DE69006021D1 - Überdruckventil und kryopumpe die dieses verwendet. - Google Patents

Überdruckventil und kryopumpe die dieses verwendet.

Info

Publication number
DE69006021D1
DE69006021D1 DE90905980T DE69006021T DE69006021D1 DE 69006021 D1 DE69006021 D1 DE 69006021D1 DE 90905980 T DE90905980 T DE 90905980T DE 69006021 T DE69006021 T DE 69006021T DE 69006021 D1 DE69006021 D1 DE 69006021D1
Authority
DE
Germany
Prior art keywords
crye
pump
relief valve
pressure relief
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90905980T
Other languages
English (en)
Other versions
DE69006021T2 (de
Inventor
Hans Clarke
Stephen Yamartino
Thomas Dunn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Application granted granted Critical
Publication of DE69006021D1 publication Critical patent/DE69006021D1/de
Publication of DE69006021T2 publication Critical patent/DE69006021T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F16K17/04—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
    • F16K17/0466—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded with a special seating surface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/46—Attachment of sealing rings
    • F16K1/465—Attachment of sealing rings to the valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S251/00—Valves and valve actuation
    • Y10S251/90—Valves with o-rings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7904—Reciprocating valves
    • Y10T137/7922—Spring biased
    • Y10T137/7929—Spring coaxial with valve
    • Y10T137/7931—Spring in inlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7904—Reciprocating valves
    • Y10T137/7922—Spring biased
    • Y10T137/7929—Spring coaxial with valve
    • Y10T137/7932—Valve stem extends through fixed spring abutment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Details Of Valves (AREA)
DE1990606021 1989-04-07 1990-04-06 Überdruckventil und kryopumpe die dieses verwendet. Expired - Fee Related DE69006021T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33492189A 1989-04-07 1989-04-07
PCT/US1990/001883 WO1990012231A1 (en) 1989-04-07 1990-04-06 Pressure relief valve and cryopump utilizing the same

Publications (2)

Publication Number Publication Date
DE69006021D1 true DE69006021D1 (de) 1994-02-24
DE69006021T2 DE69006021T2 (de) 1994-06-01

Family

ID=23309451

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990606021 Expired - Fee Related DE69006021T2 (de) 1989-04-07 1990-04-06 Überdruckventil und kryopumpe die dieses verwendet.

Country Status (6)

Country Link
US (1) US5137050A (de)
EP (1) EP0466776B1 (de)
JP (1) JPH04504454A (de)
CA (1) CA2049029A1 (de)
DE (1) DE69006021T2 (de)
WO (1) WO1990012231A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242277A (en) * 1991-11-21 1993-09-07 Helix Technology Corporation Ultra high vacuum cryopump relief valve assembly
DE4241113A1 (de) * 1992-12-07 1994-06-09 Friedhelm Schneider Niederdruckventil mit Servo-Betätigung
GB2340187B (en) * 1996-03-20 2000-06-21 Helix Tech Corp Purge and rough cryopump regeneration process, cryopump and controller
US5906102A (en) * 1996-04-12 1999-05-25 Helix Technology Corporation Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve
US6005233A (en) * 1997-07-15 1999-12-21 Aladdin Synergetics, Inc. Pressure relief system for inductively heated heat retentive server
US5974809A (en) * 1998-01-21 1999-11-02 Helix Technology Corporation Cryopump with an exhaust filter
US5975061A (en) * 1998-02-17 1999-11-02 Walbro Corporation Bypass fuel pressure regulator
JPH11343972A (ja) * 1998-06-01 1999-12-14 Daikin Ind Ltd クライオポンプ、クライオポンプの再生装置および再生方法、並びに、クライオポンプの制御方法
US6024121A (en) * 1998-12-23 2000-02-15 Flomatic Corporation Check valve
US6530237B2 (en) 2001-04-02 2003-03-11 Helix Technology Corporation Refrigeration system pressure control using a gas volume
DE50301399D1 (de) * 2002-07-16 2006-03-02 Mann & Hummel Gmbh Ventil zur Steuerung eines Fluidstromes
US7194867B2 (en) 2004-03-19 2007-03-27 Brooks Automation, Inc. Integrated rough/purge/vent (RPV) valve
JP4415929B2 (ja) 2005-11-16 2010-02-17 株式会社日立製作所 高圧燃料供給ポンプ
US7963459B1 (en) 2007-06-01 2011-06-21 Sherry Raymond C Self-cleaning high pressure nozzle
US8915453B1 (en) 2007-06-01 2014-12-23 Raymond C. Sherry Expansion nozzle with continuous rotating stem
WO2012178132A1 (en) * 2011-06-24 2012-12-27 Equilibar, Llc Back pressure regulator with floating seal support
JP5822747B2 (ja) * 2012-02-02 2015-11-24 住友重機械工業株式会社 クライオポンプ
NO341275B1 (en) * 2015-03-04 2017-10-02 Fmc Kongsberg Subsea As Method for flushing of debris from a valve assembly and a valve assembly
FR3041031B1 (fr) * 2015-09-14 2017-10-20 Filtrauto Agencement et methode pour reguler un flux de gaz de carter d'un moteur a combustion interne avant une separation d'huile
US20170292633A1 (en) 2016-04-11 2017-10-12 Mks Instruments, Inc. Actively cooled vacuum isolation valve
US11603940B2 (en) * 2018-04-12 2023-03-14 Woodward, Inc. Damped check valve having multi-pressure operation

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1170412A (en) * 1914-11-16 1916-02-01 William A Campbell Valve for tires.
DE361646C (de) * 1922-01-06 1922-10-17 Etablissements Daubron Soc D Aus einem schmiegsamen, elastischen Ring bestehendes Ventil, insbesondere fuer Pumpen
US2072271A (en) * 1932-12-22 1937-03-02 Claude C Meadows Safety valve
US2364812A (en) * 1941-06-14 1944-12-12 Union Carbide & Carbon Corp Poppet valve
US2599622A (en) * 1947-01-03 1952-06-10 American Car & Foundry Co Resilient seal safety valve
US2621885A (en) * 1948-07-02 1952-12-16 Rialto Corp O ring valve seat
US2624542A (en) * 1948-11-05 1953-01-06 United Aircraft Prod Valve construction
US2650793A (en) * 1950-09-25 1953-09-01 Loyola University Foundation Valve
US3208758A (en) * 1961-10-11 1965-09-28 Varian Associates Metal vacuum joint
FR2071092A5 (de) * 1969-12-17 1971-09-17 Nicolas Jean Pierre
CH558462A (de) * 1973-04-06 1975-01-31 Jost & Kekeis Ag Berstsicherung fuer tanks und verfahren zu ihrer herstellung.
US4303251A (en) * 1978-12-04 1981-12-01 Varian Associates, Inc. Flange sealing joint with removable metal gasket
US4697617A (en) * 1985-01-22 1987-10-06 Helix Technology Corporation Pressure relief filter and valve and cryopump utilizing the same
US4655046A (en) * 1985-07-19 1987-04-07 Helix Technology Corporation Cryopump with exhaust filter
NL8503030A (nl) * 1985-11-05 1987-06-01 Mowid Anstalt Klepafsluiter.
US4674530A (en) * 1986-01-13 1987-06-23 Anderson, Greenwood & Company Pressure relief device for vessels

Also Published As

Publication number Publication date
US5137050A (en) 1992-08-11
WO1990012231A1 (en) 1990-10-18
CA2049029A1 (en) 1990-10-08
EP0466776B1 (de) 1994-01-12
DE69006021T2 (de) 1994-06-01
EP0466776A1 (de) 1992-01-22
JPH04504454A (ja) 1992-08-06

Similar Documents

Publication Publication Date Title
DE69006021D1 (de) Überdruckventil und kryopumpe die dieses verwendet.
DE69007660T2 (de) Hydraulisches Komprimierwerkzeug mit Druckentlastungs- und Überdruckventil.
DE69201566T2 (de) Überdruckventil.
DE69214186D1 (de) Druckentlastungsventil
DE69023793D1 (de) Druckregelventil.
IT1218953B (it) Valvola limitatrice di pressione
DE69110041D1 (de) Ventilanordnung und verdrängerpumpe.
DE69003946T2 (de) Differenzdruckentlastungsventil.
IT8721384A0 (it) Valvola regolatrice di pressione.
DE69114215T2 (de) Hydraulisches Druckregelventil.
DE3861710D1 (de) Druckgesteuertes rueckschlag- und entspannungsventil.
ITMI920244A0 (it) Valvola limitatrice di pressione regolabile
DE69005843T2 (de) Hydraulisches Druckregelventil.
DE69012051T2 (de) Hydraulikventilanordnung.
DE69015118D1 (de) Ventilanordnung und hydraulisches antriebssystem.
DE59204153D1 (de) Hochdruckhydraulikventil.
DE3763333D1 (de) Geraeuscharmes hydraulik-ventil.
DE59004512D1 (de) Drucksteuerventil.
DE69010821D1 (de) Zweiwegüberdruckventil.
NO169915B1 (no) Trykkbegrensningsventil
NO891671L (no) Trykkreduksjonsventil.
NO891903D0 (no) Hydraulisk suge- og trykkenhet.
DE69001563D1 (de) Druckventil.
NO890557D0 (no) Trykkavlastningspanel.
BR7301234U (pt) Válvula de alívio de pressão

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee