DE69212333T2 - Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert - Google Patents
Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiertInfo
- Publication number
- DE69212333T2 DE69212333T2 DE69212333T DE69212333T DE69212333T2 DE 69212333 T2 DE69212333 T2 DE 69212333T2 DE 69212333 T DE69212333 T DE 69212333T DE 69212333 T DE69212333 T DE 69212333T DE 69212333 T2 DE69212333 T2 DE 69212333T2
- Authority
- DE
- Germany
- Prior art keywords
- scan speed
- emission signals
- spectral emission
- light beam
- intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B44—DECORATIVE ARTS
- B44D—PAINTING OR ARTISTIC DRAWING, NOT OTHERWISE PROVIDED FOR; PRESERVING PAINTINGS; SURFACE TREATMENT TO OBTAIN SPECIAL ARTISTIC SURFACE EFFECTS OR FINISHES
- B44D3/00—Accessories or implements for use in connection with painting or artistic drawing, not otherwise provided for; Methods or devices for colour determination, selection, or synthesis, e.g. use of colour tables
- B44D3/16—Implements or apparatus for removing dry paint from surfaces, e.g. by scraping, by burning
- B44D3/166—Implements or apparatus for removing dry paint from surfaces, e.g. by scraping, by burning by heating, e.g. by burning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Laser Beam Processing (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Cleaning In General (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/813,865 US5204517A (en) | 1991-12-24 | 1991-12-24 | Method and system for control of a material removal process using spectral emission discrimination |
PCT/US1992/010936 WO1993012906A1 (en) | 1991-12-24 | 1992-12-17 | Method and system for control of a material removal process using spectral emission discrimination |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69212333D1 DE69212333D1 (de) | 1996-08-22 |
DE69212333T2 true DE69212333T2 (de) | 1996-12-12 |
Family
ID=25213613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69212333T Expired - Fee Related DE69212333T2 (de) | 1991-12-24 | 1992-12-17 | Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert |
Country Status (7)
Country | Link |
---|---|
US (1) | US5204517A (de) |
EP (1) | EP0618850B1 (de) |
JP (1) | JP3126145B2 (de) |
AT (1) | ATE140411T1 (de) |
CA (1) | CA2125677A1 (de) |
DE (1) | DE69212333T2 (de) |
WO (1) | WO1993012906A1 (de) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5643472A (en) * | 1988-07-08 | 1997-07-01 | Cauldron Limited Partnership | Selective removal of material by irradiation |
US6048588A (en) * | 1988-07-08 | 2000-04-11 | Cauldron Limited Partnership | Method for enhancing chemisorption of material |
DE4114492C2 (de) * | 1991-05-03 | 1996-10-24 | Baasel Carl Lasertech | Verfahren und Vorrichtung zur Materialbearbeitung mit Hilfe eines Lasers |
US5782253A (en) * | 1991-12-24 | 1998-07-21 | Mcdonnell Douglas Corporation | System for removing a coating from a substrate |
US5613509A (en) * | 1991-12-24 | 1997-03-25 | Maxwell Laboratories, Inc. | Method and apparatus for removing contaminants and coatings from a substrate using pulsed radiant energy and liquid carbon dioxide |
US5373140A (en) * | 1993-03-16 | 1994-12-13 | Vernay Laboratories, Inc. | System for cleaning molding equipment using a laser |
FR2703618B1 (fr) * | 1993-04-08 | 1995-06-09 | France Etat Armement | Dispositif de décapage au laser. |
FR2708877B1 (fr) * | 1993-08-12 | 1995-11-03 | Onet | Procédé et dispositif de décontamination autocontrôlé de surfaces par laser. |
KR960706405A (ko) * | 1993-12-17 | 1996-12-09 | 테릴 켄트 퀼리 | 근접 석판인쇄에 의한 융식성 결상법(ablative imaging by proximity lithography) |
CA2137632A1 (en) * | 1993-12-17 | 1995-06-18 | Douglas S. Dunn | Ablative flashlamp imaging |
WO1995024279A1 (fr) * | 1994-03-10 | 1995-09-14 | Ishikawa, Toshiharu | Dispositif d'enlevement de pellicule |
US5523543A (en) * | 1994-09-09 | 1996-06-04 | Litel Instruments | Laser ablation control system and method |
DE19619137A1 (de) * | 1996-05-11 | 1997-11-13 | Urenco Deutschland Gmbh | Verfahren zum Diagnostizieren einer Oberfläche und anschließendem selektiven Abtragen von Schichten |
US5800625A (en) * | 1996-07-26 | 1998-09-01 | Cauldron Limited Partnership | Removal of material by radiation applied at an oblique angle |
US5789755A (en) * | 1996-08-28 | 1998-08-04 | New Star Lasers, Inc. | Method and apparatus for removal of material utilizing near-blackbody radiator means |
US5986234A (en) * | 1997-03-28 | 1999-11-16 | The Regents Of The University Of California | High removal rate laser-based coating removal system |
JP3594794B2 (ja) * | 1998-03-24 | 2004-12-02 | 独立行政法人 科学技術振興機構 | ナノ秒時間ゲート分光診断装置 |
WO2000026029A1 (en) * | 1998-11-04 | 2000-05-11 | Xenon Corporation | A spiral-shaped lamp for uv curing of coatings and bonding for a digital versatile disk (dvd) or compact disk (cd) |
US6347976B1 (en) | 1999-11-30 | 2002-02-19 | The Boeing Company | Coating removal system having a solid particle nozzle with a detector for detecting particle flow and associated method |
AU2001261445A1 (en) | 2000-05-12 | 2001-11-26 | Mathias P. B. Bostrom | Determination of the ultrastructure of connective tissue by an infrared fiber-optic spectroscopic probe |
US6649861B2 (en) * | 2000-05-24 | 2003-11-18 | Potomac Photonics, Inc. | Method and apparatus for fabrication of miniature structures |
US7270724B2 (en) * | 2000-12-13 | 2007-09-18 | Uvtech Systems, Inc. | Scanning plasma reactor |
EP1238749B1 (de) * | 2001-03-08 | 2005-12-07 | Trumpf Werkzeugmaschinen GmbH + Co. KG | Verfahren und Vorrichtung zum Brennschneiden von Werkstücken |
JP3476441B2 (ja) * | 2001-04-11 | 2003-12-10 | ファナック株式会社 | レーザ加工ノズル |
GB2396408B (en) * | 2001-05-10 | 2005-06-29 | Hospital For Special Surgery | Utilization of an infrared probe to discriminate between materials |
US20060138104A1 (en) * | 2001-05-25 | 2006-06-29 | Devore Paul W | Fuel cell and liquid container sealant removal system |
US7253901B2 (en) * | 2002-01-23 | 2007-08-07 | Kla-Tencor Technologies Corporation | Laser-based cleaning device for film analysis tool |
CA2510549C (en) * | 2002-12-23 | 2012-03-13 | Catalyst Services, Inc. | A cleaning and/or inspecting robot for hazardous environments including catalyst removal |
US6976234B2 (en) * | 2003-01-13 | 2005-12-13 | Credence Systems Corporation | Apparatus and method for measuring characteristics of dynamic electrical signals in integrated circuits |
US7286223B2 (en) * | 2003-03-18 | 2007-10-23 | Loma Linda University Medical Center | Method and apparatus for detecting embedded rebar within an interaction region of a structure irradiated with laser light |
US20050197834A1 (en) * | 2004-03-03 | 2005-09-08 | General Electric Company | Systems, methods, and an article of manufacture for determining frequency values associated with forces applied to a device |
FI118937B (fi) * | 2005-07-13 | 2008-05-15 | Picodeon Ltd Oy | Diodipumppu |
EP1910013A2 (de) * | 2005-07-13 | 2008-04-16 | Picodeon Ltd OY | Strahlungsanordnung |
US7654010B2 (en) * | 2006-02-23 | 2010-02-02 | Tokyo Electron Limited | Substrate processing system, substrate processing method, and storage medium |
US20090314752A1 (en) * | 2008-05-14 | 2009-12-24 | Applied Materials, Inc. | In-situ monitoring for laser ablation |
WO2010006067A2 (en) * | 2008-07-09 | 2010-01-14 | Fei Company | Method and apparatus for laser machining |
ITMI20091790A1 (it) * | 2009-10-19 | 2011-04-20 | Laser Point S R L | Apparato per l'individuazione del punto finale del processo di incisione laser su celle solari multistrato e relativo metodo. |
WO2012005816A2 (en) * | 2010-06-30 | 2012-01-12 | Resonetics Llc | Precision laser ablation |
US10112257B1 (en) * | 2010-07-09 | 2018-10-30 | General Lasertronics Corporation | Coating ablating apparatus with coating removal detection |
KR20140018183A (ko) * | 2010-09-16 | 2014-02-12 | 레이디안스, 아이엔씨. | 적층 재료의 레이저 기반 처리 |
US8466434B2 (en) | 2010-11-02 | 2013-06-18 | Goodrich Corporation | Aircraft potable water system |
US9375974B2 (en) | 2010-12-09 | 2016-06-28 | Edison Welding Institute, Inc. | Polygonal laser scanner and imaging system for coating removal |
ITTO20110352A1 (it) * | 2011-04-21 | 2012-10-22 | Adige Spa | Metodo per il controllo di un processo di taglio laser e sistema di taglio laser implementante tale metodo |
US10239160B2 (en) | 2011-09-21 | 2019-03-26 | Coherent, Inc. | Systems and processes that singulate materials |
US9895771B2 (en) | 2012-02-28 | 2018-02-20 | General Lasertronics Corporation | Laser ablation for the environmentally beneficial removal of surface coatings |
US9134807B2 (en) * | 2012-03-02 | 2015-09-15 | Microsoft Technology Licensing, Llc | Pressure sensitive key normalization |
USRE48963E1 (en) | 2012-03-02 | 2022-03-08 | Microsoft Technology Licensing, Llc | Connection device for computing devices |
WO2014107274A1 (en) * | 2012-12-20 | 2014-07-10 | 3M Innovative Properties Company | Material processing low-inertia laser scanning end-effector manipulation |
RU2538161C2 (ru) * | 2012-12-28 | 2015-01-10 | федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский национальный исследовательский университет информационных технологий, механики и оптики" | Способ лазерной очистки поверхности |
GB2553515A (en) * | 2016-09-01 | 2018-03-14 | Rolls Royce Plc | Method |
RU2718819C1 (ru) * | 2016-11-23 | 2020-04-14 | Аперам | Способ лазерной очистки от окалины движущегося металлического продукта и устройство для его осуществления |
EP3527643B1 (de) * | 2018-02-16 | 2022-04-06 | Università degli studi di Bergamo | Verfahren zur durchführung der pyrolyse von grundmaterialien, insbesondere von grundmaterialien aus reifen oder bitumen, sowie anlage zur durchführung der pyrolyse nach diesem verfahren |
US11235359B2 (en) * | 2019-02-11 | 2022-02-01 | The Boeing Company | Robotic laser and vacuum cleaning for environmental gains |
US11317517B2 (en) * | 2020-06-12 | 2022-04-26 | PulseForge Incorporated | Method for connecting surface-mount electronic components to a circuit board |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3700850A (en) * | 1970-09-04 | 1972-10-24 | Western Electric Co | Method for detecting the amount of material removed by a laser |
US3986391A (en) * | 1975-09-22 | 1976-10-19 | Western Electric Company, Inc. | Method and apparatus for the real-time monitoring of a continuous weld using stress-wave emission techniques |
US4114018A (en) * | 1976-09-30 | 1978-09-12 | Lasag Ag | Method for ablating metal workpieces with laser radiation |
US4249956A (en) * | 1979-08-01 | 1981-02-10 | Hartman Charles N | Method of removing paint from a brick surface |
US4398961A (en) * | 1980-12-01 | 1983-08-16 | Mason Richard R | Method for removing paint with air stream heated by hot gas |
US4491484A (en) * | 1981-11-24 | 1985-01-01 | Mobile Companies, Inc. | Cryogenic cleaning process |
US4419562A (en) * | 1982-01-19 | 1983-12-06 | Western Electric Co., Inc. | Nondestructive real-time method for monitoring the quality of a weld |
US4756765A (en) * | 1982-01-26 | 1988-07-12 | Avco Research Laboratory, Inc. | Laser removal of poor thermally-conductive materials |
US4867796A (en) * | 1982-04-05 | 1989-09-19 | Maxwell Laboratories, Inc. | Photodecontamination of surfaces |
US4504727A (en) * | 1982-12-30 | 1985-03-12 | International Business Machines Corporation | Laser drilling system utilizing photoacoustic feedback |
US4543486A (en) * | 1983-05-20 | 1985-09-24 | The United States Of America As Represented By The Secretary Of The Army | Method and apparatus for using a photoacoustic effect for controlling various processes utilizing laser and ion beams, and the like |
US4737628A (en) * | 1984-02-07 | 1988-04-12 | International Technical Associates | Method and system for controlled and selective removal of material |
US4588885A (en) * | 1984-02-07 | 1986-05-13 | International Technical Associates | Method of and apparatus for the removal of paint and the like from a substrate |
IT1180008B (it) * | 1984-03-02 | 1987-09-23 | Fiat Ricerche | Metodo e dispositivo per il controllo dei processi di saldatura mediante l'analisi della luminosita generata durante il processo |
US4731125A (en) * | 1984-04-19 | 1988-03-15 | Carr Lawrence S | Media blast paint removal system |
US4682594A (en) * | 1985-03-11 | 1987-07-28 | Mcm Laboratories, Inc. | Probe-and-fire lasers |
DE3767890D1 (de) * | 1986-02-14 | 1991-03-14 | Amoco Corp | Behandlung von geformten oberflaechen mit ultraviolettlaser. |
US5026964A (en) * | 1986-02-28 | 1991-06-25 | General Electric Company | Optical breakthrough sensor for laser drill |
US4836858A (en) * | 1986-09-02 | 1989-06-06 | The United States Of America As Represented By The Secretary Of The Air Force | Ultrasonic assisted paint removal method |
US4718974A (en) * | 1987-01-09 | 1988-01-12 | Ultraphase Equipment, Inc. | Photoresist stripping apparatus using microwave pumped ultraviolet lamp |
US5024968A (en) * | 1988-07-08 | 1991-06-18 | Engelsberg Audrey C | Removal of surface contaminants by irradiation from a high-energy source |
US5013366A (en) * | 1988-12-07 | 1991-05-07 | Hughes Aircraft Company | Cleaning process using phase shifting of dense phase gases |
GB2226970B (en) * | 1989-01-11 | 1992-10-21 | British Aerospace | Methods of manufacture and surface treatment using laser radiation |
DE3911329A1 (de) * | 1989-04-07 | 1990-10-11 | Dornier Luftfahrt | Verfahren zum entlacken von werkstuecken, insbesondere faserverbundwerkstuecken |
DE3913785A1 (de) * | 1989-04-26 | 1990-10-31 | Siemens Ag | Verfahren und vorrichtung zum thermischen abtragen durch laserstrahlen |
-
1991
- 1991-12-24 US US07/813,865 patent/US5204517A/en not_active Expired - Fee Related
-
1992
- 1992-12-17 AT AT93901187T patent/ATE140411T1/de not_active IP Right Cessation
- 1992-12-17 CA CA002125677A patent/CA2125677A1/en not_active Abandoned
- 1992-12-17 JP JP05511754A patent/JP3126145B2/ja not_active Expired - Fee Related
- 1992-12-17 DE DE69212333T patent/DE69212333T2/de not_active Expired - Fee Related
- 1992-12-17 EP EP93901187A patent/EP0618850B1/de not_active Expired - Lifetime
- 1992-12-17 WO PCT/US1992/010936 patent/WO1993012906A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CA2125677A1 (en) | 1993-07-08 |
JPH07505091A (ja) | 1995-06-08 |
ATE140411T1 (de) | 1996-08-15 |
EP0618850A1 (de) | 1994-10-12 |
DE69212333D1 (de) | 1996-08-22 |
US5204517A (en) | 1993-04-20 |
EP0618850B1 (de) | 1996-07-17 |
JP3126145B2 (ja) | 2001-01-22 |
WO1993012906A1 (en) | 1993-07-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69212333D1 (de) | Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert | |
ATE153135T1 (de) | Verfahren und vorrichtung zur überwachung der glukosekonzentration | |
ATE71322T1 (de) | Verfahren und vorrichtung zur materialbearbeitung mit hilfe eines lasers. | |
WO1999002956A3 (en) | Method and devices for laser induced fluorescence attenuation spectroscopy (lifas) | |
ATE31141T1 (de) | Vorrichtung zum untersuchen eines fingerreliefs. | |
DE3776650D1 (de) | Vorrichtung zur erzeugung von bildern eines objekts und insbesondere zur beobachtung der hinteren augenabschnitte. | |
US4794260A (en) | Method for detecting fingerprints using a laser and an apparatus therefor | |
DE3786857D1 (de) | Verfahren zum nachweis von gegenstaenden und elektrooptische vorrichtung. | |
DE58906980D1 (de) | Verfahren zum Betrieb eines optischen Rauchmelders sowie Rauchmelder zur Durchführung des Verfahrens. | |
DE69320020T2 (de) | Verfahren zur Inspektion von ophthalmischen Linsen | |
JP2003181659A (ja) | レーザ・マーキング法およびこの方法を実施する装置 | |
CA2217687A1 (en) | Sensitive and fast response optical detection of transient motion from a scattering surface by two-wave mixing | |
ATE88666T1 (de) | Verfahren und vorrichtung zum bearbeiten von werkstuecken mit laserstrahlung. | |
DE59510774D1 (de) | Vorrichtung und Verfahren zur Messung des Bräunungsgrades eines Gargutes | |
CA1258973A (en) | Method for detecting fingerprints using a laser and an apparatus therefor | |
FI103076B1 (fi) | Menetelmä ja laite kuoren detektoimiseksi ja puun ja hakkeen kuorinta-asteen mittaamiseksi | |
EP0324583A3 (de) | Fernfühleinrichtung | |
EP0833123A3 (de) | Verschiebungsdetektionsvorrichtung und System zur Flugkörperlenkung damit | |
KR850008217A (ko) | 투명물체내의 결함탐지 방법 | |
KR950034474A (ko) | 이물검사장치 및 이물검사방법 | |
EP0568460A1 (de) | Verfahren und Apparatur zur schnellen und berührungslosen Identifizierung von Holzarten | |
KR960703361A (ko) | 레이저 가공장치와 레이저 가공방법 및 댐바 가공방법(laser processing apparatus, laser processing method and dam bar processing method) | |
KR880002252A (ko) | 이물 검출 장치 | |
DE59702033D1 (de) | Verfahren zum Laserstrahlschneiden von Werkstücken | |
EP0324239A3 (de) | Abtasthilfe für einen Laserabtaster |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: MAXWELL TECHNOLOGIES, INC. (N.D.GES.D. STAATES DEL |
|
8339 | Ceased/non-payment of the annual fee |