DE69119709D1 - Substrat für Matrizenanordnung - Google Patents

Substrat für Matrizenanordnung

Info

Publication number
DE69119709D1
DE69119709D1 DE69119709T DE69119709T DE69119709D1 DE 69119709 D1 DE69119709 D1 DE 69119709D1 DE 69119709 T DE69119709 T DE 69119709T DE 69119709 T DE69119709 T DE 69119709T DE 69119709 D1 DE69119709 D1 DE 69119709D1
Authority
DE
Germany
Prior art keywords
substrate
matrix arrangement
matrix
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69119709T
Other languages
English (en)
Other versions
DE69119709T2 (de
Inventor
Hiroshi Morita
Keiko Sunohara
Kazunari Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP31436790A external-priority patent/JP2585465B2/ja
Priority claimed from JP3119973A external-priority patent/JPH04346319A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE69119709D1 publication Critical patent/DE69119709D1/de
Application granted granted Critical
Publication of DE69119709T2 publication Critical patent/DE69119709T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1365—Active matrix addressed cells in which the switching element is a two-electrode device
DE69119709T 1990-11-21 1991-11-19 Substrat für Matrizenanordnung Expired - Fee Related DE69119709T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP31436790A JP2585465B2 (ja) 1990-11-21 1990-11-21 マトリックスアレイ基板
JP3119973A JPH04346319A (ja) 1991-05-24 1991-05-24 マトリックスアレイ基板及びその製造方法

Publications (2)

Publication Number Publication Date
DE69119709D1 true DE69119709D1 (de) 1996-06-27
DE69119709T2 DE69119709T2 (de) 1996-10-31

Family

ID=26457620

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69119709T Expired - Fee Related DE69119709T2 (de) 1990-11-21 1991-11-19 Substrat für Matrizenanordnung

Country Status (5)

Country Link
US (1) US5274482A (de)
EP (1) EP0487055B1 (de)
KR (1) KR950002288B1 (de)
DE (1) DE69119709T2 (de)
TW (1) TW201343B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2915732B2 (ja) * 1993-02-01 1999-07-05 シャープ株式会社 アクティブマトリクス基板
JPH06310492A (ja) * 1993-04-23 1994-11-04 Fuji Xerox Co Ltd チタン系薄膜のエッチング液及び半導体装置の製造方法
JP3059487B2 (ja) 1994-11-08 2000-07-04 シチズン時計株式会社 液晶表示装置
US6086777A (en) * 1998-07-02 2000-07-11 Advanced Micro Devices, Inc. Tantalum barrier metal removal by using CF4 /o2 plasma dry etch
JP2001075501A (ja) * 1999-07-02 2001-03-23 Seiko Instruments Inc 表示装置、及び、表示装置の検査方法
JP3376969B2 (ja) * 1999-09-02 2003-02-17 株式会社村田製作所 弾性表面波装置及びその製造方法
US7445810B2 (en) * 2004-04-15 2008-11-04 Hewlett-Packard Development Company, L.P. Method of making a tantalum layer and apparatus using a tantalum layer

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205712A (en) * 1981-06-12 1982-12-16 Seiko Epson Corp Production of liquid crystal display body
JPS5838923A (ja) * 1981-09-01 1983-03-07 Seiko Epson Corp 液晶表示基板の製造方法
JPS6420539A (en) * 1987-07-15 1989-01-24 Konishiroku Photo Ind Silver halide photographic sensitive material with improved writing and erasing properties
US4859036A (en) * 1987-05-15 1989-08-22 Canon Kabushiki Kaisha Device plate having conductive films selected to prevent pin-holes
JPH0666016B2 (ja) * 1987-05-28 1994-08-24 キヤノン株式会社 液晶素子
US5000545A (en) * 1987-05-28 1991-03-19 Canon Kabushiki Kaisha Liquid crystal device with metal electrode partially overlying transparent electrode
JP2746403B2 (ja) * 1989-02-13 1998-05-06 コニカ株式会社 液晶表示装置およびその製造方法
EP0388986B1 (de) * 1989-03-23 1995-11-08 Seiko Epson Corporation Flüssigkristall-Anzeige mit aktiver Matrix und Methode zu ihrer Herstellung
JP2795883B2 (ja) * 1989-03-24 1998-09-10 シチズン時計株式会社 液晶表示装置における非線形素子

Also Published As

Publication number Publication date
KR950002288B1 (ko) 1995-03-16
TW201343B (de) 1993-03-01
US5274482A (en) 1993-12-28
DE69119709T2 (de) 1996-10-31
EP0487055B1 (de) 1996-05-22
EP0487055A1 (de) 1992-05-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee