DE69230680T2 - Herstellung von optischen LiNbO3-Kanalwellenleitern - Google Patents

Herstellung von optischen LiNbO3-Kanalwellenleitern

Info

Publication number
DE69230680T2
DE69230680T2 DE69230680T DE69230680T DE69230680T2 DE 69230680 T2 DE69230680 T2 DE 69230680T2 DE 69230680 T DE69230680 T DE 69230680T DE 69230680 T DE69230680 T DE 69230680T DE 69230680 T2 DE69230680 T2 DE 69230680T2
Authority
DE
Germany
Prior art keywords
manufacture
optical
channel waveguides
linbo3
linbo3 channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69230680T
Other languages
English (en)
Other versions
DE69230680D1 (de
Inventor
Antonello Vannucci
Mauro Varasi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MBDA Italia SpA
Original Assignee
Alenia Marconi Systems SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alenia Marconi Systems SpA filed Critical Alenia Marconi Systems SpA
Publication of DE69230680D1 publication Critical patent/DE69230680D1/de
Application granted granted Critical
Publication of DE69230680T2 publication Critical patent/DE69230680T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/1204—Lithium niobate (LiNbO3)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
DE69230680T 1991-05-10 1992-05-09 Herstellung von optischen LiNbO3-Kanalwellenleitern Expired - Fee Related DE69230680T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITRM910316A IT1245961B (it) 1991-05-10 1991-05-10 Processo di fabbricazione di guide ottiche a canale in linbo3.

Publications (2)

Publication Number Publication Date
DE69230680D1 DE69230680D1 (de) 2000-03-23
DE69230680T2 true DE69230680T2 (de) 2000-08-17

Family

ID=11400136

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69230680T Expired - Fee Related DE69230680T2 (de) 1991-05-10 1992-05-09 Herstellung von optischen LiNbO3-Kanalwellenleitern

Country Status (5)

Country Link
US (1) US5356523A (de)
EP (1) EP0518059B1 (de)
DE (1) DE69230680T2 (de)
ES (1) ES2143981T3 (de)
IT (1) IT1245961B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2555942B2 (ja) * 1993-08-27 1996-11-20 日本電気株式会社 光制御デバイス
DE4339401C1 (de) * 1993-11-18 1994-12-22 Forschungszentrum Juelich Gmbh Verfahren zur Herstellung einer Schichtstruktur und seine Verwendung
ES2188360B1 (es) * 2001-03-07 2005-02-16 Universitat Politecnica De Catalunya Modulador de fase electrooptico autooscilante.
EP1645361A1 (de) 2004-10-11 2006-04-12 Knoll Maschinenbau Gmbh Schneidvorrichtung zum Zerkleinern von Spänen
CN100510814C (zh) * 2007-12-29 2009-07-08 上海亨通光电科技有限公司 高温质子交换的LiNbO3光波导制造方法
CN112130253B (zh) * 2020-09-08 2021-07-23 派尼尔科技（天津）有限公司 一种在z切铌酸锂薄膜上制作y传脊型光波导的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561718A (en) * 1983-08-22 1985-12-31 Sperry Corporation Photoelastic effect optical waveguides
DE3417732A1 (de) * 1984-05-12 1986-07-10 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum aufbringen von siliziumhaltigen schichten auf substraten durch katodenzerstaeubung und zerstaeubungskatode zur durchfuehrung des verfahrens
US4775208A (en) * 1986-06-06 1988-10-04 Polaroid Corporation Planar waveguide mode converter device
JPS6370203A (ja) * 1986-09-11 1988-03-30 Brother Ind Ltd 屈折率分布型光導波路レンズの製造方法
FR2613085B1 (fr) * 1987-03-25 1989-06-09 Carenco Alain Procede pour augmenter localement les indices de refraction d'un materiau electro-optique utilisable en optique guidee et materiau obtenu par ce procede
JPS6465841A (en) * 1987-09-07 1989-03-13 Fujitsu Ltd Formation of pattern
CA1324261C (en) * 1988-05-03 1993-11-16 Jeffrey Bruce Bindell Proton-exchange method of forming optical waveguides
KR920005445B1 (ko) * 1989-08-10 1992-07-04 한국과학기술원 광도파로 제작방법 및 구조
EP0425076A3 (en) * 1989-10-27 1991-10-30 Litton Systems Inc. Process for making intergrated optics chips having high electro-optic coefficients
US5018811A (en) * 1990-07-18 1991-05-28 Northrop Corporation Asymmetric optical waveguides for minimizing bending losses and techniques for fabricating same
US5062688A (en) * 1990-09-14 1991-11-05 Nippon Sheet Glass Co., Ltd. Flat plate optical element and method for preparing the same

Also Published As

Publication number Publication date
ITRM910316A0 (it) 1991-05-10
ES2143981T3 (es) 2000-06-01
EP0518059B1 (de) 2000-02-16
EP0518059A1 (de) 1992-12-16
ITRM910316A1 (it) 1992-11-10
IT1245961B (it) 1994-11-07
US5356523A (en) 1994-10-18
DE69230680D1 (de) 2000-03-23

Similar Documents

Publication Publication Date Title
DE69329442D1 (de) Herstellung von Brillenlinsen
DK63687D0 (da) Optisk instrument
DK363187A (da) Optisk fiber
KR950700557A (ko) 테이프상 광섬유 심선(core of tape like optical fiber)
DE3875378D1 (de) Spleissen von optischen fasern.
DE69124820D1 (de) Optischer Faserkreisel
DK96887D0 (da) Optisk fiberapparat
DE69411789T2 (de) Optischer Wellenleiter
DE69331876T2 (de) Ausrichtung von integrierten optischen Komponenten
DE69520769D1 (de) Kontrolliertes spleissen von optischen fasern
DE69216603D1 (de) Faseroptische drehkupplung
BR9204468A (pt) Cabode fibras oticas
DE69109386D1 (de) Herstellung von optischen Schaltern.
FI97260C (fi) Optinen kuitu
NO180788C (no) Optisk fiber
DE69025078D1 (de) Optischer Faserkreisel
FI93152C (fi) Optinen kuitunauha
DE69230680D1 (de) Herstellung von optischen LiNbO3-Kanalwellenleitern
DK227885A (da) Optisk fiber
DE69400399D1 (de) Optischer Wellenleiterverstärker
DE69224454D1 (de) Verfahren zur Herstellung von planaren optischen Wellenleitern
BR9407381A (pt) Terminaçao de fibras óticas
DE69301761D1 (de) Optische Glasfaser
DE59206203D1 (de) Optischer Wellenleiterübergang
DE69206731D1 (de) Optischer Faserkreisel

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee