434 D1 DE 69316434D1
Authority
DE
Germany
Prior art keywords
determining
oxygen concentration
monocrystalline silicon
interstitial oxygen
interstitial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69316434T
Other languages
English (en)
Other versions
DE69316434T2 (de
Inventor
Yutaka Kitagawara
Hiroshi Kubota
Masaro Tamatsuka
Takao Takenaka
Kazuhisa Takamizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14487992A external-priority patent/JP2696290B2/ja
Priority claimed from JP15140792A external-priority patent/JP2827703B2/ja
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE69316434D1 publication Critical patent/DE69316434D1/de
Publication of DE69316434T2 publication Critical patent/DE69316434T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69316434T 1992-05-11 1993-03-30 Methode und Vorrichtung zur Bestimmung der interstitiellen Sauerstoffkonzentration in monokristallinem Silizium Expired - Fee Related DE69316434T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14487992A JP2696290B2 (ja) 1992-05-11 1992-05-11 酸素析出したシリコン単結晶中の格子間酸素濃度測定方法
JP15140792A JP2827703B2 (ja) 1992-05-19 1992-05-19 シリコン単結晶の格子間酸素濃度の測定方法及び測定装置

Publications (2)

Publication Number Publication Date
DE69316434D1 true DE69316434D1 (de) 1998-02-26
DE69316434T2 DE69316434T2 (de) 1998-07-16

Family

ID=26476161

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69316434T Expired - Fee Related DE69316434T2 (de) 1992-05-11 1993-03-30 Methode und Vorrichtung zur Bestimmung der interstitiellen Sauerstoffkonzentration in monokristallinem Silizium

Country Status (3)

Country Link
US (1) US5386118A (de)
EP (2) EP0570100B1 (de)
DE (1) DE69316434T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE502694C2 (sv) * 1994-04-22 1995-12-11 Foersvarets Forskningsanstalt Sätt att bestämma omfattningen av syreprecipitat i kisel
US5550374A (en) * 1994-05-12 1996-08-27 Memc Electronic Materials, Inc. Methods and apparatus for determining interstitial oxygen content of relatively large diameter silicon crystals by infrared spectroscopy
US5703362A (en) * 1996-01-02 1997-12-30 General Electric Company Method for nondestructive/noncontact detection and quantification of alpha case on a surface of a workpiece made of titanium or a titanium-based alloy
US5886563A (en) * 1996-03-25 1999-03-23 Nasila; Mikko J. Interlocked half-bridge circuit
US5795381A (en) * 1996-09-09 1998-08-18 Memc Electrical Materials, Inc. SIO probe for real-time monitoring and control of oxygen during czochralski growth of single crystal silicon
JP3446572B2 (ja) * 1997-11-11 2003-09-16 信越半導体株式会社 シリコン単結晶中の酸素析出挙動を割り出す方法、およびシリコン単結晶ウエーハ製造工程の決定方法、並びにプログラムを記録した記録媒体
US6242739B1 (en) 1998-04-21 2001-06-05 Alexander P. Cherkassky Method and apparatus for non-destructive determination of film thickness and dopant concentration using fourier transform infrared spectrometry
WO2000048051A1 (de) * 1999-02-10 2000-08-17 Schunk Kohlenstofftechnik Gmbh Verfahren zur regelung eines hochtemperatur-gasphasen-prozesses und verwendung des verfahrens
WO2015001591A1 (ja) * 2013-06-30 2015-01-08 株式会社Sumco シリカガラスルツボの検査方法
FR3027675B1 (fr) * 2014-10-22 2017-11-24 Commissariat Energie Atomique Procede de caracterisation de la concentration en oxygene interstitiel dans un lingot semi-conducteur
CN105548075A (zh) * 2016-01-08 2016-05-04 楚天科技股份有限公司 一种玻璃药瓶内氧气含量的检测装置与方法
CN110398439B (zh) * 2019-08-20 2022-03-11 中国电建集团成都勘测设计研究院有限公司 一种土密度灌砂测试方法及灌砂器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4590574A (en) * 1983-04-29 1986-05-20 International Business Machines Corp. Method for determining oxygen and carbon in silicon semiconductor wafer having rough surface
JPS62197743A (ja) * 1986-02-25 1987-09-01 Toshiba Corp 赤外吸収測定装置
US5066599A (en) * 1989-07-27 1991-11-19 Fujitsu Limited Silicon crystal oxygen evaluation method using fourier transform infrared spectroscopy (ftir) and semiconductor device fabrication method using the same

Also Published As

Publication number Publication date
EP0570100A2 (de) 1993-11-18
EP0803725A1 (de) 1997-10-29
US5386118A (en) 1995-01-31
EP0570100A3 (de) 1994-01-26
DE69316434T2 (de) 1998-07-16
EP0570100B1 (de) 1998-01-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee