DE69109479D1 - Mit transversaler entladung gepumpter pulslaser. - Google Patents

Mit transversaler entladung gepumpter pulslaser.

Info

Publication number
DE69109479D1
DE69109479D1 DE69109479T DE69109479T DE69109479D1 DE 69109479 D1 DE69109479 D1 DE 69109479D1 DE 69109479 T DE69109479 T DE 69109479T DE 69109479 T DE69109479 T DE 69109479T DE 69109479 D1 DE69109479 D1 DE 69109479D1
Authority
DE
Germany
Prior art keywords
pulse laser
laser pumped
transversal
discharge
transversal discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69109479T
Other languages
English (en)
Other versions
DE69109479T2 (de
Inventor
Hajime C O Mitsubishi Nakatani
Atsushi C O Mitsubis Sugitatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority claimed from PCT/JP1991/000153 external-priority patent/WO1992014285A1/ja
Publication of DE69109479D1 publication Critical patent/DE69109479D1/de
Application granted granted Critical
Publication of DE69109479T2 publication Critical patent/DE69109479T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H01S3/09716—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation by ionising radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Lasers (AREA)
DE69109479T 1991-02-08 1991-02-08 Mit transversaler entladung gepumpter pulslaser. Expired - Fee Related DE69109479T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA002050490A CA2050490C (en) 1991-02-08 1991-02-08 Transverse discharging excitation pulse laser oscillator apparatus
PCT/JP1991/000153 WO1992014285A1 (fr) 1991-02-08 1991-02-08 Dispositif oscillant pour laser pulse du type a pompage par decharge transversal

Publications (2)

Publication Number Publication Date
DE69109479D1 true DE69109479D1 (de) 1995-06-08
DE69109479T2 DE69109479T2 (de) 1996-02-15

Family

ID=4148285

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69109479T Expired - Fee Related DE69109479T2 (de) 1991-02-08 1991-02-08 Mit transversaler entladung gepumpter pulslaser.

Country Status (4)

Country Link
US (1) US5347531A (de)
EP (1) EP0532751B1 (de)
CA (1) CA2050490C (de)
DE (1) DE69109479T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4113241C2 (de) * 1991-04-23 1994-08-11 Lambda Physik Forschung Gepulster Gasentladungslaser
US5337330A (en) * 1992-10-09 1994-08-09 Cymer Laser Technologies Pre-ionizer for a laser
CN1063873C (zh) * 1995-07-12 2001-03-28 中国科学院上海光学精密机械研究所 横流气体激光器双脉冲予电离放电装置
US5719896A (en) * 1996-03-29 1998-02-17 Cymer Inc. Low cost corona pre-ionizer for a laser
US5818865A (en) * 1997-05-16 1998-10-06 Cymer, Inc. Compact excimer laser insulator with integral pre-ionizer
JP3796038B2 (ja) * 1997-11-18 2006-07-12 株式会社小松製作所 ガスレーザ発振装置
US6650679B1 (en) * 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6714577B1 (en) 1999-03-17 2004-03-30 Lambda Physik Ag Energy stabilized gas discharge laser
US6546036B1 (en) 1999-06-08 2003-04-08 Lambda Physik Ag Roof configuration for laser discharge electrodes
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
US6570901B2 (en) 2000-02-24 2003-05-27 Lambda Physik Ag Excimer or molecular fluorine laser having lengthened electrodes
WO2001084678A2 (en) 2000-04-18 2001-11-08 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6507596B1 (en) * 2000-09-08 2003-01-14 Komatsu Ltd. Gas laser apparatus
US6963596B2 (en) * 2004-01-28 2005-11-08 Coherent, Inc. Pre-ionizer for RF-energized gas laser
JP7273944B2 (ja) * 2019-02-26 2023-05-15 ギガフォトン株式会社 レーザ用チャンバ装置、ガスレーザ装置、及び電子デバイスの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3035730A1 (de) * 1980-09-22 1982-05-13 Kraftwerk Union AG, 4330 Mülheim Hochenergielaser des tea-typs mit laser-achsparrallel angeordneten vorionisierungsstaeben
IT1197768B (it) * 1983-12-29 1988-12-06 Selenia Ind Elettroniche Preionizzatore ad effetto corona per laser a gas

Also Published As

Publication number Publication date
US5347531A (en) 1994-09-13
CA2050490C (en) 1994-12-13
EP0532751A4 (de) 1992-12-15
CA2050490A1 (en) 1992-08-09
DE69109479T2 (de) 1996-02-15
EP0532751B1 (de) 1995-05-03
EP0532751A1 (de) 1993-03-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee