DE69212119T2 - Behandlung von Fotoresistabfall - Google Patents

Behandlung von Fotoresistabfall

Info

Publication number
DE69212119T2
DE69212119T2 DE69212119T DE69212119T DE69212119T2 DE 69212119 T2 DE69212119 T2 DE 69212119T2 DE 69212119 T DE69212119 T DE 69212119T DE 69212119 T DE69212119 T DE 69212119T DE 69212119 T2 DE69212119 T2 DE 69212119T2
Authority
DE
Germany
Prior art keywords
treatment
photoresist waste
photoresist
waste
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69212119T
Other languages
English (en)
Other versions
DE69212119D1 (de
Inventor
Allen Jefferson Erb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69212119D1 publication Critical patent/DE69212119D1/de
Application granted granted Critical
Publication of DE69212119T2 publication Critical patent/DE69212119T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
    • C02F1/5236—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using inorganic agents
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/902—Materials removed
    • Y10S210/908—Organic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Removal Of Specific Substances (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
DE69212119T 1991-11-26 1992-11-20 Behandlung von Fotoresistabfall Expired - Fee Related DE69212119T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/800,344 US5182029A (en) 1991-11-26 1991-11-26 Aqueous photoresist waste treatment by acid/cupric chloride precipitation

Publications (2)

Publication Number Publication Date
DE69212119D1 DE69212119D1 (de) 1996-08-14
DE69212119T2 true DE69212119T2 (de) 1997-01-30

Family

ID=25178167

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69212119T Expired - Fee Related DE69212119T2 (de) 1991-11-26 1992-11-20 Behandlung von Fotoresistabfall

Country Status (4)

Country Link
US (1) US5182029A (de)
EP (1) EP0544469B1 (de)
JP (1) JPH08233B2 (de)
DE (1) DE69212119T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5252225A (en) * 1991-11-25 1993-10-12 Morton International, Inc. Method for precipitating an organic resin from an alkaline solution thereof
US5275734A (en) * 1992-08-04 1994-01-04 International Business Machines Corporation Chemical pre-treatment and biological destruction of propylene carbonate waste streams effluent streams to reduce the biological oxygen demand thereof
US5439564A (en) * 1992-11-10 1995-08-08 Tama Chemicals Co. Ltd. Method of processing organic quaternary ammonium hydroxide-containing waste liquid
US5308502A (en) * 1992-12-17 1994-05-03 Tandy Coporation Method for waste treatment of organic strippers containing metals
DE69421577T2 (de) * 1993-08-16 2000-07-13 Ebara Corp Vorrichtung zur Behandlung von Abfall in einer Poliervorrichtung
US5800718A (en) * 1995-02-02 1998-09-01 Robert M. Gaudette Method for treating dry film stripping and developing solution
US5615862A (en) * 1995-02-02 1997-04-01 Gaudette; Robert M. Metal precipitation composition for treating spent dry film stripping solution
CN1148098C (zh) 1998-12-10 2004-04-28 诺基亚网络有限公司 无线通信网中安全脱离过程的一种方法
JP5249305B2 (ja) * 2010-10-29 2013-07-31 水ｉｎｇ株式会社 電子部品工場廃液の処理方法及びそのための装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4761239A (en) * 1986-04-10 1988-08-02 Wardell Harry H Waste water clarification
US4760014A (en) * 1986-08-01 1988-07-26 Great Lakes Chemical Corporation Method for treating mixtures containing photopolymeric resin and compositions therefor
US4857206A (en) * 1987-11-02 1989-08-15 Tmc Corp. Method for treating, spent dryfilm stripping and developing solutions
US4999114A (en) * 1987-11-02 1991-03-12 Morton International Method of treating spent dryfilm stripping and developing solutions with a chemical mixture
JPH02157084A (ja) * 1988-01-12 1990-06-15 Konica Corp 廃液処理の作業性等が改善される非銀塩感光材料の処理方法及び処理装置

Also Published As

Publication number Publication date
EP0544469B1 (de) 1996-07-10
JPH05220487A (ja) 1993-08-31
JPH08233B2 (ja) 1996-01-10
US5182029A (en) 1993-01-26
DE69212119D1 (de) 1996-08-14
EP0544469A1 (de) 1993-06-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee