DE69217890T2 - Verfahren zur Herstellung ultradünner anorganischer Membranen - Google Patents

Verfahren zur Herstellung ultradünner anorganischer Membranen

Info

Publication number
DE69217890T2
DE69217890T2 DE69217890T DE69217890T DE69217890T2 DE 69217890 T2 DE69217890 T2 DE 69217890T2 DE 69217890 T DE69217890 T DE 69217890T DE 69217890 T DE69217890 T DE 69217890T DE 69217890 T2 DE69217890 T2 DE 69217890T2
Authority
DE
Germany
Prior art keywords
ultra
production
thin inorganic
inorganic membranes
membranes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69217890T
Other languages
English (en)
Other versions
DE69217890D1 (de
Inventor
Yue-Sheng Lin
Anthonie Jan Burggraaf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Publication of DE69217890D1 publication Critical patent/DE69217890D1/de
Application granted granted Critical
Publication of DE69217890T2 publication Critical patent/DE69217890T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D69/00Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12Composite membranes; Ultra-thin membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039Inorganic membrane manufacture
    • B01D67/0072Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • B01D71/024Oxides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/50Catalysts, in general, characterised by their form or physical properties characterised by their shape or configuration
    • B01J35/58Fabrics or filaments
    • B01J35/59Membranes
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02Preparation of oxygen
    • C01B13/0229Purification or separation processes
    • C01B13/0248Physical processing only
    • C01B13/0251Physical processing only by making use of membranes
    • C01B13/0255Physical processing only by making use of membranes characterised by the type of membrane
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/455Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application the coating or impregnating process including a chemical conversion or reaction
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/89Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/405Oxides of refractory metals or yttrium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00Fuel cells; Manufacture thereof
    • H01M8/10Fuel cells with solid electrolytes
    • H01M8/12Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/124Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
    • H01M8/1246Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides
    • H01M8/1253Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides the electrolyte containing zirconium oxide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/10Specific pressure applied
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0043Impurity removed
    • C01B2210/0046Nitrogen
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00793Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
    • C04B2111/00801Membranes; Diaphragms
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30Hydrogen technology
    • Y02E60/50Fuel cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Electrochemistry (AREA)
  • Sustainable Energy (AREA)
  • Analytical Chemistry (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE69217890T 1992-01-02 1992-12-28 Verfahren zur Herstellung ultradünner anorganischer Membranen Expired - Fee Related DE69217890T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/816,206 US5160618A (en) 1992-01-02 1992-01-02 Method for manufacturing ultrathin inorganic membranes

Publications (2)

Publication Number Publication Date
DE69217890D1 DE69217890D1 (de) 1997-04-10
DE69217890T2 true DE69217890T2 (de) 1997-06-12

Family

ID=25219966

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69217890T Expired - Fee Related DE69217890T2 (de) 1992-01-02 1992-12-28 Verfahren zur Herstellung ultradünner anorganischer Membranen

Country Status (7)

Country Link
US (1) US5160618A (de)
EP (1) EP0550049B1 (de)
JP (1) JP2554434B2 (de)
CA (1) CA2086401C (de)
DE (1) DE69217890T2 (de)
ES (1) ES2101021T3 (de)
NO (1) NO180151C (de)

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DE4117284A1 (de) * 1991-05-27 1992-12-03 Studiengesellschaft Kohle Mbh Verfahren zur herstellung von mikroporoesen keramikmembranen fuer die trennung von gas- und fluessigkeitsgemischen
US6165431A (en) * 1993-12-08 2000-12-26 Eltron Research, Inc. Methods for separating oxygen from oxygen-containing gases
US6033632A (en) * 1993-12-08 2000-03-07 Eltron Research, Inc. Solid state oxygen anion and electron mediating membrane and catalytic membrane reactors containing them
US6592782B2 (en) 1993-12-08 2003-07-15 Eltron Research, Inc. Materials and methods for the separation of oxygen from air
US5516359A (en) * 1993-12-17 1996-05-14 Air Products And Chemicals, Inc. Integrated high temperature method for oxygen production
US5565017A (en) * 1993-12-17 1996-10-15 Air Products And Chemicals, Inc. High temperature oxygen production with steam and power generation
US5447555A (en) * 1994-01-12 1995-09-05 Air Products And Chemicals, Inc. Oxygen production by staged mixed conductor membranes
US5534471A (en) * 1994-01-12 1996-07-09 Air Products And Chemicals, Inc. Ion transport membranes with catalyzed mixed conducting porous layer
US5599383A (en) * 1995-03-13 1997-02-04 Air Products And Chemicals, Inc. Tubular solid-state membrane module
US5766317A (en) * 1995-06-01 1998-06-16 Technology Management, Inc. Microspheres for combined oxygen separation, storage and delivery
US5910238A (en) * 1995-06-01 1999-06-08 Technology Management, Inc. Microspheres for combined oxygen separation, storage and delivery
US5562754A (en) * 1995-06-07 1996-10-08 Air Products And Chemicals, Inc. Production of oxygen by ion transport membranes with steam utilization
DE69619299T2 (de) * 1995-06-07 2002-10-10 Air Prod & Chem Sauerstoffproduktion mit Ionentransportmembranen und Energierückgewinnung
DE69721764T2 (de) * 1997-02-07 2004-03-11 Nkk Corp. Verfahren zum reparierenund/oder verstärkung einer schutzplatte für einen mit schutzplatten versehenen wärmetauscher
JP2002531246A (ja) 1998-12-02 2002-09-24 マサチューセッツ・インスティチュート・オブ・テクノロジー 水素分離及び水素化/脱水素反応のための集積されたパラジウムをベースとする微小膜
US6471921B1 (en) 1999-05-19 2002-10-29 Eltron Research, Inc. Mixed ionic and electronic conducting ceramic membranes for hydrocarbon processing
US7163713B2 (en) * 1999-07-31 2007-01-16 The Regents Of The University Of California Method for making dense crack free thin films
US6146549A (en) * 1999-08-04 2000-11-14 Eltron Research, Inc. Ceramic membranes for catalytic membrane reactors with high ionic conductivities and low expansion properties
EP1456900A4 (de) 2001-12-18 2008-05-07 Univ California Metallstromsammelschutz durch oxidfilm
ATE508488T1 (de) * 2001-12-18 2011-05-15 Univ California Verfahren zur herstellung dichter dünnfilme
AU2003256251A1 (en) * 2002-04-24 2003-11-10 The Regents Of The University Of California Planar electrochemical device assembly
WO2003096470A1 (en) * 2002-05-07 2003-11-20 The Regents Of The University Of California Electrochemical cell stack assembly
AU2003301727A1 (en) * 2002-05-29 2004-05-25 Honda Giken Kogyo Kabushiki Kaisha Solid oxide electrolyte with ion conductivity enhancement by dislocation
US7338624B2 (en) * 2002-07-31 2008-03-04 Praxair Technology Inc. Ceramic manufacture for a composite ion transport membrane
JP4879490B2 (ja) * 2002-10-04 2012-02-22 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア フッ素分離および発生装置
RU2236068C1 (ru) * 2003-06-10 2004-09-10 Мятиев Ата Атаевич Электрод-электролитная пара на основе двуокиси циркония (варианты), способ ее изготовления (варианты) и органогель
RU2240280C1 (ru) 2003-10-10 2004-11-20 Ворлд Бизнес Ассошиэйтс Лимитед Способ формирования упорядоченных волнообразных наноструктур (варианты)
US7547334B2 (en) * 2004-01-30 2009-06-16 General Motors Corporation Continuous reactor
US7641997B2 (en) * 2004-09-23 2010-01-05 Ut-Battelle Llc Design and synthesis of guest-host nanostructures to enhance ionic conductivity across nanocomposite membranes
US7604690B2 (en) * 2005-04-05 2009-10-20 Wostec, Inc. Composite material for ultra thin membranes
US20090139497A1 (en) * 2007-11-30 2009-06-04 Bo Shi Engine having thin film oxygen separation system
EP2237357B1 (de) * 2009-03-23 2013-10-23 Sumitomo Metal Mining Co., Ltd. Ionische Elektrolytmembranstruktur, Herstellungsverfahren und Festoxidbrennstoffzelle, welche die ionische Elektrolytmembranstruktur nutzt
WO2013006077A1 (en) 2011-07-06 2013-01-10 Wostec, Inc. Solar cell with nanostructured layer and methods of making and using
EP2740162B1 (de) 2011-08-05 2019-07-03 Wostec, Inc. Lichtemittierende diode mit einer nanostrukturierten schicht, verfahren zu ihrer herstellung und nanomaske die in dem verfahren verwendet wird.
US9057704B2 (en) 2011-12-12 2015-06-16 Wostec, Inc. SERS-sensor with nanostructured surface and methods of making and using
US9653627B2 (en) 2012-01-18 2017-05-16 Wostec, Inc. Arrangements with pyramidal features having at least one nanostructured surface and methods of making and using
US9134250B2 (en) 2012-03-23 2015-09-15 Wostec, Inc. SERS-sensor with nanostructured layer and methods of making and using
WO2014142700A1 (en) 2013-03-13 2014-09-18 Wostec Inc. Polarizer based on a nanowire grid
US20170194167A1 (en) 2014-06-26 2017-07-06 Wostec, Inc. Wavelike hard nanomask on a topographic feature and methods of making and using
JP2017024961A (ja) * 2015-07-27 2017-02-02 ニッポン高度紙工業株式会社 無機酸化物成形体の製造方法
WO2018093284A1 (en) 2016-11-18 2018-05-24 Wostec, Inc. Optical memory devices using a silicon wire grid polarizer and methods of making and using
WO2018156042A1 (en) 2017-02-27 2018-08-30 Wostec, Inc. Nanowire grid polarizer on a curved surface and methods of making and using
US11819806B1 (en) 2018-10-15 2023-11-21 Ampcera Inc. Methods for manufacturing a solid state ionic conductive membrane on a macro porous support scaffold
US11177498B1 (en) 2018-10-15 2021-11-16 Ampcera Inc. Redox flow batteries, components for redox flow batteries and methods for manufacture thereof
US11600853B1 (en) 2019-05-14 2023-03-07 Ampcera Inc. Systems and methods for storing, transporting, and handling of solid-state electrolytes

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Publication number Priority date Publication date Assignee Title
US4902307A (en) * 1988-11-18 1990-02-20 California Institute Of Technology Synthesis of SiO2 membrane on porous support and method of use of same
US5106654A (en) * 1990-07-20 1992-04-21 Westinghouse Electric Corp. Method of forming a dense, high temperature electronically conductive composite layer on a porous ceramic substrate

Also Published As

Publication number Publication date
NO180151B (no) 1996-11-18
EP0550049B1 (de) 1997-03-05
JP2554434B2 (ja) 1996-11-13
NO925026L (no) 1993-07-05
JPH05254805A (ja) 1993-10-05
ES2101021T3 (es) 1997-07-01
US5160618A (en) 1992-11-03
EP0550049A1 (de) 1993-07-07
NO180151C (no) 1997-02-26
DE69217890D1 (de) 1997-04-10
CA2086401C (en) 1997-01-28
CA2086401A1 (en) 1993-07-03
NO925026D0 (no) 1992-12-28

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