AU657931B2 - An integrally formed bubblejet print device - Google Patents

An integrally formed bubblejet print device

Info

Publication number
AU657931B2
AU657931B2 AU89998/91A AU8999891A AU657931B2 AU 657931 B2 AU657931 B2 AU 657931B2 AU 89998/91 A AU89998/91 A AU 89998/91A AU 8999891 A AU8999891 A AU 8999891A AU 657931 B2 AU657931 B2 AU 657931B2
Authority
AU
Australia
Prior art keywords
heater
integrally formed
disclosed
ink drop
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU89998/91A
Other versions
AU8999891A (en
Inventor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Information Systems Research Australia Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Information Systems Research Australia Pty Ltd filed Critical Canon Information Systems Research Australia Pty Ltd
Priority to AU89998/91A priority Critical patent/AU657931B2/en
Priority to DE69215397T priority patent/DE69215397T2/en
Priority to AT92101475T priority patent/ATE145589T1/en
Priority to EP92101475A priority patent/EP0498292B1/en
Publication of AU8999891A publication Critical patent/AU8999891A/en
Priority to JP34494492A priority patent/JPH05338178A/en
Application granted granted Critical
Publication of AU657931B2 publication Critical patent/AU657931B2/en
Assigned to CANON INFORMATION SYSTEMS RESEARCH AUSTRALIA PTY LTD, CANON KABUSHIKI KAISHA reassignment CANON INFORMATION SYSTEMS RESEARCH AUSTRALIA PTY LTD Alteration of Name(s) in Register under S187 Assignors: CANON INFORMATION SYSTEMS RESEARCH AUSTRALIA PTY LTD
Assigned to CANON KABUSHIKI KAISHA reassignment CANON KABUSHIKI KAISHA Alteration of Name(s) in Register under S187 Assignors: CANON INFORMATION SYSTEMS RESEARCH AUSTRALIA PTY LTD, CANON KABUSHIKI KAISHA
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14032Structure of the pressure chamber
    • B41J2/1404Geometrical characteristics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14032Structure of the pressure chamber
    • B41J2/14056Plural heating elements per ink chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14137Resistor surrounding the nozzle opening
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14145Structure of the manifold
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1635Manufacturing processes dividing the wafer into individual chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1643Manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor
    • B41J2/17563Ink filters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/1437Back shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/11Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/13Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Percussion Or Vibration Massage (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Materials For Medical Uses (AREA)
  • Ink Jet (AREA)
  • Toys (AREA)

Abstract

A bubblejet print device (100) is disclosed which is integrally formed having arrays (102,103,104,105) of nozzles (110) which form part of a passageway communicating between opposite surfaces of a semiconductor substrate (130). Each nozzle (110) has an integrally formed heater (120) which permits heating of ink (106) within the respective nozzle (110) for the ejection of an ink drop (108) therefrom. The heater (120) can provide a fault tolerant structure through the provision of a main heater (121,441) and a redundant heater (122,443) each of which can be separately energised from a corresponding electronic drive circuit (160,165). Several methods of manufacturing the device (100) using semiconductor fabrication techniques are also disclosed. A bubblejet print head (200) incorporating the device (100) can form part of an image reproducing apparatus (531,533,535,537) and is capable of printing full colour images at 400 dpi and monochrome images up to 1600 dpi. An ink drop size of about 3 picolitres is used for these image intensities. A thermal shunt (140) or diffuser (491) are used to transport heat away from the heater (120) to prevent formation of hot spots thereabout after the ejection of an ink drop (108). Electronic circuitry (310,302-305) is disclosed which is used to couple data to the device (100) to provide full width page printing using a stationary head (200) and a moving paper medium (220) <IMAGE>
AU89998/91A 1991-01-30 1991-12-23 An integrally formed bubblejet print device Ceased AU657931B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AU89998/91A AU657931B2 (en) 1991-01-30 1991-12-23 An integrally formed bubblejet print device
DE69215397T DE69215397T2 (en) 1991-01-30 1992-01-29 One-piece bubblejet printing device
AT92101475T ATE145589T1 (en) 1991-01-30 1992-01-29 ONE-PIECE BUBBLEJET PRINTING DEVICE
EP92101475A EP0498292B1 (en) 1991-01-30 1992-01-29 Integrally formed bubblejet print device
JP34494492A JPH05338178A (en) 1991-12-23 1992-12-24 Ink jet print device

Applications Claiming Priority (35)

Application Number Priority Date Filing Date Title
AUPK4374 1991-01-30
AUPK437491 1991-01-30
AUPK4742 1991-02-22
AUPK473691 1991-02-22
AUPK474291 1991-02-22
AUPK474691 1991-02-22
AUPK474091 1991-02-22
AUPK473291 1991-02-22
AUPK4744 1991-02-22
AUPK474391 1991-02-22
AUPK474491 1991-02-22
AUPK4740 1991-02-22
AUPK4738 1991-02-22
AUPK4734 1991-02-22
AUPK4733 1991-02-22
AUPK4737 1991-02-22
AUPK473891 1991-02-22
AUPK473791 1991-02-22
AUPK473391 1991-02-22
AUPK474191 1991-02-22
AUPK4731 1991-02-22
AUPK4741 1991-02-22
AUPK474591 1991-02-22
AUPK4743 1991-02-22
AUPK4739 1991-02-22
AUPK473991 1991-02-22
AUPK473191 1991-02-22
AUPK473591 1991-02-22
AUPK4745 1991-02-22
AUPK4746 1991-02-22
AUPK4736 1991-02-22
AUPK4732 1991-02-22
AUPK473491 1991-02-22
AUPK4735 1991-02-22
AU89998/91A AU657931B2 (en) 1991-01-30 1991-12-23 An integrally formed bubblejet print device

Publications (2)

Publication Number Publication Date
AU8999891A AU8999891A (en) 1992-08-06
AU657931B2 true AU657931B2 (en) 1995-03-30

Family

ID=27586060

Family Applications (1)

Application Number Title Priority Date Filing Date
AU89998/91A Ceased AU657931B2 (en) 1991-01-30 1991-12-23 An integrally formed bubblejet print device

Country Status (4)

Country Link
EP (1) EP0498292B1 (en)
AT (1) ATE145589T1 (en)
AU (1) AU657931B2 (en)
DE (1) DE69215397T2 (en)

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US6045710A (en) * 1995-04-12 2000-04-04 Silverbrook; Kia Self-aligned construction and manufacturing process for monolithic print heads
US5815179A (en) * 1995-04-12 1998-09-29 Eastman Kodak Company Block fault tolerance in integrated printing heads
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US6193345B1 (en) 1997-10-30 2001-02-27 Hewlett-Packard Company Apparatus for generating high frequency ink ejection and ink chamber refill
US6234613B1 (en) * 1997-10-30 2001-05-22 Hewlett-Packard Company Apparatus for generating small volume, high velocity ink droplets in an inkjet printer
WO2000024584A1 (en) * 1998-10-24 2000-05-04 Xaar Technology Limited Droplet deposition apparatus
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US6676250B1 (en) 2000-06-30 2004-01-13 Silverbrook Research Pty Ltd Ink supply assembly for a print engine
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CN107782767B (en) * 2016-08-26 2022-01-07 深迪半导体(绍兴)有限公司 Heating plate of gas sensor and processing method
CN114633003A (en) * 2022-03-25 2022-06-17 中国人民解放军陆军装甲兵学院 Welding method and device for medium-thickness aluminum alloy plate

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US4847630A (en) * 1987-12-17 1989-07-11 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
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Also Published As

Publication number Publication date
ATE145589T1 (en) 1996-12-15
AU8999891A (en) 1992-08-06
EP0498292B1 (en) 1996-11-27
DE69215397D1 (en) 1997-01-09
EP0498292A2 (en) 1992-08-12
EP0498292A3 (en) 1993-02-24
DE69215397T2 (en) 1997-06-05

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