DE69024485D1 - Verfahren zur Beobachtung einer mikroskopischen Flächenstruktur - Google Patents

Verfahren zur Beobachtung einer mikroskopischen Flächenstruktur

Info

Publication number
DE69024485D1
DE69024485D1 DE69024485T DE69024485T DE69024485D1 DE 69024485 D1 DE69024485 D1 DE 69024485D1 DE 69024485 T DE69024485 T DE 69024485T DE 69024485 T DE69024485 T DE 69024485T DE 69024485 D1 DE69024485 D1 DE 69024485D1
Authority
DE
Germany
Prior art keywords
observing
surface structure
microscopic surface
microscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69024485T
Other languages
English (en)
Other versions
DE69024485T2 (de
Inventor
Nobuo Mikoshiba
Tadahiro Ohmi
Kazuo Tsubouchi
Kazuya Masu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69024485D1 publication Critical patent/DE69024485D1/de
Publication of DE69024485T2 publication Critical patent/DE69024485T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H01J37/2955—Electron or ion diffraction tubes using scanning ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20058—Measuring diffraction of electrons, e.g. low energy electron diffraction [LEED] method or reflection high energy electron diffraction [RHEED] method
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2538—Low energy electron microscopy [LEEM]
    • H01J2237/2544—Diffraction [LEED]
    • H01J2237/255—Reflection diffraction [RHEED]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69024485T 1990-06-04 1990-06-04 Verfahren zur Beobachtung einer mikroskopischen Flächenstruktur Expired - Fee Related DE69024485T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90306073A EP0460305B1 (de) 1990-06-04 1990-06-04 Verfahren zur Beobachtung einer mikroskopischen Flächenstruktur

Publications (2)

Publication Number Publication Date
DE69024485D1 true DE69024485D1 (de) 1996-02-08
DE69024485T2 DE69024485T2 (de) 1996-05-30

Family

ID=8205445

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69024485T Expired - Fee Related DE69024485T2 (de) 1990-06-04 1990-06-04 Verfahren zur Beobachtung einer mikroskopischen Flächenstruktur

Country Status (3)

Country Link
US (1) US5093573A (de)
EP (1) EP0460305B1 (de)
DE (1) DE69024485T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8920344D0 (en) * 1989-09-08 1989-10-25 Isis Innovation Method and apparatus for imaging dislocations in materials
FR2668262B1 (fr) * 1990-10-23 1994-04-01 Centre Nal Recherc Scientifique Procede d'analyse aux rayons x de pieces monocristallines.
JPH071688B2 (ja) * 1991-02-15 1995-01-11 株式会社島津製作所 走査型反射電子回折顕微鏡
US5369275A (en) * 1991-07-11 1994-11-29 International Superconductivity Technology Center Apparatus for solid surface analysis using X-ray spectroscopy
US5397895A (en) * 1992-09-24 1995-03-14 The United States Of America As Represented By The Secretary Of Commerce Photoionization mass spectroscopy flux monitor
JPH06213832A (ja) * 1993-01-18 1994-08-05 Shimadzu Corp 回折電子検出装置
GB2285169A (en) * 1993-12-21 1995-06-28 Secretary Trade Ind Brit Scanning electron microscope grain imaging
US5536940A (en) * 1995-02-27 1996-07-16 Advanced Micro Devices, Inc. Energy filtering for electron back-scattered diffraction patterns
JP3165615B2 (ja) * 1995-03-17 2001-05-14 財団法人国際超電導産業技術研究センター 表面元素分析方法及び装置
US5589690A (en) * 1995-03-21 1996-12-31 National Institute Of Standards And Technology Apparatus and method for monitoring casting process
US5734164A (en) * 1996-11-26 1998-03-31 Amray, Inc. Charged particle apparatus having a canted column
US6420701B1 (en) * 1997-07-23 2002-07-16 Canon Kabushiki Kaisha Method of determining average crystallite size of material and apparatus and method for preparing thin film of the material
DE10318562A1 (de) * 2003-04-24 2004-11-11 Carl Zeiss Sms Gmbh Anordnung zur Inspektion von Objekten, insbesondere von Masken in der Mikrolithographie
US9390888B2 (en) * 2014-05-23 2016-07-12 Industrial Technology Research Institute Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate
CN106596604B (zh) * 2016-11-29 2019-05-21 国网辽宁省电力有限公司沈阳供电公司 一种反射电子衍射技术对高压电缆的无损检测装置
US10424458B2 (en) 2017-08-21 2019-09-24 Government Of The United States Of America, As Represented By The Secretary Of Commerce Electron reflectometer and process for performing shape metrology

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4068123A (en) * 1973-07-27 1978-01-10 Nihon Denshi Kabushiki Kaisha Scanning electron microscope
JPS583588B2 (ja) * 1978-02-03 1983-01-21 株式会社日立製作所 イオン↓−電子複合分析装置
NL7902963A (nl) * 1979-04-13 1980-10-15 Philips Nv Detektor voor elektronenmikroskoop.
US4855013A (en) * 1984-08-13 1989-08-08 Agency Of Industrial Science And Technology Method for controlling the thickness of a thin crystal film
GB2204066A (en) * 1987-04-06 1988-11-02 Philips Electronic Associated A method for manufacturing a semiconductor device having a layered structure
US4912313A (en) * 1987-11-27 1990-03-27 Hitachi Ltd. Method of measuring surface topography by using scanning electron microscope, and apparatus therefor
US5010250A (en) * 1990-01-09 1991-04-23 The University Of Rochester System for surface temperature measurement with picosecond time resolution

Also Published As

Publication number Publication date
US5093573A (en) 1992-03-03
EP0460305B1 (de) 1995-12-27
DE69024485T2 (de) 1996-05-30
EP0460305A1 (de) 1991-12-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee