DE69206229T2 - Vorrichtung zum Tragen und zur linearen Bewegung eines Objektes. - Google Patents

Vorrichtung zum Tragen und zur linearen Bewegung eines Objektes.

Info

Publication number
DE69206229T2
DE69206229T2 DE69206229T DE69206229T DE69206229T2 DE 69206229 T2 DE69206229 T2 DE 69206229T2 DE 69206229 T DE69206229 T DE 69206229T DE 69206229 T DE69206229 T DE 69206229T DE 69206229 T2 DE69206229 T2 DE 69206229T2
Authority
DE
Germany
Prior art keywords
carrying
linear movement
linear
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69206229T
Other languages
English (en)
Other versions
DE69206229D1 (de
Inventor
Toshikatsu Akiba
Shitta Shingu
Kenichi Takahara
Hiroshi Takahashi
Arata Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP21361791A external-priority patent/JP3183913B2/ja
Priority claimed from JP28013591A external-priority patent/JPH05122893A/ja
Priority claimed from JP28005991A external-priority patent/JP3197031B2/ja
Priority claimed from JP28013691A external-priority patent/JPH05122894A/ja
Priority claimed from JP27997291A external-priority patent/JPH05122891A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE69206229D1 publication Critical patent/DE69206229D1/de
Publication of DE69206229T2 publication Critical patent/DE69206229T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0472—Active magnetic bearings for linear movement
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B3/00—Details of movements not otherwise provided for
    • G12B3/08—Damping of movements, e.g. to promote rapid non-oscillatory movement to a final reading
DE69206229T 1991-08-26 1992-08-26 Vorrichtung zum Tragen und zur linearen Bewegung eines Objektes. Expired - Fee Related DE69206229T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP21361791A JP3183913B2 (ja) 1991-08-26 1991-08-26 直線動支持装置
JP28013591A JPH05122893A (ja) 1991-10-25 1991-10-25 直線動磁気支持装置
JP28005991A JP3197031B2 (ja) 1991-10-25 1991-10-25 直線動磁気支持装置
JP28013691A JPH05122894A (ja) 1991-10-25 1991-10-25 直線動磁気支持装置
JP27997291A JPH05122891A (ja) 1991-10-25 1991-10-25 直線動磁気支持装置

Publications (2)

Publication Number Publication Date
DE69206229D1 DE69206229D1 (de) 1996-01-04
DE69206229T2 true DE69206229T2 (de) 1996-03-28

Family

ID=27529557

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69206229T Expired - Fee Related DE69206229T2 (de) 1991-08-26 1992-08-26 Vorrichtung zum Tragen und zur linearen Bewegung eines Objektes.

Country Status (3)

Country Link
US (1) US5287031A (de)
EP (1) EP0534613B1 (de)
DE (1) DE69206229T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696412A (en) * 1993-10-20 1997-12-09 Iannello; Victor Sensor-less position detector for an active magnetic bearing
JP3463218B2 (ja) * 1993-12-24 2003-11-05 光洋精工株式会社 磁気軸受装置
EP0671614A1 (de) * 1994-03-07 1995-09-13 Kabushiki Kaisha Toshiba Vorrichtung zur Unterstützung und linearen Fortbewegung eines Stellgliedes
US5736800A (en) * 1994-10-18 1998-04-07 Iannello; Victor Light weight, high performance radial actuator for magnetic bearing systems
US5764018A (en) * 1995-09-29 1998-06-09 Hewlett-Packard Co. Hysteresis removal for positioning systems with variable backlash and stiction
US5883712A (en) * 1997-05-21 1999-03-16 Nicolet Instrument Corporation Interferometer of an infrared spectrometer with dynamic moving mirror alignment
US6590366B1 (en) * 2000-11-02 2003-07-08 General Dyanmics Advanced Technology Systems, Inc. Control system for electromechanical arrangements having open-loop instability
KR100394242B1 (ko) * 2001-05-16 2003-08-09 주식회사 엘지이아이 왕복동식 모터의 마그네트 고정장치
JP2005195574A (ja) * 2003-10-20 2005-07-21 Sony Corp 角速度検出装置、角速度検出装置による角速度検出方法および角速度検出装置の製造方法
WO2010034756A1 (en) * 2008-09-24 2010-04-01 Abb Research Ltd A device and a method for measuring a physical property of a magnetic bearing
DE102009040051B4 (de) * 2009-09-03 2014-05-08 Siemens Aktiengesellschaft Freikolbenmaschine mit magnetischer Lagerung des Kolbens
JP5644374B2 (ja) * 2010-10-27 2014-12-24 株式会社ジェイテクト 工作機械の主軸状態検出装置
JP6088478B2 (ja) * 2014-10-27 2017-03-01 ファナック株式会社 テーブル形式データによる運転を行う数値制御装置
US10350754B2 (en) * 2016-09-27 2019-07-16 Denso Wave Incorporated Control device for robot

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3809481A (en) * 1972-12-01 1974-05-07 Nasa Single reflector interference spectrometer and drive system therefor
US4387935A (en) * 1980-12-08 1983-06-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Linear magnetic bearing
US4473259A (en) * 1980-12-24 1984-09-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Linear magnetic bearings
FR2503304A1 (fr) * 1981-04-07 1982-10-08 Messerschmitt Boelkow Blohm Groupe hydraulique d'amortissement des mouvements de rotation d'un composant
US4480914A (en) * 1982-09-13 1984-11-06 The Foxboro Company Vibration compensating interferometer mirror drive system
JPS59163525A (ja) * 1983-03-08 1984-09-14 Japan Spectroscopic Co 連続駆動型マイケルソン干渉計の可動鏡駆動装置
JPS60164013A (ja) * 1984-02-03 1985-08-27 Toshiba Corp 磁気軸受
JPS60217318A (ja) * 1984-04-13 1985-10-30 Mitsubishi Electric Corp 光軸合わせ装置
JPS6185060A (ja) * 1984-09-29 1986-04-30 Toshiba Corp 非接触位置決め装置
JPS61175314A (ja) * 1985-01-31 1986-08-07 Natl Aerospace Lab 磁気軸受
JPH0689778B2 (ja) * 1986-01-24 1994-11-14 株式会社東芝 非接触位置決め装置
FR2630354B1 (fr) * 1988-04-20 1990-08-31 Mecanique Magnetique Sa Dispositif vibrateur actif a suspension magnetique asservie selon trois axes
US5053662A (en) * 1990-04-18 1991-10-01 General Electric Company Electromagnetic damping of a shaft
US5059845A (en) * 1990-05-07 1991-10-22 Mechanical Technology Incorporated Active magnetic bearing device for controlling rotor vibrations

Also Published As

Publication number Publication date
DE69206229D1 (de) 1996-01-04
US5287031A (en) 1994-02-15
EP0534613B1 (de) 1995-11-22
EP0534613A1 (de) 1993-03-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee