DE69215397T2 - Einstückig ausgebildete Bubblejet Druckvorrichtung - Google Patents
Einstückig ausgebildete Bubblejet DruckvorrichtungInfo
- Publication number
- DE69215397T2 DE69215397T2 DE69215397T DE69215397T DE69215397T2 DE 69215397 T2 DE69215397 T2 DE 69215397T2 DE 69215397 T DE69215397 T DE 69215397T DE 69215397 T DE69215397 T DE 69215397T DE 69215397 T2 DE69215397 T2 DE 69215397T2
- Authority
- DE
- Germany
- Prior art keywords
- nozzle
- ink
- heater
- chip
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- 238000000034 method Methods 0.000 claims abstract description 72
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- 238000004519 manufacturing process Methods 0.000 claims abstract description 30
- 239000004065 semiconductor Substances 0.000 claims abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 35
- 229910052710 silicon Inorganic materials 0.000 claims description 35
- 239000010703 silicon Substances 0.000 claims description 35
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- 239000011248 coating agent Substances 0.000 claims description 14
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- 238000013461 design Methods 0.000 description 22
- 229910052782 aluminium Inorganic materials 0.000 description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 20
- 229920005591 polysilicon Polymers 0.000 description 20
- 238000001020 plasma etching Methods 0.000 description 19
- 238000009792 diffusion process Methods 0.000 description 15
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- 229910052581 Si3N4 Inorganic materials 0.000 description 9
- 230000008901 benefit Effects 0.000 description 9
- 238000001816 cooling Methods 0.000 description 9
- 239000007788 liquid Substances 0.000 description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 9
- 229910052715 tantalum Inorganic materials 0.000 description 9
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 9
- 229910052785 arsenic Inorganic materials 0.000 description 8
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 8
- 230000005499 meniscus Effects 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 230000009471 action Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 239000003822 epoxy resin Substances 0.000 description 7
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- 229920000647 polyepoxide Polymers 0.000 description 7
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 6
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- 150000004767 nitrides Chemical class 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 230000002441 reversible effect Effects 0.000 description 6
- 238000004528 spin coating Methods 0.000 description 6
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 6
- 230000006378 damage Effects 0.000 description 5
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 230000037452 priming Effects 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
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- 230000002411 adverse Effects 0.000 description 2
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- 230000033001 locomotion Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- VXAPDXVBDZRZKP-UHFFFAOYSA-N nitric acid phosphoric acid Chemical compound O[N+]([O-])=O.OP(O)(O)=O VXAPDXVBDZRZKP-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 230000000284 resting effect Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- VLQGDKKHHCKIOJ-UHFFFAOYSA-N NNOS Chemical compound NNOS VLQGDKKHHCKIOJ-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- LRTTZMZPZHBOPO-UHFFFAOYSA-N [B].[B].[Hf] Chemical compound [B].[B].[Hf] LRTTZMZPZHBOPO-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 229910021488 crystalline silicon dioxide Inorganic materials 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000000203 droplet dispensing Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000011990 functional testing Methods 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
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- 238000012876 topography Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 238000010407 vacuum cleaning Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14056—Plural heating elements per ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14137—Resistor surrounding the nozzle opening
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14145—Structure of the manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17563—Ink filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/1437—Back shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Percussion Or Vibration Massage (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
- Toys (AREA)
- Materials For Medical Uses (AREA)
Applications Claiming Priority (18)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AUPK437491 | 1991-01-30 | ||
| AUPK473791 | 1991-02-22 | ||
| AUPK473691 | 1991-02-22 | ||
| AUPK474691 | 1991-02-22 | ||
| AUPK473191 | 1991-02-22 | ||
| AUPK474191 | 1991-02-22 | ||
| AUPK474291 | 1991-02-22 | ||
| AUPK473391 | 1991-02-22 | ||
| AUPK473291 | 1991-02-22 | ||
| AUPK473591 | 1991-02-22 | ||
| AUPK474091 | 1991-02-22 | ||
| AUPK473991 | 1991-02-22 | ||
| AUPK473891 | 1991-02-22 | ||
| AUPK473491 | 1991-02-22 | ||
| AUPK474591 | 1991-02-22 | ||
| AUPK474491 | 1991-02-22 | ||
| AUPK474391 | 1991-02-22 | ||
| AU89998/91A AU657931B2 (en) | 1991-01-30 | 1991-12-23 | An integrally formed bubblejet print device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69215397D1 DE69215397D1 (de) | 1997-01-09 |
| DE69215397T2 true DE69215397T2 (de) | 1997-06-05 |
Family
ID=27586060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69215397T Expired - Lifetime DE69215397T2 (de) | 1991-01-30 | 1992-01-29 | Einstückig ausgebildete Bubblejet Druckvorrichtung |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0498292B1 (fr) |
| AT (1) | ATE145589T1 (fr) |
| AU (1) | AU657931B2 (fr) |
| DE (1) | DE69215397T2 (fr) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0772525A1 (fr) * | 1995-04-12 | 1997-05-14 | Eastman Kodak Company | Procedes de construction et de fabrication pour des tetes d'impression activees thermiquement |
| WO1996032809A1 (fr) * | 1995-04-12 | 1996-10-17 | Eastman Kodak Company | Photocopieuse en couleur utilisant un systeme d'impression a jets d'encre avec goutte fournie a la demande |
| EP0765226A1 (fr) * | 1995-04-12 | 1997-04-02 | Eastman Kodak Company | Imprimante video en couleurs et systeme cd photographique a imprimante integree |
| US5859652A (en) * | 1995-04-12 | 1999-01-12 | Eastman Kodak Company | Color video printer and a photo CD system with integrated printer |
| US5838339A (en) * | 1995-04-12 | 1998-11-17 | Eastman Kodak Company | Data distribution in monolithic print heads |
| US5825385A (en) * | 1995-04-12 | 1998-10-20 | Eastman Kodak Company | Constructions and manufacturing processes for thermally activated print heads |
| US5905517A (en) * | 1995-04-12 | 1999-05-18 | Eastman Kodak Company | Heater structure and fabrication process for monolithic print heads |
| AUPN232595A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | Block fault tolerance in integrated printing heads |
| WO1996032261A1 (fr) * | 1995-04-12 | 1996-10-17 | Eastman Kodak Company | Imprimante portative utilisant un systeme d'impression a la fois par selection de goutte et par separation de gouttes |
| AUPN229595A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | Integrated drive circuitry in lift print heads |
| AUPN231895A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | Data distribution in monolithic lift print heads |
| US5850241A (en) * | 1995-04-12 | 1998-12-15 | Eastman Kodak Company | Monolithic print head structure and a manufacturing process therefor using anisotropic wet etching |
| US5801739A (en) * | 1995-04-12 | 1998-09-01 | Eastman Kodak Company | High speed digital fabric printer |
| AUPN229295A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | A notebook computer with integrated lift color printing system |
| US5984446A (en) * | 1995-04-12 | 1999-11-16 | Eastman Kodak Company | Color office printer with a high capacity digital page image store |
| AUPN230495A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | Integrated four color lift print heads |
| AUPN234695A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | Heater structure for monolithic lift print heads |
| US5815179A (en) * | 1995-04-12 | 1998-09-29 | Eastman Kodak Company | Block fault tolerance in integrated printing heads |
| US6045710A (en) * | 1995-04-12 | 2000-04-04 | Silverbrook; Kia | Self-aligned construction and manufacturing process for monolithic print heads |
| AUPN232695A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | Nozzle duplication for fault tolerance in integrated printing heads |
| AUPN234995A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | A self-aligned manufacturing process for monolithic lift print heads |
| AUPN230695A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | A manufacturing process for monolithic lift print heads using anistropic wet etching |
| AUPN233395A0 (en) * | 1995-04-12 | 1995-05-04 | Eastman Kodak Company | A high speed digital fabric printer |
| US6012799A (en) * | 1995-04-12 | 2000-01-11 | Eastman Kodak Company | Multicolor, drop on demand, liquid ink printer with monolithic print head |
| AUPN522295A0 (en) * | 1995-09-06 | 1995-09-28 | Eastman Kodak Company | Cmos process compatible fabrication of lift print heads |
| EP0771656A3 (fr) * | 1995-10-30 | 1997-11-05 | Eastman Kodak Company | Dispersion des buses pour réduire l'interaction électrostatique entre gouttelettes imprimées simultanément |
| AUPN623895A0 (en) * | 1995-10-30 | 1995-11-23 | Eastman Kodak Company | A manufacturing process for lift print heads with nozzle rim heaters |
| US6259463B1 (en) | 1997-10-30 | 2001-07-10 | Hewlett-Packard Company | Multi-drop merge on media printing system |
| US6193347B1 (en) | 1997-02-06 | 2001-02-27 | Hewlett-Packard Company | Hybrid multi-drop/multi-pass printing system |
| SG109973A1 (en) * | 1997-07-15 | 2005-04-28 | Silverbrook Res Pty Ltd | Fluid supply mechanism for multiple fluids to multiple spaced orifices |
| US6234613B1 (en) | 1997-10-30 | 2001-05-22 | Hewlett-Packard Company | Apparatus for generating small volume, high velocity ink droplets in an inkjet printer |
| US6193345B1 (en) | 1997-10-30 | 2001-02-27 | Hewlett-Packard Company | Apparatus for generating high frequency ink ejection and ink chamber refill |
| US6820966B1 (en) | 1998-10-24 | 2004-11-23 | Xaar Technology Limited | Droplet deposition apparatus |
| CA2344931C (fr) * | 1998-10-24 | 2008-04-29 | Paul Raymond Drury | Appareil de depot de gouttelettes |
| DE60019300D1 (de) | 1999-06-30 | 2005-05-12 | Silverbrook Res Pty Ltd | Trägerstruktur und trägeranordnung für einen druckkopf |
| CN1208196C (zh) * | 2000-06-30 | 2005-06-29 | 西尔弗布鲁克研究有限公司 | 一种用于打印引擎的供墨组件 |
| US6676250B1 (en) | 2000-06-30 | 2004-01-13 | Silverbrook Research Pty Ltd | Ink supply assembly for a print engine |
| JP5159069B2 (ja) * | 2006-08-29 | 2013-03-06 | キヤノン株式会社 | 液体吐出方法 |
| CN107782767B (zh) * | 2016-08-26 | 2022-01-07 | 深迪半导体(绍兴)有限公司 | 一种气体传感器加热盘及加工方法 |
| CN114633003A (zh) * | 2022-03-25 | 2022-06-17 | 中国人民解放军陆军装甲兵学院 | 一种用于中厚铝合金板的焊接方法和装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3331488A1 (de) * | 1982-09-01 | 1984-03-01 | Konishiroku Photo Industry Co., Ltd., Tokyo | Kopfstueck fuer eine farbspritz-druckvorrichtung |
| JPS608076A (ja) * | 1983-06-28 | 1985-01-16 | Seiko Instr & Electronics Ltd | インクジエツト記録装置 |
| JPS6018359A (ja) * | 1983-07-12 | 1985-01-30 | Hitachi Ltd | 感熱記録装置 |
| JPS61106270A (ja) * | 1984-10-30 | 1986-05-24 | Fuji Xerox Co Ltd | サ−マルヘツド |
| US4812859A (en) * | 1987-09-17 | 1989-03-14 | Hewlett-Packard Company | Multi-chamber ink jet recording head for color use |
| US4847630A (en) * | 1987-12-17 | 1989-07-11 | Hewlett-Packard Company | Integrated thermal ink jet printhead and method of manufacture |
| JPH01186700A (ja) * | 1988-01-14 | 1989-07-26 | Matsushita Electric Ind Co Ltd | プリント配線板構造体 |
| JP2614265B2 (ja) * | 1988-04-12 | 1997-05-28 | 株式会社リコー | 液体噴射記録ヘッド |
| GB8810241D0 (en) * | 1988-04-29 | 1988-06-02 | Am Int | Drop-on-demand printhead |
| EP0352726B1 (fr) * | 1988-07-26 | 1994-04-27 | Canon Kabushiki Kaisha | Tête d'enregistrement par jet de liquide et appareil l'utilisant |
| JPH02204044A (ja) * | 1989-02-03 | 1990-08-14 | Canon Inc | インクジェットヘッド |
-
1991
- 1991-12-23 AU AU89998/91A patent/AU657931B2/en not_active Ceased
-
1992
- 1992-01-29 EP EP92101475A patent/EP0498292B1/fr not_active Expired - Lifetime
- 1992-01-29 AT AT92101475T patent/ATE145589T1/de active
- 1992-01-29 DE DE69215397T patent/DE69215397T2/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| ATE145589T1 (de) | 1996-12-15 |
| AU657931B2 (en) | 1995-03-30 |
| EP0498292A2 (fr) | 1992-08-12 |
| AU8999891A (en) | 1992-08-06 |
| DE69215397D1 (de) | 1997-01-09 |
| EP0498292A3 (en) | 1993-02-24 |
| EP0498292B1 (fr) | 1996-11-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: CANON INFORMATION SYSTEMS RESEARCH AUSTRALIA PTY. |