DE69315768D1 - Einrichtung zur Beseitigung von Schwingungen des Typs "Null-Kraft Regelung" - Google Patents

Einrichtung zur Beseitigung von Schwingungen des Typs "Null-Kraft Regelung"

Info

Publication number
DE69315768D1
DE69315768D1 DE69315768T DE69315768T DE69315768D1 DE 69315768 D1 DE69315768 D1 DE 69315768D1 DE 69315768 T DE69315768 T DE 69315768T DE 69315768 T DE69315768 T DE 69315768T DE 69315768 D1 DE69315768 D1 DE 69315768D1
Authority
DE
Germany
Prior art keywords
type
force control
zero force
eliminating vibrations
vibrations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69315768T
Other languages
English (en)
Other versions
DE69315768T2 (de
Inventor
Yoichi Kanemitsu
Katsuhide Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Kajima Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Kajima Corp filed Critical Ebara Corp
Publication of DE69315768D1 publication Critical patent/DE69315768D1/de
Application granted granted Critical
Publication of DE69315768T2 publication Critical patent/DE69315768T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Details Of Measuring And Other Instruments (AREA)
DE69315768T 1992-08-26 1993-08-24 Einrichtung zur Beseitigung von Schwingungen des Typs "Null-Kraft Regelung" Expired - Fee Related DE69315768T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4250596A JPH07111215B2 (ja) 1992-08-26 1992-08-26 除振装置

Publications (2)

Publication Number Publication Date
DE69315768D1 true DE69315768D1 (de) 1998-01-29
DE69315768T2 DE69315768T2 (de) 1998-07-16

Family

ID=17210239

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69315768T Expired - Fee Related DE69315768T2 (de) 1992-08-26 1993-08-24 Einrichtung zur Beseitigung von Schwingungen des Typs "Null-Kraft Regelung"

Country Status (4)

Country Link
US (1) US5449985A (de)
EP (1) EP0584790B1 (de)
JP (1) JPH07111215B2 (de)
DE (1) DE69315768T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5666014A (en) * 1994-07-20 1997-09-09 Mechanical Technology Inc. Velocity-controlled magnetic bearings
DE69526164T2 (de) * 1994-09-06 2002-08-14 Bridgestone Corp Schwingungsisolierungsgerät und von Schwingungen isolierter Tisch
US5604413A (en) * 1994-09-07 1997-02-18 Polytechnic University Apparatus for improving operational performance of a machine or device
US6154000A (en) * 1994-09-07 2000-11-28 Omnitek Research & Development, Inc. Apparatus for providing a controlled deflection and/or actuator apparatus
TW406292B (en) * 1997-06-03 2000-09-21 Koninkl Philips Electronics Nv Motion damper with electrical amplifier, and lithographic device with such a motion damper
US6213442B1 (en) * 1998-10-08 2001-04-10 Lord Corporation Isolation system for isolation tables and the like
US6473159B1 (en) * 1999-05-31 2002-10-29 Canon Kabushiki Kaisha Anti-vibration system in exposure apparatus
US7241993B2 (en) 2000-06-27 2007-07-10 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US7049585B2 (en) 2000-07-27 2006-05-23 Ebara Corporation Sheet beam-type testing apparatus
US6904807B1 (en) * 2003-12-04 2005-06-14 Labworks, Inc. Shakers and methods of testing
SG112944A1 (en) * 2003-12-22 2005-07-28 Inventio Ag Equipment for vibration damping of a lift cage
DE102004025356A1 (de) * 2004-05-19 2005-12-15 Otto-Von-Guericke-Universität Magdeburg Anordnung mit einem magnetgelagerten Tisch zum hochgenauen Positionieren, Halten, Unterstützen oder Ausrichten von Objekten
US7352198B2 (en) * 2006-01-18 2008-04-01 Electroglas, Inc. Methods and apparatuses for improved stabilization in a probing system
US8519728B2 (en) * 2008-12-12 2013-08-27 Formfactor, Inc. Compliance control methods and apparatuses
US8120304B2 (en) 2008-12-12 2012-02-21 Formfactor, Inc. Method for improving motion times of a stage
US9081307B2 (en) 2010-07-09 2015-07-14 Asml Netherlands B.V. Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method
CN102748419A (zh) * 2011-04-22 2012-10-24 赖向阳 磁悬浮减振方法
JP6152001B2 (ja) * 2012-08-03 2017-06-21 キヤノン株式会社 アクティブ除振装置、除振方法、加工装置、検査装置、露光装置及びワークの製造方法
CN107020478B (zh) * 2016-01-31 2019-01-15 南京理工大学 一种磁悬浮和磁驱动多轴柔性变位装置
GB2572350B (en) * 2018-03-27 2023-01-25 Hitachi Rail Ltd An electromechanical generator for converting mechanical vibrational energy into electrical energy
CN110658533B (zh) * 2019-09-10 2023-07-14 金陵科技学院 一种基于北斗卫星的定位器安装盒
CN115420450A (zh) * 2022-08-21 2022-12-02 哈尔滨工业大学 基于驱动电流反馈控制的电磁振动台系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1933031C3 (de) * 1969-06-30 1978-10-26 Karl 5170 Juelich Boden Magnetische Lagerung
US3860300A (en) * 1971-07-07 1975-01-14 Cambridge Thermionic Corp Virtually zero powered magnetic suspension
JPS5326813B2 (de) * 1973-06-27 1978-08-04
JPS5230657A (en) * 1975-08-23 1977-03-08 Hokoku Kogyo Control method and device for heated air temperature of grain dryer
JPS6211218A (ja) * 1985-07-08 1987-01-20 Matsushita Electronics Corp 半導体装置の製造方法
US4908536A (en) * 1985-10-30 1990-03-13 Hudimac Albert A Vibration suppressing by electrical termination impedance
JP2732562B2 (ja) * 1986-05-14 1998-03-30 株式会社東芝 浮上式搬送装置
JPH0721438B2 (ja) * 1987-08-21 1995-03-08 株式会社島津製作所 振動試験機
JPH07120216B2 (ja) * 1988-10-21 1995-12-20 新技術事業団 位置制御方法
JP2539906B2 (ja) * 1989-01-31 1996-10-02 鹿島建設株式会社 磁気式防振装置
US5385217A (en) * 1991-05-20 1995-01-31 Ebara Corporation Vibration eliminating apparatus for elminating vibration of an installation floor

Also Published As

Publication number Publication date
JPH06288431A (ja) 1994-10-11
US5449985A (en) 1995-09-12
EP0584790B1 (de) 1997-12-17
DE69315768T2 (de) 1998-07-16
EP0584790A1 (de) 1994-03-02
JPH07111215B2 (ja) 1995-11-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EBARA CORP., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee