DE69118507D1 - Verfahren zur Herstellung von Membran-Druckwandlern mit Dehnungsmessstreifen - Google Patents
Verfahren zur Herstellung von Membran-Druckwandlern mit DehnungsmessstreifenInfo
- Publication number
- DE69118507D1 DE69118507D1 DE69118507T DE69118507T DE69118507D1 DE 69118507 D1 DE69118507 D1 DE 69118507D1 DE 69118507 T DE69118507 T DE 69118507T DE 69118507 T DE69118507 T DE 69118507T DE 69118507 D1 DE69118507 D1 DE 69118507D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- strain gauges
- pressure transducers
- diaphragm pressure
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49103—Strain gauge making
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/576,664 US5049232A (en) | 1990-08-31 | 1990-08-31 | Method of making diaphragm-type pressure transducers |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69118507D1 true DE69118507D1 (de) | 1996-05-09 |
DE69118507T2 DE69118507T2 (de) | 1996-11-28 |
Family
ID=24305426
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69118507T Expired - Lifetime DE69118507T2 (de) | 1990-08-31 | 1991-08-21 | Verfahren zur Herstellung von Membran-Druckwandlern mit Dehnungsmessstreifen |
Country Status (5)
Country | Link |
---|---|
US (1) | US5049232A (de) |
EP (1) | EP0496032B1 (de) |
JP (1) | JP3121389B2 (de) |
DE (1) | DE69118507T2 (de) |
ES (1) | ES2085387T3 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5328551A (en) * | 1992-10-28 | 1994-07-12 | Eaton Corporation | Method of making high output strain gage |
GB9321699D0 (en) * | 1993-10-21 | 1993-12-15 | Barnett John D | Improvements in or relating to sensors |
US5967030A (en) * | 1995-11-17 | 1999-10-19 | Micron Technology, Inc. | Global planarization method and apparatus |
US6642981B1 (en) | 1996-09-30 | 2003-11-04 | Fujitsu Display Technologies Corporation | Liquid crystal display device operating in a vertically aligned mode including at least one retardation film |
US6331488B1 (en) | 1997-05-23 | 2001-12-18 | Micron Technology, Inc. | Planarization process for semiconductor substrates |
US6316363B1 (en) | 1999-09-02 | 2001-11-13 | Micron Technology, Inc. | Deadhesion method and mechanism for wafer processing |
US6692672B1 (en) * | 1997-06-02 | 2004-02-17 | Avery Dennison Corporation | EAS marker and method of manufacturing same |
US6067016A (en) * | 1997-06-02 | 2000-05-23 | Avery Dennison Corporation | EAS marker and method of manufacturing same |
US6218316B1 (en) | 1998-10-22 | 2001-04-17 | Micron Technology, Inc. | Planarization of non-planar surfaces in device fabrication |
US6230609B1 (en) * | 1999-06-03 | 2001-05-15 | Norton Performance Plastics Corporation | Fluoropolymer diaphragm with integral attachment device |
US6518172B1 (en) | 2000-08-29 | 2003-02-11 | Micron Technology, Inc. | Method for applying uniform pressurized film across wafer |
US20030211330A1 (en) * | 2002-05-09 | 2003-11-13 | Anderson Robert A. | Method of preparing a metal material for bonding |
ITTO20120504A1 (it) * | 2012-06-11 | 2013-12-12 | Alenia Aermacchi Spa | Metodo di realizzazione di una struttura aeronautica a profilo chiuso provvista di sensori di deformazione |
FR3023909B1 (fr) * | 2014-07-17 | 2020-11-20 | Centre Techn Ind Mecanique | Procede de realisation d'un capteur d'efforts et installation de mise en œuvre |
IL275618A (en) * | 2020-06-23 | 2022-01-01 | Vishay Advanced Tech Ltd | Method of manufacture of a strain gage or flexible olyimide-based resistor |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB645331A (en) * | 1944-06-19 | 1950-11-01 | Douglas Crisp Gall | Improvements in strain gauges and methods of and means for the production thereof |
US4021766A (en) * | 1975-07-28 | 1977-05-03 | Aine Harry E | Solid state pressure transducer of the leaf spring type and batch method of making same |
US4133100A (en) * | 1976-12-27 | 1979-01-09 | Myhre Kjell E | Method of making diaphragm of optimized stress and strain distribution |
US4295116A (en) * | 1979-12-05 | 1981-10-13 | Bofors America, Inc. | Pressure transducer |
GB2174241A (en) * | 1985-04-25 | 1986-10-29 | Transamerica Delaval Inc | Transducer devices |
WO1987003684A1 (fr) * | 1985-12-04 | 1987-06-18 | Seb S.A. | Procede pour fabriquer et appliquer des jauges de contrainte, et jauges de contrainte obtenues notamment au cours de ce procede |
JPH0810170B2 (ja) * | 1987-03-06 | 1996-01-31 | 株式会社日立製作所 | 半導体絶対圧力センサの製造方法 |
GB8917191D0 (en) * | 1989-07-27 | 1989-09-13 | Gec Avery Technology | Strain gauge encapsulation process |
-
1990
- 1990-08-31 US US07/576,664 patent/US5049232A/en not_active Expired - Lifetime
-
1991
- 1991-08-21 DE DE69118507T patent/DE69118507T2/de not_active Expired - Lifetime
- 1991-08-21 ES ES91113969T patent/ES2085387T3/es not_active Expired - Lifetime
- 1991-08-21 EP EP91113969A patent/EP0496032B1/de not_active Expired - Lifetime
- 1991-08-22 JP JP03233771A patent/JP3121389B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0496032B1 (de) | 1996-04-03 |
EP0496032A2 (de) | 1992-07-29 |
ES2085387T3 (es) | 1996-06-01 |
US5049232A (en) | 1991-09-17 |
JP3121389B2 (ja) | 2000-12-25 |
EP0496032A3 (en) | 1993-01-20 |
DE69118507T2 (de) | 1996-11-28 |
JPH0593665A (ja) | 1993-04-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: ROEGER UND KOLLEGEN, 73728 ESSLINGEN |