DE69216940D1 - Verkleinerndes katadioptrisches Projektionssystem - Google Patents
Verkleinerndes katadioptrisches ProjektionssystemInfo
- Publication number
- DE69216940D1 DE69216940D1 DE69216940T DE69216940T DE69216940D1 DE 69216940 D1 DE69216940 D1 DE 69216940D1 DE 69216940 T DE69216940 T DE 69216940T DE 69216940 T DE69216940 T DE 69216940T DE 69216940 D1 DE69216940 D1 DE 69216940D1
- Authority
- DE
- Germany
- Prior art keywords
- downsizing
- projection system
- catadioptric projection
- catadioptric
- projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0804—Catadioptric systems using two curved mirrors
- G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0892—Catadioptric systems specially adapted for the UV
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19550091 | 1991-08-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69216940D1 true DE69216940D1 (de) | 1997-03-06 |
DE69216940T2 DE69216940T2 (de) | 1997-09-04 |
Family
ID=16342122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69216940T Expired - Fee Related DE69216940T2 (de) | 1991-08-05 | 1992-08-05 | Verkleinerndes katadioptrisches Projektionssystem |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0527043B1 (de) |
DE (1) | DE69216940T2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69314567T2 (de) * | 1992-07-29 | 1998-02-26 | Nikon Corp | Verkleinerndes katadioptrisches Projektionssystem |
EP0604093B1 (de) * | 1992-12-24 | 1997-11-19 | Nikon Corporation | Verkleinerndes katadioptrisches Projektionssystem |
JPH103039A (ja) * | 1996-06-14 | 1998-01-06 | Nikon Corp | 反射屈折光学系 |
DE102014017001A1 (de) * | 2014-11-12 | 2016-05-12 | Carl Zeiss Ag | Mikroskop mit geringem Verzeichnungsfehler |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1199515B (de) * | 1961-12-23 | 1965-08-26 | Rodenstock Optik G | Spiegelobjektiv |
US4812028A (en) * | 1984-07-23 | 1989-03-14 | Nikon Corporation | Reflection type reduction projection optical system |
US4747678A (en) * | 1986-12-17 | 1988-05-31 | The Perkin-Elmer Corporation | Optical relay system with magnification |
-
1992
- 1992-08-05 EP EP19920307152 patent/EP0527043B1/de not_active Expired - Lifetime
- 1992-08-05 DE DE69216940T patent/DE69216940T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0527043B1 (de) | 1997-01-22 |
DE69216940T2 (de) | 1997-09-04 |
EP0527043A1 (de) | 1993-02-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: WESER & KOLLEGEN, 81245 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |