DE69221901D1 - Mikrostruktur-entwurf für hohe ir - empfindlichkeit - Google Patents

Mikrostruktur-entwurf für hohe ir - empfindlichkeit

Info

Publication number
DE69221901D1
DE69221901D1 DE69221901T DE69221901T DE69221901D1 DE 69221901 D1 DE69221901 D1 DE 69221901D1 DE 69221901 T DE69221901 T DE 69221901T DE 69221901 T DE69221901 T DE 69221901T DE 69221901 D1 DE69221901 D1 DE 69221901D1
Authority
DE
Germany
Prior art keywords
sensitivity
microstructure design
microstructure
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69221901T
Other languages
English (en)
Other versions
DE69221901T2 (de
Inventor
Barrett Cole
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22231224&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69221901(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69221901D1 publication Critical patent/DE69221901D1/de
Application granted granted Critical
Publication of DE69221901T2 publication Critical patent/DE69221901T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12P—FERMENTATION OR ENZYME-USING PROCESSES TO SYNTHESISE A DESIRED CHEMICAL COMPOUND OR COMPOSITION OR TO SEPARATE OPTICAL ISOMERS FROM A RACEMIC MIXTURE
    • C12P7/00—Preparation of oxygen-containing organic compounds
    • C12P7/62—Carboxylic acid esters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Organic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Zoology (AREA)
  • Wood Science & Technology (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biotechnology (AREA)
  • Biochemistry (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Microbiology (AREA)
  • General Health & Medical Sciences (AREA)
  • Genetics & Genomics (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE69221901T 1992-07-08 1992-07-08 Mikrostruktur-entwurf für hohe ir - empfindlichkeit Expired - Lifetime DE69221901T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1992/005699 WO1994001743A1 (en) 1992-07-08 1992-07-08 Microstructure design for high ir sensitivity

Publications (2)

Publication Number Publication Date
DE69221901D1 true DE69221901D1 (de) 1997-10-02
DE69221901T2 DE69221901T2 (de) 1998-01-29

Family

ID=22231224

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69221901T Expired - Lifetime DE69221901T2 (de) 1992-07-08 1992-07-08 Mikrostruktur-entwurf für hohe ir - empfindlichkeit

Country Status (4)

Country Link
EP (1) EP0649517B1 (de)
JP (1) JP3062627B2 (de)
DE (1) DE69221901T2 (de)
WO (1) WO1994001743A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5449910A (en) * 1993-11-17 1995-09-12 Honeywell Inc. Infrared radiation imaging array with compound sensors forming each pixel
US5554849A (en) * 1995-01-17 1996-09-10 Flir Systems, Inc. Micro-bolometric infrared staring array
US7495220B2 (en) 1995-10-24 2009-02-24 Bae Systems Information And Electronics Systems Integration Inc. Uncooled infrared sensor
DE69610118T2 (de) * 1995-12-04 2001-02-01 Lockheed-Martin Ir Imaging Systems, Lexington Infrarot-strahlungsdetektor mit verkleinerter wirksamer fläche
JP2856180B2 (ja) * 1996-11-27 1999-02-10 日本電気株式会社 熱型赤外線検出素子とその製造方法
JPH11148861A (ja) * 1997-09-09 1999-06-02 Honda Motor Co Ltd マイクロブリッジ構造
JP3003853B2 (ja) 1997-09-09 2000-01-31 本田技研工業株式会社 ブリッジ構造を有するセンサ
WO2000012986A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including a reflective layer
JP3635937B2 (ja) 1998-09-10 2005-04-06 三菱電機株式会社 赤外線カメラ
GB9919877D0 (en) * 1999-08-24 1999-10-27 Secr Defence Micro-bridge structure
JP3921320B2 (ja) 2000-01-31 2007-05-30 日本電気株式会社 熱型赤外線検出器およびその製造方法
JP3591445B2 (ja) 2000-10-16 2004-11-17 三菱電機株式会社 赤外線カメラ
WO2005034248A1 (en) * 2003-10-09 2005-04-14 Ocas Corp. Bolometric infrared sensor having two layer structure and method for manufacturing the same
JP4315832B2 (ja) 2004-02-17 2009-08-19 三菱電機株式会社 熱型赤外センサ素子および熱型赤外センサアレイ
FR2920872B1 (fr) 2007-09-10 2009-11-06 Centre Nat Rech Scient Bolometre a asservissement de chaleur.

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0354369B1 (de) * 1988-08-12 1995-07-26 Texas Instruments Incorporated Infrarot-Detektor
GB2236016A (en) * 1989-09-13 1991-03-20 Philips Electronic Associated Pyroelectric and other infrared detection devices with thin films

Also Published As

Publication number Publication date
EP0649517B1 (de) 1997-08-27
DE69221901T2 (de) 1998-01-29
WO1994001743A1 (en) 1994-01-20
JP3062627B2 (ja) 2000-07-12
EP0649517A1 (de) 1995-04-26
JPH07509057A (ja) 1995-10-05

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