DE69010271D1 - Regenerierung von verbrauchten Ferrichlorid-Ätzmitteln. - Google Patents

Regenerierung von verbrauchten Ferrichlorid-Ätzmitteln.

Info

Publication number
DE69010271D1
DE69010271D1 DE69010271T DE69010271T DE69010271D1 DE 69010271 D1 DE69010271 D1 DE 69010271D1 DE 69010271 T DE69010271 T DE 69010271T DE 69010271 T DE69010271 T DE 69010271T DE 69010271 D1 DE69010271 D1 DE 69010271D1
Authority
DE
Germany
Prior art keywords
ferrichloride
etchants
regeneration
used ferrichloride
ferrichloride etchants
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69010271T
Other languages
English (en)
Other versions
DE69010271T2 (de
Inventor
Perminder Bindra
Kathleen Lorraine Covert
David Noel Light
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69010271D1 publication Critical patent/DE69010271D1/de
Application granted granted Critical
Publication of DE69010271T2 publication Critical patent/DE69010271T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • ing And Chemical Polishing (AREA)
DE69010271T 1989-05-12 1990-04-27 Regenerierung von verbrauchten Ferrichlorid-Ätzmitteln. Expired - Fee Related DE69010271T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/350,971 US5035778A (en) 1989-05-12 1989-05-12 Regeneration of spent ferric chloride etchants

Publications (2)

Publication Number Publication Date
DE69010271D1 true DE69010271D1 (de) 1994-08-04
DE69010271T2 DE69010271T2 (de) 1995-02-02

Family

ID=23379024

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69010271T Expired - Fee Related DE69010271T2 (de) 1989-05-12 1990-04-27 Regenerierung von verbrauchten Ferrichlorid-Ätzmitteln.

Country Status (4)

Country Link
US (1) US5035778A (de)
EP (1) EP0396984B1 (de)
JP (1) JPH02310382A (de)
DE (1) DE69010271T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04362183A (ja) * 1991-06-07 1992-12-15 Nippon Paint Co Ltd アルミニウム表面洗浄浴の再生方法
US5705048A (en) * 1996-03-27 1998-01-06 Oxley Research, Inc. Apparatus and a process for regenerating a CUCl2 etchant
DE19850530A1 (de) * 1998-11-03 2000-05-25 Eilenburger Elektrolyse & Umwelttechnik Gmbh Kreislaufverfahren zum Beizen von Kupfer und Kupferlegierungen
SE519898C2 (sv) * 2001-09-10 2003-04-22 Obducat Ab Sätt att etsa koppar på kort samt anordning och elektrolyt för utförande av sättet
US7404904B2 (en) * 2001-10-02 2008-07-29 Melvin Stanley Method and apparatus to clean particulate matter from a toxic fluid
KR102147391B1 (ko) * 2018-07-16 2020-08-24 금오공과대학교 산학협력단 염화철 폐산을 이용한 염화제이철의 제조장치 및 이를 이용한 염화제이철의 제조방법
CN110857470B (zh) * 2018-08-24 2022-02-08 沈阳师范大学 一种三氯化铁蚀刻液的再生与循环方法
CN115747805B (zh) * 2022-11-29 2024-10-22 南通卓力达金属制品有限公司 一种三氯化铁刻蚀旧液的电解氧化再生设备及系统

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2748071A (en) * 1951-08-30 1956-05-29 Technograph Printed Circuits L Apparatus for regeneration of etching media
US3622478A (en) * 1960-11-14 1971-11-23 Gen Electric Continuous regeneration of ferric sulfate pickling bath
US3761369A (en) * 1971-10-18 1973-09-25 Electrodies Inc Process for the electrolytic reclamation of spent etching fluids
US3788959A (en) * 1972-05-05 1974-01-29 Sybron Corp Electrodialytic recovery of acid and insoluble products from spent liquors
US3964956A (en) * 1974-10-24 1976-06-22 General Dynamics Corporation System for maintaining uniform copper etching efficiency
DE2726622A1 (de) * 1977-06-13 1978-12-21 Arn Georg Ag Verfahren zur saeurebestimmung in eisenhaltigen fluessigkeiten, insbesondere beizsaeuren
DE2850564C2 (de) * 1978-11-22 1982-12-23 Kernforschungsanlage Jülich GmbH, 5170 Jülich Verfahren und Vorrichtung zum Regenerieren einer Kupfer(II)-Chlorid und/oder Eisen(III)-Chlorid enthaltenden Ätzlösung in einer Elektrolysezelle
US4468305A (en) * 1979-05-08 1984-08-28 The Electricity Council Method for the electrolytic regeneration of etchants for metals
CS218296B1 (en) * 1980-10-30 1983-02-25 Antonin Stehlik Method of continuous regeneration of the iron trichloride solution
JPS61104092A (ja) * 1984-10-23 1986-05-22 Sumitomo Special Metals Co Ltd エツチング液の再生方法
IL77373A (en) * 1985-12-18 1990-03-19 Hanita Lenses Contact lens
DE3618769C1 (en) * 1986-06-04 1991-11-21 Markus Dr-Ing Bringmann Apparatus for the continuous electrolytic regeneration of an at least partially exhausted acidic iron(III) chloride solution used for etching metals

Also Published As

Publication number Publication date
EP0396984A1 (de) 1990-11-14
JPH02310382A (ja) 1990-12-26
DE69010271T2 (de) 1995-02-02
EP0396984B1 (de) 1994-06-29
US5035778A (en) 1991-07-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee