DE69101070T2 - Verfahren und Vorrichtung zur Entnahme von Wasserstoff aus einem Vakuumbehälter. - Google Patents

Verfahren und Vorrichtung zur Entnahme von Wasserstoff aus einem Vakuumbehälter.

Info

Publication number
DE69101070T2
DE69101070T2 DE69101070T DE69101070T DE69101070T2 DE 69101070 T2 DE69101070 T2 DE 69101070T2 DE 69101070 T DE69101070 T DE 69101070T DE 69101070 T DE69101070 T DE 69101070T DE 69101070 T2 DE69101070 T2 DE 69101070T2
Authority
DE
Germany
Prior art keywords
vacuum container
extracting hydrogen
extracting
hydrogen
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69101070T
Other languages
English (en)
Other versions
DE69101070D1 (de
Inventor
Katsuya Okumura
Haruo Okano
Manabu Tsujimura
Akio Sibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Toshiba Corp filed Critical Ebara Corp
Publication of DE69101070D1 publication Critical patent/DE69101070D1/de
Application granted granted Critical
Publication of DE69101070T2 publication Critical patent/DE69101070T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B5/00—Water
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/012—Preparation of hydrogen chloride from the elements
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE69101070T 1990-03-20 1991-03-15 Verfahren und Vorrichtung zur Entnahme von Wasserstoff aus einem Vakuumbehälter. Expired - Fee Related DE69101070T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2068459A JP2938118B2 (ja) 1990-03-20 1990-03-20 真空容器内の水素の排気方法とその装置

Publications (2)

Publication Number Publication Date
DE69101070D1 DE69101070D1 (de) 1994-03-10
DE69101070T2 true DE69101070T2 (de) 1994-09-01

Family

ID=13374300

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69101070T Expired - Fee Related DE69101070T2 (de) 1990-03-20 1991-03-15 Verfahren und Vorrichtung zur Entnahme von Wasserstoff aus einem Vakuumbehälter.

Country Status (5)

Country Link
US (1) US5236562A (de)
EP (1) EP0447993B1 (de)
JP (1) JP2938118B2 (de)
KR (1) KR100213976B1 (de)
DE (1) DE69101070T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE131453T1 (de) * 1992-05-06 1995-12-15 Hoechst Ag Abtrennung von fullerenen
US6277347B1 (en) * 1997-02-24 2001-08-21 Applied Materials, Inc. Use of ozone in process effluent abatement
KR20010055183A (ko) * 1999-12-09 2001-07-04 구자홍 진공 챔버의 잔류물 제거 장치
KR100502783B1 (ko) * 2002-04-17 2005-07-20 스마트전자 주식회사 오존 발생 장치
US7094036B2 (en) * 2003-09-24 2006-08-22 The Boc Group Plc Vacuum pumping system
US7183227B1 (en) * 2004-07-01 2007-02-27 Applied Materials, Inc. Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gas
US8013300B2 (en) * 2008-06-20 2011-09-06 Carl Zeiss Nts, Llc Sample decontamination
WO2010138942A2 (en) * 2009-05-28 2010-12-02 Deeya Energy, Inc. Redox flow cell rebalancing
US8551299B2 (en) * 2009-05-29 2013-10-08 Deeya Energy, Inc. Methods of producing hydrochloric acid from hydrogen gas and chlorine gas
EP2458218A1 (de) 2010-11-30 2012-05-30 Converteam Technology Ltd System zur Aufrechterhaltung eines hohen Vakuums
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
US20140367245A1 (en) * 2013-06-11 2014-12-18 Roger R. Dube Optical excitation of chemical species for enhanced chemical reaction

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3488978A (en) * 1965-09-29 1970-01-13 Getters Spa Cryopumping,particularly for hydrogen
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
US3772172A (en) * 1971-10-29 1973-11-13 R Zhagatspanian Method of removing hydrogen from chlorine gas
US4460317A (en) * 1981-12-14 1984-07-17 Kernco, Inc. Ion pump
FR2560067B1 (fr) * 1984-02-24 1989-04-07 Vicarb Sa Procede et dispositif pour unifier, voire entretenir, une reaction chimique par excitation photonique
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4723363A (en) * 1986-12-29 1988-02-09 Motorola Inc. Process for removal of water
IL82070A0 (en) * 1987-03-31 1987-10-20 Luz Ind Israel Ltd Hydrogen pump
US4820226A (en) * 1987-10-14 1989-04-11 The United States Of America As Represented By The United States Department Of Energy Getter pump for hydrogen and hydrocarbon gases
US4892142A (en) * 1989-05-05 1990-01-09 Luz Industries Israel, Ltd. Device and method for removing gaseous impurities from a sealed vacuum

Also Published As

Publication number Publication date
US5236562A (en) 1993-08-17
DE69101070D1 (de) 1994-03-10
JP2938118B2 (ja) 1999-08-23
EP0447993A1 (de) 1991-09-25
KR100213976B1 (ko) 1999-08-02
JPH03270729A (ja) 1991-12-02
EP0447993B1 (de) 1994-01-26
KR910017075A (ko) 1991-11-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EBARA CORP., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee