DE69233383D1 - Sram-Zelle und Struktur, beinhaltend polykristalline Lastelemente mit P-leitendem Kanal - Google Patents

Sram-Zelle und Struktur, beinhaltend polykristalline Lastelemente mit P-leitendem Kanal

Info

Publication number
DE69233383D1
DE69233383D1 DE69233383T DE69233383T DE69233383D1 DE 69233383 D1 DE69233383 D1 DE 69233383D1 DE 69233383 T DE69233383 T DE 69233383T DE 69233383 T DE69233383 T DE 69233383T DE 69233383 D1 DE69233383 D1 DE 69233383D1
Authority
DE
Germany
Prior art keywords
structure containing
sram cell
type channel
load elements
containing polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69233383T
Other languages
English (en)
Other versions
DE69233383T2 (de
Inventor
Tsui C Chan
Frank R Bryant
Lisa K Jorgenson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics lnc USA
Original Assignee
STMicroelectronics lnc USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/709,354 external-priority patent/US5204279A/en
Priority claimed from US07/709,630 external-priority patent/US5187114A/en
Application filed by STMicroelectronics lnc USA filed Critical STMicroelectronics lnc USA
Publication of DE69233383D1 publication Critical patent/DE69233383D1/de
Application granted granted Critical
Publication of DE69233383T2 publication Critical patent/DE69233383T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
    • H10B10/125—Static random access memory [SRAM] devices comprising a MOSFET load element the MOSFET being a thin film transistor [TFT]
DE69233383T 1991-06-03 1992-05-26 Sram-Zelle und Struktur, beinhaltend polykristalline Lastelemente mit P-leitendem Kanal Expired - Fee Related DE69233383T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US709630 1991-06-03
US07/709,354 US5204279A (en) 1991-06-03 1991-06-03 Method of making SRAM cell and structure with polycrystalline p-channel load devices
US709354 1991-06-03
US07/709,630 US5187114A (en) 1991-06-03 1991-06-03 Method of making SRAM cell and structure with polycrystalline P-channel load devices

Publications (2)

Publication Number Publication Date
DE69233383D1 true DE69233383D1 (de) 2004-08-26
DE69233383T2 DE69233383T2 (de) 2005-08-18

Family

ID=27108243

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69233383T Expired - Fee Related DE69233383T2 (de) 1991-06-03 1992-05-26 Sram-Zelle und Struktur, beinhaltend polykristalline Lastelemente mit P-leitendem Kanal

Country Status (3)

Country Link
EP (1) EP0517408B1 (de)
JP (1) JPH05198774A (de)
DE (1) DE69233383T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10178107A (ja) * 1996-12-09 1998-06-30 Texas Instr Inc <Ti> 接点ゲート構造と方法
JPH10199991A (ja) * 1996-12-09 1998-07-31 Texas Instr Inc <Ti> 基板にコンタクトを形成する方法及びそのコンタクト
JPH11260937A (ja) 1998-03-13 1999-09-24 Mitsubishi Electric Corp 半導体装置およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3569172D1 (en) * 1984-08-23 1989-05-03 Toshiba Kk Semiconductor memory device having a polycrystalline silicon layer
US4794561A (en) * 1987-07-02 1988-12-27 Integrated Device Technology, Inc. Static ram cell with trench pull-down transistors and buried-layer ground plate

Also Published As

Publication number Publication date
EP0517408A1 (de) 1992-12-09
JPH05198774A (ja) 1993-08-06
EP0517408B1 (de) 2004-07-21
DE69233383T2 (de) 2005-08-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee