DE69206543D1 - Elektronzyklotronresonanz-Ionenquelle mit koaxialer Zuführung elektromagnetischer Wellen. - Google Patents

Elektronzyklotronresonanz-Ionenquelle mit koaxialer Zuführung elektromagnetischer Wellen.

Info

Publication number
DE69206543D1
DE69206543D1 DE69206543T DE69206543T DE69206543D1 DE 69206543 D1 DE69206543 D1 DE 69206543D1 DE 69206543 T DE69206543 T DE 69206543T DE 69206543 T DE69206543 T DE 69206543T DE 69206543 D1 DE69206543 D1 DE 69206543D1
Authority
DE
Germany
Prior art keywords
electromagnetic waves
ion source
cyclotron resonance
electron cyclotron
coaxial supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69206543T
Other languages
English (en)
Other versions
DE69206543T2 (de
Inventor
Bernard Jacquot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69206543D1 publication Critical patent/DE69206543D1/de
Application granted granted Critical
Publication of DE69206543T2 publication Critical patent/DE69206543T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
DE69206543T 1991-09-11 1992-09-09 Elektronzyklotronresonanz-Ionenquelle mit koaxialer Zuführung elektromagnetischer Wellen. Expired - Fee Related DE69206543T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9111206A FR2681186B1 (fr) 1991-09-11 1991-09-11 Source d'ions a resonance cyclotronique electronique et a injection coaxiale d'ondes electromagnetiques.

Publications (2)

Publication Number Publication Date
DE69206543D1 true DE69206543D1 (de) 1996-01-18
DE69206543T2 DE69206543T2 (de) 1996-07-11

Family

ID=9416838

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69206543T Expired - Fee Related DE69206543T2 (de) 1991-09-11 1992-09-09 Elektronzyklotronresonanz-Ionenquelle mit koaxialer Zuführung elektromagnetischer Wellen.

Country Status (5)

Country Link
US (1) US5350974A (de)
EP (1) EP0532411B1 (de)
JP (1) JPH05205648A (de)
DE (1) DE69206543T2 (de)
FR (1) FR2681186B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100271244B1 (ko) * 1993-09-07 2000-11-01 히가시 데쓰로 전자빔 여기식 플라즈마장치
US6812647B2 (en) * 2003-04-03 2004-11-02 Wayne D. Cornelius Plasma generator useful for ion beam generation
FR2861947B1 (fr) * 2003-11-04 2007-11-09 Commissariat Energie Atomique Dispositif pour controler la temperature electronique dans un plasma rce
US20080128641A1 (en) * 2006-11-08 2008-06-05 Silicon Genesis Corporation Apparatus and method for introducing particles using a radio frequency quadrupole linear accelerator for semiconductor materials
US20100290575A1 (en) * 2009-05-15 2010-11-18 Rosenthal Glenn B Particle beam isotope generator apparatus, system and method
CN101808459A (zh) * 2010-03-16 2010-08-18 清华大学 一种用于管状高分子材料支架内表面改性的低温等离子体处理装置
CN102333410B (zh) * 2011-09-16 2013-02-06 西安交通大学 一种用于刻蚀光阻材料的大气压冷等离子体射流装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2556498B1 (fr) * 1983-12-07 1986-09-05 Commissariat Energie Atomique Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique
FR2595868B1 (fr) * 1986-03-13 1988-05-13 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques

Also Published As

Publication number Publication date
EP0532411A1 (de) 1993-03-17
US5350974A (en) 1994-09-27
EP0532411B1 (de) 1995-12-06
JPH05205648A (ja) 1993-08-13
FR2681186B1 (fr) 1993-10-29
DE69206543T2 (de) 1996-07-11
FR2681186A1 (fr) 1993-03-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee