DE69201002T2 - Entladungsgepumpter Gas-Laser mit einer unabhängigen Preionizierungsschaltung. - Google Patents

Entladungsgepumpter Gas-Laser mit einer unabhängigen Preionizierungsschaltung.

Info

Publication number
DE69201002T2
DE69201002T2 DE69201002T DE69201002T DE69201002T2 DE 69201002 T2 DE69201002 T2 DE 69201002T2 DE 69201002 T DE69201002 T DE 69201002T DE 69201002 T DE69201002 T DE 69201002T DE 69201002 T2 DE69201002 T2 DE 69201002T2
Authority
DE
Germany
Prior art keywords
independent
gas laser
pumped gas
discharge pumped
preionization circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69201002T
Other languages
English (en)
Other versions
DE69201002D1 (de
Inventor
Nobuaki Furuya
Takuhiro Ono
Naoya Horiuchi
Keiichiro Yamanaka
Takeo Miyata
Kenichi Takahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69201002D1 publication Critical patent/DE69201002D1/de
Publication of DE69201002T2 publication Critical patent/DE69201002T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE69201002T 1991-04-25 1992-04-24 Entladungsgepumpter Gas-Laser mit einer unabhängigen Preionizierungsschaltung. Expired - Fee Related DE69201002T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3095816A JPH04326584A (ja) 1991-04-25 1991-04-25 放電励起ガスレーザ装置

Publications (2)

Publication Number Publication Date
DE69201002D1 DE69201002D1 (de) 1995-02-09
DE69201002T2 true DE69201002T2 (de) 1995-05-18

Family

ID=14147949

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69201002T Expired - Fee Related DE69201002T2 (de) 1991-04-25 1992-04-24 Entladungsgepumpter Gas-Laser mit einer unabhängigen Preionizierungsschaltung.

Country Status (6)

Country Link
US (1) US5293390A (de)
EP (1) EP0510664B1 (de)
JP (1) JPH04326584A (de)
KR (1) KR970009034B1 (de)
CA (1) CA2066804C (de)
DE (1) DE69201002T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08335739A (ja) * 1995-06-07 1996-12-17 Nec Corp 放電励起エキシマレーザ装置
JP3815578B2 (ja) * 1996-07-19 2006-08-30 忠弘 大見 エキシマレーザー発振装置
US6700908B1 (en) * 1999-06-21 2004-03-02 Tui Laser Ag Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
JP3399517B2 (ja) * 1999-12-08 2003-04-21 ウシオ電機株式会社 紫外線を放出するガスレーザ装置
US6377595B1 (en) * 2000-09-08 2002-04-23 Komatsu Ltd. Peaking capacitor layout
US6950453B2 (en) * 2003-07-03 2005-09-27 Secretary, Department Of Atomic Energy Goverment Of India Pulser driven, helium free transversely excited atmospheric-pressure (TEA) CO2 laser

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3314157A1 (de) * 1982-04-19 1983-12-08 Kraftwerk Union AG, 4330 Mülheim Anregungskreis fuer lasersysteme, insbesondere fuer te-hochenergielaser, mit einstellung der vorionisierung
DE3705165A1 (de) * 1986-02-18 1987-08-20 Mitsubishi Electric Corp Mit entladungserregung arbeitende laservorrichtung fuer kurze impulse
JPS62249493A (ja) * 1986-04-23 1987-10-30 Hitachi Ltd 自動予備電離エキシマレ−ザ装置
DE3644004C2 (de) * 1986-06-23 1995-08-03 Lambda Physik Gmbh Schaltung für die Vorionisierung und Hauptentladung eines gepulsten Gaslasers
JPS636886A (ja) * 1986-06-27 1988-01-12 Nec Corp 横方向励起型レ−ザ装置
JPS6313887A (ja) * 1986-07-04 1988-01-21 Mitsubishi Heavy Ind Ltd タグラインフツク装置
JPS63110780A (ja) * 1986-10-29 1988-05-16 Toshiba Corp ガスレ−ザ発振装置
DE3722724A1 (de) * 1987-07-09 1989-01-19 Lambda Physik Forschung Schaltung fuer die vorionisierung und hauptentladung eines gepulsten gaslasers
JPH02248094A (ja) * 1989-03-22 1990-10-03 Toshiba Corp Ｘ線予備電離パルスレーザー装置
JPH077857B2 (ja) * 1989-05-17 1995-01-30 三菱電機株式会社 放電励起パルスレーザ装置
US5097472A (en) * 1990-02-22 1992-03-17 Chenausky Peter P Preionized transversely excited laser
JPH03257980A (ja) * 1990-03-08 1991-11-18 Matsushita Electric Ind Co Ltd レーザ装置

Also Published As

Publication number Publication date
EP0510664B1 (de) 1994-12-28
CA2066804A1 (en) 1992-10-26
KR970009034B1 (ko) 1997-06-03
DE69201002D1 (de) 1995-02-09
CA2066804C (en) 1997-03-04
JPH04326584A (ja) 1992-11-16
KR920020792A (ko) 1992-11-21
US5293390A (en) 1994-03-08
EP0510664A1 (de) 1992-10-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee