DE69003565D1 - Hochgeschwindigkeitswellenformabtastung mit einem feldeffektmikroskop. - Google Patents

Hochgeschwindigkeitswellenformabtastung mit einem feldeffektmikroskop.

Info

Publication number
DE69003565D1
DE69003565D1 DE90103155T DE69003565T DE69003565D1 DE 69003565 D1 DE69003565 D1 DE 69003565D1 DE 90103155 T DE90103155 T DE 90103155T DE 69003565 T DE69003565 T DE 69003565T DE 69003565 D1 DE69003565 D1 DE 69003565D1
Authority
DE
Germany
Prior art keywords
field effect
wave shape
speed wave
effect microscope
shape scan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90103155T
Other languages
English (en)
Other versions
DE69003565T2 (de
Inventor
George L Chiu
Jean-Marc Halbout
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69003565D1 publication Critical patent/DE69003565D1/de
Application granted granted Critical
Publication of DE69003565T2 publication Critical patent/DE69003565T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/14—STP [Scanning Tunnelling Potentiometry]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE90103155T 1989-03-23 1990-02-19 Hochgeschwindigkeitswellenformabtastung mit einem Feldeffektmikroskop. Expired - Lifetime DE69003565T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/327,863 US5019707A (en) 1989-03-23 1989-03-23 High speed waveform sampling with a tunneling microscope

Publications (2)

Publication Number Publication Date
DE69003565D1 true DE69003565D1 (de) 1993-11-04
DE69003565T2 DE69003565T2 (de) 1994-05-11

Family

ID=23278403

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90103155T Expired - Lifetime DE69003565T2 (de) 1989-03-23 1990-02-19 Hochgeschwindigkeitswellenformabtastung mit einem Feldeffektmikroskop.

Country Status (4)

Country Link
US (1) US5019707A (de)
EP (1) EP0388640B1 (de)
JP (1) JPH0794967B2 (de)
DE (1) DE69003565T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2775464B2 (ja) * 1989-04-27 1998-07-16 キヤノン株式会社 位置検出装置
DE4324983C2 (de) * 1993-07-26 1996-07-11 Fraunhofer Ges Forschung Akustisches Mikroskop
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
KR100421375B1 (ko) * 2001-01-15 2004-03-09 제원호 고속 주사탐침 현미경용 고주파 진동 탐침

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
EP0189498B1 (de) * 1985-01-29 1989-05-03 International Business Machines Corporation Feldemissions-Auger-Rasterelektronenmikroskop
US4665313A (en) * 1985-06-28 1987-05-12 International Business Machines Corporation Apparatus and method for displaying hole-electron pair distributions induced by electron bombardment
DE3675158D1 (de) * 1985-11-26 1990-11-29 Ibm Verfahren und mikroskop zur erzeugung von topographischen bildern unter anwendung atomarer wechselwirkungskraefte mit subaufloesung.
US4724318A (en) * 1985-11-26 1988-02-09 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
JPS63142202A (ja) * 1986-12-05 1988-06-14 Fujitsu Ltd 高周波トンネル顕微鏡
EP0290647B1 (de) * 1987-05-12 1991-07-24 International Business Machines Corporation Atomares Kräftemikroskop mit oscillierendem Quarz

Also Published As

Publication number Publication date
JPH0794967B2 (ja) 1995-10-11
US5019707A (en) 1991-05-28
EP0388640A3 (en) 1990-11-22
EP0388640A2 (de) 1990-09-26
EP0388640B1 (de) 1993-09-29
JPH02285203A (ja) 1990-11-22
DE69003565T2 (de) 1994-05-11

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