DE69023327D1 - Ablöseentwicklungsverfahren und Vorrichtung zur Durchführung. - Google Patents

Ablöseentwicklungsverfahren und Vorrichtung zur Durchführung.

Info

Publication number
DE69023327D1
DE69023327D1 DE69023327T DE69023327T DE69023327D1 DE 69023327 D1 DE69023327 D1 DE 69023327D1 DE 69023327 T DE69023327 T DE 69023327T DE 69023327 T DE69023327 T DE 69023327T DE 69023327 D1 DE69023327 D1 DE 69023327D1
Authority
DE
Germany
Prior art keywords
carrying
development method
transfer development
transfer
development
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69023327T
Other languages
English (en)
Other versions
DE69023327T2 (de
Inventor
Shigeo Sumi
Fumio Hamamura
Mitsuhiro Seki
Ichio Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Somar Corp
Original Assignee
Somar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp filed Critical Somar Corp
Publication of DE69023327D1 publication Critical patent/DE69023327D1/de
Application granted granted Critical
Publication of DE69023327T2 publication Critical patent/DE69023327T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004—Component parts, details or accessories; Auxiliary operations
    • B29C63/0013—Removing old coatings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1105—Delaminating process responsive to feed or shape at delamination
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1906—Delaminating means responsive to feed or shape at delamination

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
DE69023327T 1990-04-06 1990-12-10 Ablöseentwicklungsverfahren und Vorrichtung zur Durchführung. Expired - Fee Related DE69023327T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9155590 1990-04-06
JP23192490 1990-09-01

Publications (2)

Publication Number Publication Date
DE69023327D1 true DE69023327D1 (de) 1995-12-07
DE69023327T2 DE69023327T2 (de) 1996-06-13

Family

ID=26432992

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69023327T Expired - Fee Related DE69023327T2 (de) 1990-04-06 1990-12-10 Ablöseentwicklungsverfahren und Vorrichtung zur Durchführung.

Country Status (3)

Country Link
US (1) US5312505A (de)
EP (1) EP0452552B1 (de)
DE (1) DE69023327T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2644184B2 (ja) * 1994-06-06 1997-08-25 ソマール株式会社 フィルム剥離方法及び装置
JP2002050670A (ja) * 2000-08-04 2002-02-15 Toshiba Corp ピックアップ装置及びピックアップ方法
WO2006003816A1 (ja) * 2004-07-02 2006-01-12 Sharp Kabushiki Kaisha フィルム剥離方法と装置
CN101310974B (zh) * 2007-05-21 2010-08-25 北京京东方光电科技有限公司 剥膜设备和剥膜方法
KR102006876B1 (ko) * 2012-09-04 2019-08-05 삼성디스플레이 주식회사 필름 박리장치 및 그것을 이용한 필름 박리방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE790282A (fr) * 1971-10-25 1973-02-15 Redland Tiles Ltd Appareil perfectionne pour la fabrication de tuiles
US4033403A (en) * 1975-09-17 1977-07-05 Seaton Engineering Company Synchronizing velocity and position control
JPS6011346B2 (ja) * 1977-05-06 1985-03-25 富士写真フイルム株式会社 剥離現像方法
US4724032A (en) * 1985-10-02 1988-02-09 Thomas Kay Sheet separating machine and method
JPS6337352A (ja) * 1986-07-31 1988-02-18 Somar Corp 薄膜剥離装置
JPH01271356A (ja) * 1988-04-25 1989-10-30 Somar Corp 薄膜剥離装置
DE3837471C1 (de) * 1988-11-04 1990-02-01 Vegla Vereinigte Glaswerke Gmbh, 5100 Aachen, De

Also Published As

Publication number Publication date
EP0452552A2 (de) 1991-10-23
US5312505A (en) 1994-05-17
EP0452552A3 (en) 1992-09-02
EP0452552B1 (de) 1995-11-02
DE69023327T2 (de) 1996-06-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee