DE69305375D1 - Schaltbarer resonanter Filter für optische Strahlung - Google Patents

Schaltbarer resonanter Filter für optische Strahlung

Info

Publication number
DE69305375D1
DE69305375D1 DE69305375T DE69305375T DE69305375D1 DE 69305375 D1 DE69305375 D1 DE 69305375D1 DE 69305375 T DE69305375 T DE 69305375T DE 69305375 T DE69305375 T DE 69305375T DE 69305375 D1 DE69305375 D1 DE 69305375D1
Authority
DE
Germany
Prior art keywords
optical radiation
resonant filter
switchable resonant
switchable
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69305375T
Other languages
English (en)
Other versions
DE69305375T2 (de
Inventor
Gregory A Magel
Jon C Zimmerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69305375D1 publication Critical patent/DE69305375D1/de
Application granted granted Critical
Publication of DE69305375T2 publication Critical patent/DE69305375T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/002—Optical devices or arrangements for the control of light using movable or deformable optical elements the movement or the deformation controlling the frequency of light, e.g. by Doppler effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Filters (AREA)
DE69305375T 1992-02-05 1993-02-03 Schaltbarer resonanter Filter für optische Strahlung Expired - Fee Related DE69305375T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/831,719 US5231532A (en) 1992-02-05 1992-02-05 Switchable resonant filter for optical radiation

Publications (2)

Publication Number Publication Date
DE69305375D1 true DE69305375D1 (de) 1996-11-21
DE69305375T2 DE69305375T2 (de) 1997-02-27

Family

ID=25259707

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69305375T Expired - Fee Related DE69305375T2 (de) 1992-02-05 1993-02-03 Schaltbarer resonanter Filter für optische Strahlung

Country Status (7)

Country Link
US (1) US5231532A (de)
EP (1) EP0554847B1 (de)
JP (1) JPH06221921A (de)
KR (1) KR100294035B1 (de)
CA (1) CA2088176C (de)
DE (1) DE69305375T2 (de)
TW (1) TW235339B (de)

Families Citing this family (198)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5835255A (en) * 1986-04-23 1998-11-10 Etalon, Inc. Visible spectrum modulator arrays
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7830587B2 (en) 1993-03-17 2010-11-09 Qualcomm Mems Technologies, Inc. Method and device for modulating light with semiconductor substrate
DE4336841C1 (de) * 1993-10-28 1995-05-04 Deutsche Aerospace Abdeckung für Radarantennen
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7808694B2 (en) 1994-05-05 2010-10-05 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7619810B2 (en) * 1994-05-05 2009-11-17 Idc, Llc Systems and methods of testing micro-electromechanical devices
US6710908B2 (en) 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US7138984B1 (en) 2001-06-05 2006-11-21 Idc, Llc Directly laminated touch sensitive screen
US7776631B2 (en) 1994-05-05 2010-08-17 Qualcomm Mems Technologies, Inc. MEMS device and method of forming a MEMS device
US20010003487A1 (en) * 1996-11-05 2001-06-14 Mark W. Miles Visible spectrum modulator arrays
US7460291B2 (en) 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US7826120B2 (en) * 1994-05-05 2010-11-02 Qualcomm Mems Technologies, Inc. Method and device for multi-color interferometric modulation
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US7852545B2 (en) * 1994-05-05 2010-12-14 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7738157B2 (en) 1994-05-05 2010-06-15 Qualcomm Mems Technologies, Inc. System and method for a MEMS device
US6680792B2 (en) 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
JP2674545B2 (ja) * 1995-01-20 1997-11-12 日本電気株式会社 赤外線検出器及びその駆動方法
US7907319B2 (en) 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
US5646772A (en) * 1996-05-10 1997-07-08 Lucent Technologies Inc. Methods and apparatus for a multi-electrode micromechanical optical modulator
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
JP2002207182A (ja) * 2001-01-10 2002-07-26 Sony Corp 光学多層構造体およびその製造方法、光スイッチング素子、並びに画像表示装置
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
JP3786106B2 (ja) * 2003-08-11 2006-06-14 セイコーエプソン株式会社 波長可変光フィルタ及びその製造方法
TWI231865B (en) 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TW593126B (en) 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7532194B2 (en) 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
US7119945B2 (en) * 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7720148B2 (en) * 2004-03-26 2010-05-18 The Hong Kong University Of Science And Technology Efficient multi-frame motion estimation for video compression
US7060895B2 (en) 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7256922B2 (en) 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
KR101255691B1 (ko) 2004-07-29 2013-04-17 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7602375B2 (en) 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7368803B2 (en) 2004-09-27 2008-05-06 Idc, Llc System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7453579B2 (en) 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7259449B2 (en) 2004-09-27 2007-08-21 Idc, Llc Method and system for sealing a substrate
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7289256B2 (en) 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7554714B2 (en) 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7460246B2 (en) 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
US7586484B2 (en) 2004-09-27 2009-09-08 Idc, Llc Controller and driver features for bi-stable display
US7299681B2 (en) 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7916103B2 (en) 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7553684B2 (en) 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7369294B2 (en) 2004-09-27 2008-05-06 Idc, Llc Ornamental display device
TW200628833A (en) 2004-09-27 2006-08-16 Idc Llc Method and device for multistate interferometric light modulation
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7161730B2 (en) 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7359066B2 (en) 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US20060176487A1 (en) 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US7535466B2 (en) 2004-09-27 2009-05-19 Idc, Llc System with server based control of client device display features
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7415186B2 (en) 2004-09-27 2008-08-19 Idc, Llc Methods for visually inspecting interferometric modulators for defects
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7492502B2 (en) 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7349136B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7429334B2 (en) 2004-09-27 2008-09-30 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7343080B2 (en) 2004-09-27 2008-03-11 Idc, Llc System and method of testing humidity in a sealed MEMS device
TW200628877A (en) 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
KR20080027236A (ko) 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ｉｃ 및 디스플레이 패널 구성
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
JP2009503565A (ja) 2005-07-22 2009-01-29 クアルコム，インコーポレイテッド Ｍｅｍｓデバイスのための支持構造、およびその方法
EP2495212A3 (de) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
WO2007014022A1 (en) 2005-07-22 2007-02-01 Qualcomm Incorporated Mems devices having support structures and methods of fabricating the same
EP1910216A1 (de) 2005-07-22 2008-04-16 QUALCOMM Incorporated Stützstruktur für eine mikroelektromechanische vorrichtung und verfahren dazu
EP1754683A1 (de) * 2005-08-18 2007-02-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikro-Elektromechanisches Element
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7636151B2 (en) 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US7582952B2 (en) 2006-02-21 2009-09-01 Qualcomm Mems Technologies, Inc. Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7643203B2 (en) 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7417784B2 (en) 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7527996B2 (en) 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7623287B2 (en) 2006-04-19 2009-11-24 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7369292B2 (en) 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7405863B2 (en) 2006-06-01 2008-07-29 Qualcomm Mems Technologies, Inc. Patterning of mechanical layer in MEMS to reduce stresses at supports
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7385744B2 (en) 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7388704B2 (en) 2006-06-30 2008-06-17 Qualcomm Mems Technologies, Inc. Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
JP4327183B2 (ja) * 2006-07-31 2009-09-09 株式会社日立製作所 内燃機関の高圧燃料ポンプ制御装置
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7566664B2 (en) 2006-08-02 2009-07-28 Qualcomm Mems Technologies, Inc. Selective etching of MEMS using gaseous halides and reactive co-etchants
EP1943551A2 (de) 2006-10-06 2008-07-16 Qualcomm Mems Technologies, Inc. Lichtführung
KR101535805B1 (ko) 2006-10-06 2015-07-09 퀄컴 엠이엠에스 테크놀로지스, 인크. 디스플레이 장치 및 디스플레이 형성방법
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7535621B2 (en) 2006-12-27 2009-05-19 Qualcomm Mems Technologies, Inc. Aluminum fluoride films for microelectromechanical system applications
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7625825B2 (en) 2007-06-14 2009-12-01 Qualcomm Mems Technologies, Inc. Method of patterning mechanical layer for MEMS structures
US7569488B2 (en) * 2007-06-22 2009-08-04 Qualcomm Mems Technologies, Inc. Methods of making a MEMS device by monitoring a process parameter
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US7851239B2 (en) * 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
EP2387690A1 (de) 2009-01-13 2011-11-23 Qualcomm Mems Technologies, Inc. Grossflächige leuchtplatte und schirm
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
KR20120090772A (ko) 2009-05-29 2012-08-17 퀄컴 엠이엠에스 테크놀로지스, 인크. 조명장치 및 그의 제조방법
JP2013524287A (ja) 2010-04-09 2013-06-17 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 電気機械デバイスの機械層及びその形成方法
US8402647B2 (en) 2010-08-25 2013-03-26 Qualcomm Mems Technologies Inc. Methods of manufacturing illumination systems
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
JP6320216B2 (ja) * 2014-07-23 2018-05-09 浜松ホトニクス株式会社 光学シャッタ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001447A (en) * 1957-08-29 1961-09-26 Zeiss Ikon A G Stuttgart Image reproducing device for visible and invisible radiation images
US3924228A (en) * 1975-01-06 1975-12-02 Bendix Corp Electrostatically actuated display panel
US4087810A (en) * 1976-06-30 1978-05-02 International Business Machines Corporation Membrane deformographic display, and method of making
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US4638309A (en) * 1983-09-08 1987-01-20 Texas Instruments Incorporated Spatial light modulator drive system
US4566935A (en) * 1984-07-31 1986-01-28 Texas Instruments Incorporated Spatial light modulator and method
DE3614016A1 (de) * 1986-04-25 1987-10-29 Dornier System Gmbh Radartransparente folie mit steuerbarer infrarotreflexion fuer tarnzwecke
US4871220A (en) * 1988-06-15 1989-10-03 Litton Systems, Inc. Short wavelength pass filter having a metal mesh on a semiconducting substrate
GB2246474A (en) * 1990-07-24 1992-01-29 British Aerospace A layered frequency selective surface assembly

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CA2088176C (en) 2002-08-13
TW235339B (de) 1994-12-01
DE69305375T2 (de) 1997-02-27
JPH06221921A (ja) 1994-08-12
EP0554847A1 (de) 1993-08-11
US5231532A (en) 1993-07-27
EP0554847B1 (de) 1996-10-16
CA2088176A1 (en) 1993-08-06

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