DE69214375D1 - Kodierer und Antriebssystem - Google Patents
Kodierer und AntriebssystemInfo
- Publication number
- DE69214375D1 DE69214375D1 DE69214375T DE69214375T DE69214375D1 DE 69214375 D1 DE69214375 D1 DE 69214375D1 DE 69214375 T DE69214375 T DE 69214375T DE 69214375 T DE69214375 T DE 69214375T DE 69214375 D1 DE69214375 D1 DE 69214375D1
- Authority
- DE
- Germany
- Prior art keywords
- encoder
- drive system
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3188666A JP3066923B2 (ja) | 1991-07-29 | 1991-07-29 | エンコーダ及びこれを有するシステム |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69214375D1 true DE69214375D1 (de) | 1996-11-14 |
DE69214375T2 DE69214375T2 (de) | 1997-02-27 |
Family
ID=16227730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69214375T Expired - Lifetime DE69214375T2 (de) | 1991-07-29 | 1992-07-07 | Kodierer und Antriebssystem |
Country Status (4)
Country | Link |
---|---|
US (1) | US5302821A (de) |
EP (1) | EP0525446B1 (de) |
JP (1) | JP3066923B2 (de) |
DE (1) | DE69214375T2 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3116535B2 (ja) * | 1992-03-13 | 2000-12-11 | キヤノン株式会社 | ロータリーエンコーダー及びエンコーダー |
US5390022A (en) * | 1992-04-07 | 1995-02-14 | Canon Kabushiki Kaisha | Displacement information detection apparatus for receiving a divergent light beam |
JP3254737B2 (ja) * | 1992-06-17 | 2002-02-12 | キヤノン株式会社 | エンコーダー |
DE4233336C2 (de) * | 1992-10-05 | 2001-08-23 | Zeiss Carl | Verfahren und Vorrichtung zur Detektion von Fokusablagen |
US5652426A (en) * | 1993-04-19 | 1997-07-29 | Ricoh Company, Ltd. | Optical encoder having high resolution |
KR0141445B1 (ko) * | 1993-06-10 | 1998-07-01 | 모리시타 요이찌 | 변이의 측정방법 및 측정장치 |
JP3196459B2 (ja) * | 1993-10-29 | 2001-08-06 | キヤノン株式会社 | ロータリーエンコーダ |
GB9425907D0 (en) * | 1994-12-22 | 1995-02-22 | Renishaw Plc | Opto-electronic scale reading apparatus |
US5590059A (en) * | 1995-03-14 | 1996-12-31 | Schier; J. Alan | Position encoder system which utilites the fundamental frequency of a ruled scale on an object |
US5883384A (en) * | 1996-04-16 | 1999-03-16 | Canon Kabushiki Kaisha | Rotational displacement information detection apparatus |
JPH10260007A (ja) * | 1997-03-14 | 1998-09-29 | Ricoh Co Ltd | 相対位置検出装置 |
JP3672438B2 (ja) * | 1998-07-08 | 2005-07-20 | 株式会社リコー | 光学式エンコーダ装置 |
US6188058B1 (en) * | 1998-09-17 | 2001-02-13 | Agilent Technologies Inc. | System for taking displacement measurements having photosensors with imaged pattern arrangement |
JP4365927B2 (ja) | 1999-03-12 | 2009-11-18 | キヤノン株式会社 | 干渉計測装置及び格子干渉式エンコーダ |
US6828548B1 (en) * | 1999-10-26 | 2004-12-07 | Citizen Watch Co., Ltd. | Optical displacement measuring device |
JP4337415B2 (ja) * | 2003-06-10 | 2009-09-30 | 株式会社ニコン | エンコーダ |
GB201313751D0 (en) * | 2013-08-01 | 2013-09-18 | Renishaw Plc | Rotation Detection Apparatus |
CN104374334B (zh) * | 2014-11-17 | 2016-03-09 | 中国航空工业第六一八研究所 | 自由曲面形貌三维测量方法及装置 |
US9651404B2 (en) * | 2015-09-29 | 2017-05-16 | Mitutoyo Corporation | Optical encoder having an optical portion comprising dual lenses and an aperture portion positioned in relation to a moiré grating |
TWI675187B (zh) * | 2017-12-19 | 2019-10-21 | 財團法人工業技術研究院 | 光學編碼器 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3584959A (en) * | 1967-02-23 | 1971-06-15 | Teeg Research Inc | Shaft position encoders |
US4034403A (en) * | 1971-03-11 | 1977-07-05 | U.S. Philips Corporation | Apparatus for positional control of a reading head in a device for reproducing optically coded video disk recordings |
JPH067062B2 (ja) * | 1987-03-24 | 1994-01-26 | キヤノン株式会社 | 位置検出装置 |
FR2615281B1 (fr) * | 1987-05-11 | 1996-08-23 | Canon Kk | Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre |
JPH073344B2 (ja) * | 1987-06-15 | 1995-01-18 | キヤノン株式会社 | エンコ−ダ− |
US4874245A (en) * | 1988-02-26 | 1989-10-17 | Simmonds Precision Products, Inc. | Optical shaft angular and torsional displacement and speed sensing system |
JP2603305B2 (ja) * | 1988-07-19 | 1997-04-23 | キヤノン株式会社 | 変位測定装置 |
JPH0778433B2 (ja) * | 1988-07-19 | 1995-08-23 | キヤノン株式会社 | ロータリーエンコーダ |
JP2586121B2 (ja) * | 1988-09-30 | 1997-02-26 | キヤノン株式会社 | ロータリーエンコーダの原点検出系 |
-
1991
- 1991-07-29 JP JP3188666A patent/JP3066923B2/ja not_active Expired - Fee Related
-
1992
- 1992-06-24 US US07/903,522 patent/US5302821A/en not_active Expired - Lifetime
- 1992-07-07 EP EP92111486A patent/EP0525446B1/de not_active Expired - Lifetime
- 1992-07-07 DE DE69214375T patent/DE69214375T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5302821A (en) | 1994-04-12 |
JP3066923B2 (ja) | 2000-07-17 |
EP0525446B1 (de) | 1996-10-09 |
JPH0534173A (ja) | 1993-02-09 |
EP0525446A1 (de) | 1993-02-03 |
DE69214375T2 (de) | 1997-02-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |