DE69009903T2 - Schleifmittel mit leitendem Überzug. - Google Patents

Schleifmittel mit leitendem Überzug.

Info

Publication number
DE69009903T2
DE69009903T2 DE69009903T DE69009903T DE69009903T2 DE 69009903 T2 DE69009903 T2 DE 69009903T2 DE 69009903 T DE69009903 T DE 69009903T DE 69009903 T DE69009903 T DE 69009903T DE 69009903 T2 DE69009903 T2 DE 69009903T2
Authority
DE
Germany
Prior art keywords
abrasive
conductive coating
build
eliminate
construction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69009903T
Other languages
English (en)
Other versions
DE69009903D1 (de
Inventor
J Buchanan C O Minnesota Scott
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27015533&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69009903(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE69009903D1 publication Critical patent/DE69009903D1/de
Application granted granted Critical
Publication of DE69009903T2 publication Critical patent/DE69009903T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B3/00—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Paints Or Removers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
DE69009903T 1989-08-21 1990-08-21 Schleifmittel mit leitendem Überzug. Revoked DE69009903T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39651389A 1989-08-21 1989-08-21
US49545890A 1990-03-16 1990-03-16

Publications (2)

Publication Number Publication Date
DE69009903D1 DE69009903D1 (de) 1994-07-21
DE69009903T2 true DE69009903T2 (de) 1995-01-05

Family

ID=27015533

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69009903T Revoked DE69009903T2 (de) 1989-08-21 1990-08-21 Schleifmittel mit leitendem Überzug.

Country Status (10)

Country Link
US (1) US5108463B1 (de)
EP (1) EP0414494B1 (de)
JP (1) JP2869169B2 (de)
KR (1) KR100197820B1 (de)
AT (1) ATE107215T1 (de)
AU (1) AU633956B2 (de)
CA (1) CA2023209C (de)
DE (1) DE69009903T2 (de)
HK (1) HK1006953A1 (de)
MY (1) MY107101A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017204605A1 (de) 2017-03-20 2018-09-20 Robert Bosch Gmbh Verfahren zu einem elektrostatischen Streuen eines Schleifkorns
WO2022063662A1 (de) * 2020-09-24 2022-03-31 Robert Bosch Gmbh Verfahren zur herstellung eines schleifartikels sowie schleifartikel

Families Citing this family (110)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6406577B1 (en) 1991-12-20 2002-06-18 3M Innovative Properties Company Method of making abrasive belt with an endless, seamless backing
US6406576B1 (en) 1991-12-20 2002-06-18 3M Innovative Properties Company Method of making coated abrasive belt with an endless, seamless backing
JPH07502458A (ja) * 1991-12-20 1995-03-16 ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー エンドレスで継目のない支持体を有する被覆研磨剤ベルトおよびその製造方法
AU3617593A (en) * 1992-02-12 1993-09-03 Minnesota Mining And Manufacturing Company A coated abrasive article containing an electrically conductive backing
US5203884A (en) * 1992-06-04 1993-04-20 Minnesota Mining And Manufacturing Company Abrasive article having vanadium oxide incorporated therein
US5328716A (en) * 1992-08-11 1994-07-12 Minnesota Mining And Manufacturing Company Method of making a coated abrasive article containing a conductive backing
US5304224A (en) * 1992-10-01 1994-04-19 Minnesota Mining And Manufacturing Company Coated abrasive article having a tear resistant backing
US5355636A (en) * 1992-10-01 1994-10-18 Minnesota Mining And Manufacturing Company Tear resistant coated abrasive article
US5681612A (en) * 1993-06-17 1997-10-28 Minnesota Mining And Manufacturing Company Coated abrasives and methods of preparation
US5366524A (en) * 1993-11-12 1994-11-22 Martin Marietta Energy Systems, Inc. Ceramic-bonded abrasive grinding tools
US5421766A (en) * 1993-12-06 1995-06-06 Church & Dwight Co., Inc. Blast nozzle for preventing the accumulation of static electric charge during blast cleaning operations
US5578096A (en) * 1995-08-10 1996-11-26 Minnesota Mining And Manufacturing Company Method for making a spliceless coated abrasive belt and the product thereof
JPH0985631A (ja) * 1995-09-28 1997-03-31 Fuji Photo Film Co Ltd 研磨体
US5766277A (en) * 1996-09-20 1998-06-16 Minnesota Mining And Manufacturing Company Coated abrasive article and method of making same
US5908477A (en) * 1997-06-24 1999-06-01 Minnesota Mining & Manufacturing Company Abrasive articles including an antiloading composition
US6261682B1 (en) 1998-06-30 2001-07-17 3M Innovative Properties Abrasive articles including an antiloading composition
KR20010020807A (ko) * 1999-05-03 2001-03-15 조셉 제이. 스위니 고정 연마재 제품을 사전-조절하는 방법
US7066800B2 (en) * 2000-02-17 2006-06-27 Applied Materials Inc. Conductive polishing article for electrochemical mechanical polishing
US20050092621A1 (en) * 2000-02-17 2005-05-05 Yongqi Hu Composite pad assembly for electrochemical mechanical processing (ECMP)
US7125477B2 (en) * 2000-02-17 2006-10-24 Applied Materials, Inc. Contacts for electrochemical processing
US7059948B2 (en) * 2000-12-22 2006-06-13 Applied Materials Articles for polishing semiconductor substrates
US20040020789A1 (en) * 2000-02-17 2004-02-05 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US20080156657A1 (en) * 2000-02-17 2008-07-03 Butterfield Paul D Conductive polishing article for electrochemical mechanical polishing
US7678245B2 (en) * 2000-02-17 2010-03-16 Applied Materials, Inc. Method and apparatus for electrochemical mechanical processing
US7303662B2 (en) * 2000-02-17 2007-12-04 Applied Materials, Inc. Contacts for electrochemical processing
US7303462B2 (en) * 2000-02-17 2007-12-04 Applied Materials, Inc. Edge bead removal by an electro polishing process
US6991528B2 (en) * 2000-02-17 2006-01-31 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US6979248B2 (en) * 2002-05-07 2005-12-27 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US6962524B2 (en) * 2000-02-17 2005-11-08 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7670468B2 (en) * 2000-02-17 2010-03-02 Applied Materials, Inc. Contact assembly and method for electrochemical mechanical processing
US7029365B2 (en) * 2000-02-17 2006-04-18 Applied Materials Inc. Pad assembly for electrochemical mechanical processing
US8062098B2 (en) 2000-11-17 2011-11-22 Duescher Wayne O High speed flat lapping platen
US7632434B2 (en) 2000-11-17 2009-12-15 Wayne O. Duescher Abrasive agglomerate coated raised island articles
US7520800B2 (en) * 2003-04-16 2009-04-21 Duescher Wayne O Raised island abrasive, lapping apparatus and method of use
US8256091B2 (en) * 2000-11-17 2012-09-04 Duescher Wayne O Equal sized spherical beads
US8545583B2 (en) * 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
US20020146963A1 (en) * 2001-02-08 2002-10-10 3M Innovative Properties Company Composition containing graphite
US7344432B2 (en) * 2001-04-24 2008-03-18 Applied Materials, Inc. Conductive pad with ion exchange membrane for electrochemical mechanical polishing
US7137879B2 (en) * 2001-04-24 2006-11-21 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
JP4737492B2 (ja) * 2001-09-04 2011-08-03 独立行政法人理化学研究所 メタルレスボンド砥石とそれによる電解ドレッシング研削方法及び装置
US6758734B2 (en) 2002-03-18 2004-07-06 3M Innovative Properties Company Coated abrasive article
US6773474B2 (en) 2002-04-19 2004-08-10 3M Innovative Properties Company Coated abrasive article
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US6979713B2 (en) * 2002-11-25 2005-12-27 3M Innovative Properties Company Curable compositions and abrasive articles therefrom
US7169199B2 (en) * 2002-11-25 2007-01-30 3M Innovative Properties Company Curable emulsions and abrasive articles therefrom
DE10256515A1 (de) * 2002-12-04 2004-07-29 Tesa Ag Antistatisches Haftklebeband
US7842169B2 (en) * 2003-03-04 2010-11-30 Applied Materials, Inc. Method and apparatus for local polishing control
US6843815B1 (en) * 2003-09-04 2005-01-18 3M Innovative Properties Company Coated abrasive articles and method of abrading
US20050121141A1 (en) * 2003-11-13 2005-06-09 Manens Antoine P. Real time process control for a polishing process
US7186164B2 (en) * 2003-12-03 2007-03-06 Applied Materials, Inc. Processing pad assembly with zone control
US20050178666A1 (en) * 2004-01-13 2005-08-18 Applied Materials, Inc. Methods for fabrication of a polishing article
US7121924B2 (en) * 2004-04-20 2006-10-17 3M Innovative Properties Company Abrasive articles, and methods of making and using the same
US20050282029A1 (en) * 2004-06-18 2005-12-22 3M Innovative Properties Company Polymerizable composition and articles therefrom
US7150770B2 (en) * 2004-06-18 2006-12-19 3M Innovative Properties Company Coated abrasive article with tie layer, and method of making and using the same
US7150771B2 (en) * 2004-06-18 2006-12-19 3M Innovative Properties Company Coated abrasive article with composite tie layer, and method of making and using the same
US20060030156A1 (en) * 2004-08-05 2006-02-09 Applied Materials, Inc. Abrasive conductive polishing article for electrochemical mechanical polishing
US20060026904A1 (en) * 2004-08-06 2006-02-09 3M Innovative Properties Company Composition, coated abrasive article, and methods of making the same
US7084064B2 (en) * 2004-09-14 2006-08-01 Applied Materials, Inc. Full sequence metal and barrier layer electrochemical mechanical processing
WO2006039436A2 (en) * 2004-10-01 2006-04-13 Applied Materials, Inc. Pad design for electrochemical mechanical polishing
US7520968B2 (en) * 2004-10-05 2009-04-21 Applied Materials, Inc. Conductive pad design modification for better wafer-pad contact
US7591865B2 (en) * 2005-01-28 2009-09-22 Saint-Gobain Abrasives, Inc. Method of forming structured abrasive article
US8287611B2 (en) * 2005-01-28 2012-10-16 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for making same
CA2602891A1 (en) * 2005-04-08 2006-10-19 Saint-Gobain Abrasives, Inc. Abrasive article having reaction activated chromophore
US7427340B2 (en) * 2005-04-08 2008-09-23 Applied Materials, Inc. Conductive pad
US20060265967A1 (en) * 2005-05-24 2006-11-30 3M Innovative Properties Company Abrasive articles and methods of making and using the same
US20060265966A1 (en) * 2005-05-24 2006-11-30 Rostal William J Abrasive articles and methods of making and using the same
US7344575B2 (en) * 2005-06-27 2008-03-18 3M Innovative Properties Company Composition, treated backing, and abrasive articles containing the same
US7344574B2 (en) * 2005-06-27 2008-03-18 3M Innovative Properties Company Coated abrasive article, and method of making and using the same
UA87772C2 (ru) 2005-06-29 2009-08-10 Сеинт-Гобен Ебрейсивз, Инк. Абразивный продукт, способ изготовления абразивного продукта, сшитая формальдегидная смола для абразивного продукта, способ сшивания формальдегидной смолы, отверждаемая композиция и способ абразивной обработки рабочей поверхности
TW200720494A (en) * 2005-11-01 2007-06-01 Applied Materials Inc Ball contact cover for copper loss reduction and spike reduction
US8435098B2 (en) * 2006-01-27 2013-05-07 Saint-Gobain Abrasives, Inc. Abrasive article with cured backsize layer
US20070218587A1 (en) * 2006-03-07 2007-09-20 Applied Materials, Inc. Soft conductive polymer processing pad and method for fabricating the same
TWI333441B (en) * 2006-04-04 2010-11-21 Saint Gobain Abrasives Inc Infrared cured abrasive articles and method of manufacture
JP4937700B2 (ja) * 2006-11-07 2012-05-23 株式会社ディスコ 乾式研磨装置
US7947097B2 (en) * 2006-12-21 2011-05-24 Saint-Gobain Abrasives, Inc. Low corrosion abrasive articles and methods for forming same
PL2125984T3 (pl) * 2007-01-23 2012-09-28 Saint Gobain Abrasives Inc Powlekane produkty ścierne zawierające agregaty
US20080206631A1 (en) * 2007-02-27 2008-08-28 3M Innovative Properties Company Electrolytes, electrode compositions and electrochemical cells made therefrom
US20080293343A1 (en) * 2007-05-22 2008-11-27 Yuchun Wang Pad with shallow cells for electrochemical mechanical processing
EP2231365B1 (de) * 2007-12-06 2014-08-20 Saint-Gobain Abrasives, Inc. Schleifkörper und herstellungsverfahren dafür
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US20100011672A1 (en) * 2008-07-16 2010-01-21 Kincaid Don H Coated abrasive article and method of making and using the same
CN102149784B (zh) * 2008-07-22 2014-03-05 圣戈班磨料磨具有限公司 包含聚集体的涂覆的磨料产品
CA2743808A1 (en) 2008-11-17 2010-05-20 Saint-Gobain Abrasives, Inc. Acrylate color-stabilized phenolic bound abrasive products and methods for making same
DE102009047583A1 (de) * 2009-12-07 2011-06-09 Robert Bosch Gmbh Elektrisch leitfähiges Schleifwerkzeug
WO2011090681A2 (en) 2009-12-29 2011-07-28 Saint-Gobain Abrasives, Inc. Anti-loading abrasive article
CA2823578C (en) 2010-12-30 2016-09-20 Saint-Gobain Abrasives, Inc. Coated abrasive aggregates and products containing same
WO2013049526A2 (en) 2011-09-29 2013-04-04 Saint-Gobain Abrasives, Inc. Abrasive products and methods for finishing hard surfaces
WO2013102206A1 (en) 2011-12-31 2013-07-04 Saint-Gobain Abrasives, Inc. Abrasive article having a non-uniform distribution of openings
US9321947B2 (en) 2012-01-10 2016-04-26 Saint-Gobain Abrasives, Inc. Abrasive products and methods for finishing coated surfaces
CA2867350C (en) 2012-03-16 2017-05-23 Saint-Gobain Abrasives, Inc. Abrasive products and methods for finishing surfaces
WO2013149197A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products and methods for fine polishing of ophthalmic lenses
WO2014106280A1 (en) 2012-12-31 2014-07-03 Saint-Gobain Abrasives, Inc. Abrasive articles including a blend of abrasive grains and method of forming same
TWI589404B (zh) 2013-06-28 2017-07-01 聖高拜磨料有限公司 基於向日葵圖案之經塗佈的研磨製品
WO2016160357A1 (en) 2015-03-30 2016-10-06 3M Innovative Properties Company Coated abrasive article and method of making the same
CN108473822B (zh) 2015-12-30 2021-11-12 3M创新有限公司 双阶段结构粘结粘合剂
WO2017117364A1 (en) * 2015-12-30 2017-07-06 3M Innovative Properties Company Abrasive articles and related methods
US10688625B2 (en) 2015-12-30 2020-06-23 3M Innovative Properties Company Abrasive article
WO2019207416A1 (en) 2018-04-24 2019-10-31 3M Innovative Properties Company Coated abrasive article and method of making the same
WO2019207415A1 (en) 2018-04-24 2019-10-31 3M Innovative Properties Company Method of making a coated abrasive article
EP3784436A1 (de) 2018-04-24 2021-03-03 3M Innovative Properties Company Verfahren zur herstellung eines beschichteten schleifmittels
WO2020075006A1 (en) 2018-10-09 2020-04-16 3M Innovative Properties Company Treated backing and coated abrasive article including the same
EP3898089A1 (de) 2018-12-18 2021-10-27 3M Innovative Properties Company Beschichtete schleifartikel und verfahren zur herstellung beschichteter schleifartikel
US20220080554A1 (en) 2019-02-11 2022-03-17 3M Innovative Properties Company Abrasive articles and methods of making and using the same
EP4045230B1 (de) 2019-10-17 2023-12-27 3M Innovative Properties Company Beschichteter schleifartikel und verfahren zur herstellung davon
US20230150092A1 (en) 2020-06-30 2023-05-18 3M Innovative Properties Company Coated abrasive articles and methods of making and using the same
WO2022090821A1 (en) 2020-10-28 2022-05-05 3M Innovative Properties Company Method of making a coated abrasive article and coated abrasive article
WO2022263986A1 (en) 2021-06-15 2022-12-22 3M Innovative Properties Company Coated abrasive article including biodegradable thermoset resin and method of making and using the same
WO2023180877A1 (en) 2022-03-21 2023-09-28 3M Innovative Properties Company Curable composition, treated backing, coated abrasive articles including the same, and methods of making and using the same
WO2023180880A1 (en) 2022-03-21 2023-09-28 3M Innovative Properties Company Curable composition, coated abrasive article containing the same, and methods of making and using the same
WO2023225356A1 (en) 2022-05-20 2023-11-23 3M Innovative Properties Company Abrasive assembly with abrasive segments

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017204605A1 (de) 2017-03-20 2018-09-20 Robert Bosch Gmbh Verfahren zu einem elektrostatischen Streuen eines Schleifkorns
US11420305B2 (en) 2017-03-20 2022-08-23 Robert Bosch Gmbh Method for electrostatically scattering an abrasive grain
WO2022063662A1 (de) * 2020-09-24 2022-03-31 Robert Bosch Gmbh Verfahren zur herstellung eines schleifartikels sowie schleifartikel

Also Published As

Publication number Publication date
EP0414494A3 (en) 1991-06-12
US5108463A (en) 1992-04-28
AU6117290A (en) 1991-02-21
AU633956B2 (en) 1993-02-11
DE69009903D1 (de) 1994-07-21
EP0414494B1 (de) 1994-06-15
KR910004304A (ko) 1991-03-28
US5108463B1 (en) 1996-08-13
JPH03188187A (ja) 1991-08-16
ATE107215T1 (de) 1994-07-15
CA2023209A1 (en) 1991-02-22
KR100197820B1 (ko) 1999-06-15
JP2869169B2 (ja) 1999-03-10
EP0414494A2 (de) 1991-02-27
CA2023209C (en) 2001-02-20
HK1006953A1 (en) 1999-03-26
MY107101A (en) 1995-11-30

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