DE69201290T2 - Direkt geheizte dispensierende Kathode mit verbessertem schraubenförmigen Element und Edelgas-Ionen-Lasersystem mit einer solchen Kathode. - Google Patents

Direkt geheizte dispensierende Kathode mit verbessertem schraubenförmigen Element und Edelgas-Ionen-Lasersystem mit einer solchen Kathode.

Info

Publication number
DE69201290T2
DE69201290T2 DE1992601290 DE69201290T DE69201290T2 DE 69201290 T2 DE69201290 T2 DE 69201290T2 DE 1992601290 DE1992601290 DE 1992601290 DE 69201290 T DE69201290 T DE 69201290T DE 69201290 T2 DE69201290 T2 DE 69201290T2
Authority
DE
Germany
Prior art keywords
cathode
laser system
noble gas
directly heated
ion laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1992601290
Other languages
English (en)
Other versions
DE69201290D1 (de
Inventor
Ryoichi Seura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE69201290D1 publication Critical patent/DE69201290D1/de
Publication of DE69201290T2 publication Critical patent/DE69201290T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/032—Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube
    • H01S3/0323—Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube by special features of the discharge constricting tube, e.g. capillary

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE1992601290 1991-09-30 1992-09-25 Direkt geheizte dispensierende Kathode mit verbessertem schraubenförmigen Element und Edelgas-Ionen-Lasersystem mit einer solchen Kathode. Expired - Fee Related DE69201290T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7888391U JP2567898Y2 (ja) 1991-09-30 1991-09-30 直熱型ディスペンサカソード

Publications (2)

Publication Number Publication Date
DE69201290D1 DE69201290D1 (de) 1995-03-09
DE69201290T2 true DE69201290T2 (de) 1995-06-01

Family

ID=13674216

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992601290 Expired - Fee Related DE69201290T2 (de) 1991-09-30 1992-09-25 Direkt geheizte dispensierende Kathode mit verbessertem schraubenförmigen Element und Edelgas-Ionen-Lasersystem mit einer solchen Kathode.

Country Status (3)

Country Link
EP (1) EP0535870B1 (de)
JP (1) JP2567898Y2 (de)
DE (1) DE69201290T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6324202B1 (en) 1998-09-01 2001-11-27 Uniphase Corporation Power efficient gas ion laser system, associated laser tube, and method
JP6959103B2 (ja) * 2017-11-02 2021-11-02 新日本無線株式会社 マグネトロンカソード
US10748740B2 (en) * 2018-08-21 2020-08-18 Fei Company X-ray and particle shield for improved vacuum conductivity
CN112768325B (zh) * 2021-01-29 2022-11-29 成都创元电子有限公司 一种直热式空心阴极
US11972920B2 (en) 2021-11-23 2024-04-30 Fei Company Vacuum compatible X-ray shield

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5050184A (en) * 1990-02-23 1991-09-17 Nelson George A Method and apparatus for stabilizing laser mirror alignment

Also Published As

Publication number Publication date
JP2567898Y2 (ja) 1998-04-08
JPH0531268U (ja) 1993-04-23
EP0535870A1 (de) 1993-04-07
EP0535870B1 (de) 1995-01-25
DE69201290D1 (de) 1995-03-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee