DE69201249D1 - Magnetantrieb. - Google Patents

Magnetantrieb.

Info

Publication number
DE69201249D1
DE69201249D1 DE69201249T DE69201249T DE69201249D1 DE 69201249 D1 DE69201249 D1 DE 69201249D1 DE 69201249 T DE69201249 T DE 69201249T DE 69201249 T DE69201249 T DE 69201249T DE 69201249 D1 DE69201249 D1 DE 69201249D1
Authority
DE
Germany
Prior art keywords
magnetic drive
magnetic
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69201249T
Other languages
English (en)
Other versions
DE69201249T2 (de
Inventor
Taisaku Hashimoto
Shigemi Miki
Hiroshi Ii
Ryuji Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3030913A external-priority patent/JP3013264B2/ja
Priority claimed from JP03030912A external-priority patent/JP3094110B2/ja
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Publication of DE69201249D1 publication Critical patent/DE69201249D1/de
Application granted granted Critical
Publication of DE69201249T2 publication Critical patent/DE69201249T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
    • H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
    • H02K49/104—Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element
    • H02K49/106—Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element with a radial air gap
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
DE69201249T 1991-02-26 1992-02-25 Magnetantrieb. Expired - Fee Related DE69201249T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3030913A JP3013264B2 (ja) 1991-02-26 1991-02-26 磁気浮上アクチュエータ
JP03030912A JP3094110B2 (ja) 1991-02-26 1991-02-26 ２軸独立駆動装置

Publications (2)

Publication Number Publication Date
DE69201249D1 true DE69201249D1 (de) 1995-03-09
DE69201249T2 DE69201249T2 (de) 1995-09-14

Family

ID=26369353

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69201249T Expired - Fee Related DE69201249T2 (de) 1991-02-26 1992-02-25 Magnetantrieb.

Country Status (3)

Country Link
US (1) US5209699A (de)
EP (1) EP0501427B1 (de)
DE (1) DE69201249T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100303018B1 (ko) * 1993-04-16 2001-11-22 스탠리 디. 피에코스 관절형아암이송장치
US5441453A (en) * 1993-06-03 1995-08-15 W.S. Tyler, Incorporated Vibrating shaft assembly having magnetic compensation for reducing shaft bearing loads
WO1996019034A1 (en) * 1994-12-12 1996-06-20 Jorge De Armas Electromagnetic-coupled/levitated apparatus and method for rotating equipment
US20040005211A1 (en) * 1996-02-28 2004-01-08 Lowrance Robert B. Multiple independent robot assembly and apparatus and control system for processing and transferring semiconductor wafers
US6102164A (en) * 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
EP0899857B1 (de) * 1997-08-25 2007-11-28 LUST ANTRIEBSTECHNIK GmbH Magnetgelagerte Rotationsanordnung
US5917774A (en) * 1997-09-26 1999-06-29 Western Atlas International, Inc. Magnetic motion coupling for well logging instruments
DE102004024883B4 (de) * 2004-05-19 2006-02-02 Siemens Ag Antriebssystem
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
TW200719126A (en) * 2005-11-01 2007-05-16 Sunonwealth Electr Mach Ind Co Compact fluid pump
DE102007037186B3 (de) * 2007-08-07 2008-10-30 Muammer Yildiz Vorrichtung mit einer Anordnung von Magneten
KR20180128987A (ko) 2011-09-16 2018-12-04 퍼시몬 테크놀로지스 코포레이션 기판 이동 장치
WO2013040406A1 (en) 2011-09-16 2013-03-21 Persimmon Technologies, Corp. Robot drive with passive rotor
CN106415813B (zh) 2014-01-21 2020-06-23 柿子技术公司 衬底运输真空平台
DE102014009892B4 (de) * 2014-07-04 2018-05-30 gomtec GmbH Antriebseinheit mit magnetischer Schnittstelle
CN107443417A (zh) * 2017-09-22 2017-12-08 中国东方电气集团有限公司 一种具有伸缩自由度的腕关节
CN111211664B (zh) * 2019-08-27 2021-02-05 杭州慧翔电液技术开发有限公司 用于刻蚀机的高速旋转磁流体传动装置
CN111262379B (zh) * 2020-04-30 2020-08-07 山东天瑞重工有限公司 一种转子可轴向移动的磁悬浮电机及制冷设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2114040C3 (de) * 1970-03-25 1980-11-13 Karl 5170 Juelich Boden Magnetische Lagerung
US3791704A (en) * 1971-08-06 1974-02-12 Cambridge Thermionic Corp Trimming apparatus for magnetic suspension systems
SU446414A1 (ru) * 1972-07-03 1974-10-15 Ленинградский технологический институт холодильной промышленности Устройство дл управлени манипул тором
US4065234A (en) * 1975-12-22 1977-12-27 Nihon Kagaku Kizai Kabushiki Kaisha Magnetically driven rotary pumps
FI60326C (fi) * 1976-03-25 1981-12-10 Eriksson Jarl Thure Kollekteringsanordning foer oeverfoering av elektrisk stroem mellan minst ett par elektriska ledare vilka kan foersaettas i relativ rotationsroerelse kring en gemensam axel
FR2367939A1 (fr) * 1976-10-12 1978-05-12 Gattegno Bernard Palier magnetostatique
US4111614A (en) * 1977-01-24 1978-09-05 Micropump Corporation Magnetically coupled gear pump construction
DE3036264A1 (de) * 1980-09-26 1982-06-03 Ebe Elektro-Bau-Elemente Gmbh, 7022 Leinfelden-Echterdingen Stufenschalter
DE3527687A1 (de) * 1985-08-01 1987-02-12 Siemens Ag Magnetkupplung mit integrierter magnetischer lagerentlastung
FR2606694B1 (fr) * 1986-11-13 1989-03-24 Europ Propulsion Procede et dispositif d'usinage ultra-precis applique a l'execution de surfaces atypiques de revolution et aux usinages asservis
US5064340A (en) * 1989-01-20 1991-11-12 Genmark Automation Precision arm mechanism
JPH03154791A (ja) * 1989-11-14 1991-07-02 Sumitomo Eaton Noba Kk ロボット用多関節アーム
JP3196218B2 (ja) * 1991-01-10 2001-08-06 ソニー株式会社 ウエハ搬送装置とウエハ搬送方法

Also Published As

Publication number Publication date
EP0501427A1 (de) 1992-09-02
US5209699A (en) 1993-05-11
EP0501427B1 (de) 1995-01-25
DE69201249T2 (de) 1995-09-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee