DE69212333D1 - Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert - Google Patents

Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert

Info

Publication number
DE69212333D1
DE69212333D1 DE69212333T DE69212333T DE69212333D1 DE 69212333 D1 DE69212333 D1 DE 69212333D1 DE 69212333 T DE69212333 T DE 69212333T DE 69212333 T DE69212333 T DE 69212333T DE 69212333 D1 DE69212333 D1 DE 69212333D1
Authority
DE
Germany
Prior art keywords
scan speed
emission signals
spectral emission
light beam
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69212333T
Other languages
English (en)
Other versions
DE69212333T2 (de
Inventor
Michael Cates
Richard Hamm
John Hoogerwerf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxwell Technologies Inc
Original Assignee
Maxwell Laboratories Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maxwell Laboratories Inc filed Critical Maxwell Laboratories Inc
Application granted granted Critical
Publication of DE69212333D1 publication Critical patent/DE69212333D1/de
Publication of DE69212333T2 publication Critical patent/DE69212333T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B44DECORATIVE ARTS
    • B44DPAINTING OR ARTISTIC DRAWING, NOT OTHERWISE PROVIDED FOR; PRESERVING PAINTINGS; SURFACE TREATMENT TO OBTAIN SPECIAL ARTISTIC SURFACE EFFECTS OR FINISHES
    • B44D3/00Accessories or implements for use in connection with painting or artistic drawing, not otherwise provided for; Methods or devices for colour determination, selection, or synthesis, e.g. use of colour tables
    • B44D3/16Implements or apparatus for removing dry paint from surfaces, e.g. by scraping, by burning
    • B44D3/166Implements or apparatus for removing dry paint from surfaces, e.g. by scraping, by burning by heating, e.g. by burning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • B23K26/705Beam measuring device
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/16Composite materials, e.g. fibre reinforced
    • B23K2103/166Multilayered materials
    • B23K2103/172Multilayered materials wherein at least one of the layers is non-metallic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/30Organic material
    • B23K2103/42Plastics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Cleaning In General (AREA)
DE69212333T 1991-12-24 1992-12-17 Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert Expired - Fee Related DE69212333T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/813,865 US5204517A (en) 1991-12-24 1991-12-24 Method and system for control of a material removal process using spectral emission discrimination
PCT/US1992/010936 WO1993012906A1 (en) 1991-12-24 1992-12-17 Method and system for control of a material removal process using spectral emission discrimination

Publications (2)

Publication Number Publication Date
DE69212333D1 true DE69212333D1 (de) 1996-08-22
DE69212333T2 DE69212333T2 (de) 1996-12-12

Family

ID=25213613

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69212333T Expired - Fee Related DE69212333T2 (de) 1991-12-24 1992-12-17 Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert

Country Status (7)

Country Link
US (1) US5204517A (de)
EP (1) EP0618850B1 (de)
JP (1) JP3126145B2 (de)
AT (1) ATE140411T1 (de)
CA (1) CA2125677A1 (de)
DE (1) DE69212333T2 (de)
WO (1) WO1993012906A1 (de)

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WO1995024279A1 (fr) * 1994-03-10 1995-09-14 Ishikawa, Toshiharu Dispositif d'enlevement de pellicule
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US7286223B2 (en) * 2003-03-18 2007-10-23 Loma Linda University Medical Center Method and apparatus for detecting embedded rebar within an interaction region of a structure irradiated with laser light
US20050197834A1 (en) * 2004-03-03 2005-09-08 General Electric Company Systems, methods, and an article of manufacture for determining frequency values associated with forces applied to a device
FI118937B (fi) * 2005-07-13 2008-05-15 Picodeon Ltd Oy Diodipumppu
WO2007006850A2 (en) * 2005-07-13 2007-01-18 Picodeon Ltd Oy Radiation arrangement
US7654010B2 (en) * 2006-02-23 2010-02-02 Tokyo Electron Limited Substrate processing system, substrate processing method, and storage medium
US20090314752A1 (en) * 2008-05-14 2009-12-24 Applied Materials, Inc. In-situ monitoring for laser ablation
CN102149509B (zh) * 2008-07-09 2014-08-20 Fei公司 用于激光加工的方法和设备
ITMI20091790A1 (it) * 2009-10-19 2011-04-20 Laser Point S R L Apparato per l'individuazione del punto finale del processo di incisione laser su celle solari multistrato e relativo metodo.
US8772671B2 (en) * 2010-06-30 2014-07-08 Resonetics, LLC Precision laser ablation
US10112257B1 (en) * 2010-07-09 2018-10-30 General Lasertronics Corporation Coating ablating apparatus with coating removal detection
US9120181B2 (en) 2010-09-16 2015-09-01 Coherent, Inc. Singulation of layered materials using selectively variable laser output
US8466434B2 (en) 2010-11-02 2013-06-18 Goodrich Corporation Aircraft potable water system
US9375974B2 (en) * 2010-12-09 2016-06-28 Edison Welding Institute, Inc. Polygonal laser scanner and imaging system for coating removal
ITTO20110352A1 (it) * 2011-04-21 2012-10-22 Adige Spa Metodo per il controllo di un processo di taglio laser e sistema di taglio laser implementante tale metodo
US10239160B2 (en) 2011-09-21 2019-03-26 Coherent, Inc. Systems and processes that singulate materials
US9895771B2 (en) 2012-02-28 2018-02-20 General Lasertronics Corporation Laser ablation for the environmentally beneficial removal of surface coatings
US9460029B2 (en) * 2012-03-02 2016-10-04 Microsoft Technology Licensing, Llc Pressure sensitive keys
USRE48963E1 (en) 2012-03-02 2022-03-08 Microsoft Technology Licensing, Llc Connection device for computing devices
KR102249405B1 (ko) * 2012-12-20 2021-05-07 쓰리엠 이노베이티브 프로퍼티즈 캄파니 재료 처리 저관성 레이저 주사 엔드 이펙터 조작
RU2538161C2 (ru) * 2012-12-28 2015-01-10 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский национальный исследовательский университет информационных технологий, механики и оптики" Способ лазерной очистки поверхности
GB2553515A (en) * 2016-09-01 2018-03-14 Rolls Royce Plc Method
CA3044510A1 (fr) * 2016-11-23 2018-05-31 Aperam Procede de decapage laser d'un produit metallique en defilement, et installation pour son execution
EP3527643B1 (de) * 2018-02-16 2022-04-06 Università degli studi di Bergamo Verfahren zur durchführung der pyrolyse von grundmaterialien, insbesondere von grundmaterialien aus reifen oder bitumen, sowie anlage zur durchführung der pyrolyse nach diesem verfahren
US11235359B2 (en) * 2019-02-11 2022-02-01 The Boeing Company Robotic laser and vacuum cleaning for environmental gains
US11317517B2 (en) * 2020-06-12 2022-04-26 PulseForge Incorporated Method for connecting surface-mount electronic components to a circuit board

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Also Published As

Publication number Publication date
EP0618850B1 (de) 1996-07-17
JP3126145B2 (ja) 2001-01-22
JPH07505091A (ja) 1995-06-08
DE69212333T2 (de) 1996-12-12
ATE140411T1 (de) 1996-08-15
US5204517A (en) 1993-04-20
CA2125677A1 (en) 1993-07-08
EP0618850A1 (de) 1994-10-12
WO1993012906A1 (en) 1993-07-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MAXWELL TECHNOLOGIES, INC. (N.D.GES.D. STAATES DEL

8339 Ceased/non-payment of the annual fee