DE69111651T2 - Beseitigung von Teilchenerzeugung in einem modifizierten Reinraum-Corona-Luftionisator. - Google Patents

Beseitigung von Teilchenerzeugung in einem modifizierten Reinraum-Corona-Luftionisator.

Info

Publication number
DE69111651T2
DE69111651T2 DE1991611651 DE69111651T DE69111651T2 DE 69111651 T2 DE69111651 T2 DE 69111651T2 DE 1991611651 DE1991611651 DE 1991611651 DE 69111651 T DE69111651 T DE 69111651T DE 69111651 T2 DE69111651 T2 DE 69111651T2
Authority
DE
Germany
Prior art keywords
elimination
clean room
particle generation
air ionizer
modified clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1991611651
Other languages
English (en)
Other versions
DE69111651D1 (de
Inventor
John S Batcheler
Vaughn P Gross
Philip C D Hobbs
Robert J Miller
Kenneth D Murray
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23987129&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69111651(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69111651D1 publication Critical patent/DE69111651D1/de
Application granted granted Critical
Publication of DE69111651T2 publication Critical patent/DE69111651T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
DE1991611651 1990-03-27 1991-01-18 Beseitigung von Teilchenerzeugung in einem modifizierten Reinraum-Corona-Luftionisator. Expired - Fee Related DE69111651T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49988090A 1990-03-27 1990-03-27

Publications (2)

Publication Number Publication Date
DE69111651D1 DE69111651D1 (de) 1995-09-07
DE69111651T2 true DE69111651T2 (de) 1996-04-18

Family

ID=23987129

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991611651 Expired - Fee Related DE69111651T2 (de) 1990-03-27 1991-01-18 Beseitigung von Teilchenerzeugung in einem modifizierten Reinraum-Corona-Luftionisator.

Country Status (3)

Country Link
EP (1) EP0448929B1 (de)
JP (1) JP2838856B2 (de)
DE (1) DE69111651T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016134701A1 (de) 2015-02-24 2016-09-01 Estion Technologies Gmbh Röntgenquelle zur ionisierung von gasen

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5592357A (en) * 1992-10-09 1997-01-07 The University Of Tennessee Research Corp. Electrostatic charging apparatus and method
JP3004951U (ja) * 1994-06-03 1994-12-06 株式会社山口工業 自動車の塗装面前処理装置
JP2880427B2 (ja) * 1995-06-29 1999-04-12 株式会社テクノ菱和 空気イオン化装置及び空気イオン化方法
DE19745316C2 (de) * 1997-10-14 2000-11-16 Thomas Sebald Vorrichtung zur Erzeugung von Hochspannung für die Ionisation von Gasen
RU2598098C2 (ru) * 2008-04-29 2016-09-20 Закрытое Акционерное Общество "Техмаш" Воздушный ионизатор
EP2422219B1 (de) * 2009-04-24 2020-11-18 Illinois Tool Works Inc. Saubere koronagasionisierung zur neutralisierung statischer ladungen

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2202625A5 (de) * 1972-10-06 1974-05-03 Anvar
JPS52132329A (en) * 1976-04-30 1977-11-07 Jirou Asahina High voltage ionizing apparatus
JPS553146A (en) * 1978-06-21 1980-01-10 Minoru Watanabe Air ion generator
US4333123A (en) * 1980-03-31 1982-06-01 Consan Pacific Incorporated Antistatic equipment employing positive and negative ion sources
DE3331804A1 (de) * 1983-09-02 1985-04-04 Gesellschaft für Ionentechnik mbH, 7032 Sindelfingen Vorrichtung zur erzeugung von negativen ionen
JPS60241690A (ja) * 1984-02-13 1985-11-30 バイオメツド、エレクトロニツク、ゲゼルシヤフト、ミツト、ベシユレンクテル、ハフツング、ウント、コンパニ−、メデイツイ−ニシエル、ゲレ−テバウ、コマンデイ−トゲゼルシヤフト ガス状酸素をイオン化するイオン化室
JPS6240459A (ja) * 1985-08-16 1987-02-21 Toshiba Corp プレ−トクリ−ナ
JPS63127155A (ja) * 1986-11-17 1988-05-31 Masahiko Tsuchiya 薄膜分析計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016134701A1 (de) 2015-02-24 2016-09-01 Estion Technologies Gmbh Röntgenquelle zur ionisierung von gasen
US10529527B2 (en) 2015-02-24 2020-01-07 Estion Technologies Gmbh X-ray source for ionizing of gases

Also Published As

Publication number Publication date
DE69111651D1 (de) 1995-09-07
EP0448929B1 (de) 1995-08-02
EP0448929A1 (de) 1991-10-02
JPH04223085A (ja) 1992-08-12
JP2838856B2 (ja) 1998-12-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee