DE69014094D1 - Nicht-gleitender Absperrschieber für Hochvakuum. - Google Patents

Nicht-gleitender Absperrschieber für Hochvakuum.

Info

Publication number
DE69014094D1
DE69014094D1 DE69014094T DE69014094T DE69014094D1 DE 69014094 D1 DE69014094 D1 DE 69014094D1 DE 69014094 T DE69014094 T DE 69014094T DE 69014094 T DE69014094 T DE 69014094T DE 69014094 D1 DE69014094 D1 DE 69014094D1
Authority
DE
Germany
Prior art keywords
high vacuum
gate valve
sliding gate
sliding
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014094T
Other languages
English (en)
Other versions
DE69014094T2 (de
Inventor
Toshio Sawa
Norikimi Irie
Yuzo Hayashi
Toshiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Irie Koken Co Ltd
Original Assignee
Irie Koken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irie Koken Co Ltd filed Critical Irie Koken Co Ltd
Publication of DE69014094D1 publication Critical patent/DE69014094D1/de
Application granted granted Critical
Publication of DE69014094T2 publication Critical patent/DE69014094T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
DE1990614094 1990-01-08 1990-03-06 Nicht-gleitender Absperrschieber für Hochvakuum. Expired - Fee Related DE69014094T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP42490A JPH03204483A (ja) 1990-01-08 1990-01-08 無しゅう動真空ゲートバルブ

Publications (2)

Publication Number Publication Date
DE69014094D1 true DE69014094D1 (de) 1994-12-15
DE69014094T2 DE69014094T2 (de) 1995-06-14

Family

ID=11473427

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990614094 Expired - Fee Related DE69014094T2 (de) 1990-01-08 1990-03-06 Nicht-gleitender Absperrschieber für Hochvakuum.

Country Status (3)

Country Link
EP (1) EP0436770B1 (de)
JP (1) JPH03204483A (de)
DE (1) DE69014094T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3388435B2 (ja) * 1999-12-28 2003-03-24 株式会社ブイテックス ゲートバルブ
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
US6431518B1 (en) * 2001-01-11 2002-08-13 Vat Holding Ag Vacuum valve
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥
DE102018132724A1 (de) * 2018-12-18 2020-06-18 Vat Holding Ag Ventil
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
CN113932028B (zh) * 2021-12-20 2022-03-29 成都乘风阀门有限责任公司 一种水平安装平板闸阀

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1353573A (fr) * 1963-01-15 1964-02-28 Comp Generale Electricite Vanne d'étanchéité à passage direct
FR2283375A1 (fr) * 1974-07-15 1976-03-26 Commissariat Energie Atomique Vanne a tiroir pour ultra-vide
US4681329A (en) * 1986-07-02 1987-07-21 Mdc Vacuum Products Corporation High vacuum gate valve having improved metal vacuum seal joint
EP0309181A3 (de) * 1987-09-24 1989-11-29 Varian Associates, Inc. Isolierventil für die Anwendung bei Vakuum oder Nicht-Vakuum

Also Published As

Publication number Publication date
EP0436770B1 (de) 1994-11-09
JPH03204483A (ja) 1991-09-06
DE69014094T2 (de) 1995-06-14
JPH0549866B2 (de) 1993-07-27
EP0436770A1 (de) 1991-07-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee