DE69215165D1 - Diamantschicht und Verfahren zu ihrer Herstellung - Google Patents

Diamantschicht und Verfahren zu ihrer Herstellung

Info

Publication number
DE69215165D1
DE69215165D1 DE69215165T DE69215165T DE69215165D1 DE 69215165 D1 DE69215165 D1 DE 69215165D1 DE 69215165 T DE69215165 T DE 69215165T DE 69215165 T DE69215165 T DE 69215165T DE 69215165 D1 DE69215165 D1 DE 69215165D1
Authority
DE
Germany
Prior art keywords
manufacture
diamond layer
diamond
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69215165T
Other languages
English (en)
Other versions
DE69215165T2 (de
Inventor
Takashi Tsuno
Naoji Fujimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69215165D1 publication Critical patent/DE69215165D1/de
Application granted granted Critical
Publication of DE69215165T2 publication Critical patent/DE69215165T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69215165T 1991-08-30 1992-08-27 Diamantschicht und Verfahren zu ihrer Herstellung Expired - Fee Related DE69215165T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3246718A JPH0558785A (ja) 1991-08-30 1991-08-30 ダイヤモンド膜及びその合成法

Publications (2)

Publication Number Publication Date
DE69215165D1 true DE69215165D1 (de) 1996-12-19
DE69215165T2 DE69215165T2 (de) 1997-03-06

Family

ID=17152618

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69215165T Expired - Fee Related DE69215165T2 (de) 1991-08-30 1992-08-27 Diamantschicht und Verfahren zu ihrer Herstellung

Country Status (4)

Country Link
US (1) US5427053A (de)
EP (1) EP0530021B1 (de)
JP (1) JPH0558785A (de)
DE (1) DE69215165T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5449531A (en) * 1992-11-09 1995-09-12 North Carolina State University Method of fabricating oriented diamond films on nondiamond substrates and related structures
JPH06263595A (ja) * 1993-03-10 1994-09-20 Canon Inc ダイヤモンド被覆部材及びその製造方法
WO1994026953A1 (en) * 1993-05-17 1994-11-24 North Carolina State University Method for fabricating oriented diamond films
TWI226660B (en) * 2003-04-01 2005-01-11 Univ Nat Taiwan Method of fabricating polysilicon film by Nickel/Copper induced lateral crystallization
WO2017027451A1 (en) * 2015-08-07 2017-02-16 North Carolina State University Synthesis and processing of q-carbon and q-bn, and direct conversion of carbon into diamond, bn, and c-bn
US10240251B2 (en) 2016-06-28 2019-03-26 North Carolina State University Synthesis and processing of pure and NV nanodiamonds and other nanostructures for quantum computing and magnetic sensing applications
CN114032610B (zh) * 2021-11-18 2024-06-07 济南金刚石科技有限公司 制备单晶金刚石的马赛克拼接装置及沉积方法
CN115181957B (zh) * 2022-08-25 2023-03-17 北京爱克瑞特金刚石工具有限公司 一种功能性金刚石微纳米粉体及复合体的制备和应用

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919974A (en) * 1989-01-12 1990-04-24 Ford Motor Company Making diamond composite coated cutting tools
IL93399A (en) * 1989-02-16 1994-06-24 De Beers Ind Diamond Epithelium of a diamond or a layer of diamond figures
GB8912498D0 (en) * 1989-05-31 1989-07-19 De Beers Ind Diamond Diamond growth
US5130111A (en) * 1989-08-25 1992-07-14 Wayne State University, Board Of Governors Synthetic diamond articles and their method of manufacture
JPH03126697A (ja) * 1989-10-13 1991-05-29 Sumitomo Electric Ind Ltd ダイヤモンド単結晶基板の製造方法
EP0459425A1 (de) * 1990-05-30 1991-12-04 Idemitsu Petrochemical Company Limited Verfahren zur Herstellung von Diamanten
US5183529A (en) * 1990-10-29 1993-02-02 Ford Motor Company Fabrication of polycrystalline free-standing diamond films

Also Published As

Publication number Publication date
EP0530021A3 (de) 1994-03-02
EP0530021A2 (de) 1993-03-03
JPH0558785A (ja) 1993-03-09
EP0530021B1 (de) 1996-11-13
US5427053A (en) 1995-06-27
DE69215165T2 (de) 1997-03-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: WESER & KOLLEGEN, 81245 MUENCHEN

8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee