DE69022777D1 - Oberflächenmikroskop. - Google Patents

Oberflächenmikroskop.

Info

Publication number
DE69022777D1
DE69022777D1 DE69022777T DE69022777T DE69022777D1 DE 69022777 D1 DE69022777 D1 DE 69022777D1 DE 69022777 T DE69022777 T DE 69022777T DE 69022777 T DE69022777 T DE 69022777T DE 69022777 D1 DE69022777 D1 DE 69022777D1
Authority
DE
Germany
Prior art keywords
surface microscope
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69022777T
Other languages
English (en)
Other versions
DE69022777T2 (de
Inventor
Sumio Hosaka
Shigeyuki Hosoki
Tsuyoshi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69022777D1 publication Critical patent/DE69022777D1/de
Publication of DE69022777T2 publication Critical patent/DE69022777T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe

Landscapes

  • Physics & Mathematics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
DE69022777T 1989-06-09 1990-06-08 Oberflächenmikroskop. Expired - Fee Related DE69022777T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1145329A JP2880182B2 (ja) 1989-06-09 1989-06-09 表面顕微鏡

Publications (2)

Publication Number Publication Date
DE69022777D1 true DE69022777D1 (de) 1995-11-09
DE69022777T2 DE69022777T2 (de) 1996-03-14

Family

ID=15382651

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69022777T Expired - Fee Related DE69022777T2 (de) 1989-06-09 1990-06-08 Oberflächenmikroskop.

Country Status (4)

Country Link
US (1) US5036196A (de)
EP (1) EP0401852B1 (de)
JP (1) JP2880182B2 (de)
DE (1) DE69022777T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5289004A (en) * 1990-03-27 1994-02-22 Olympus Optical Co., Ltd. Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light
US5193383A (en) * 1990-07-11 1993-03-16 The United States Of America As Represented By The Secretary Of The Navy Mechanical and surface force nanoprobe
US5186041A (en) * 1990-11-28 1993-02-16 International Business Machines Corporation Microprobe-based CD measurement tool
CA2076925C (en) * 1991-08-29 1999-08-31 Kunihiro Sakai Information processing apparatus and scanning tunnel microscope
US5336887A (en) * 1991-11-15 1994-08-09 Olympus Optical Co., Ltd. Scanning probe microscope
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi, Ltd., Tokio/Tokyo Verfahren und Vorrichtung zum Beobachten einer Fläche
GB2267761B (en) * 1992-06-02 1996-01-17 Hitachi Europ Ltd Method of electrically testing a sample
WO1996035943A1 (en) * 1995-05-13 1996-11-14 International Business Machines Corporation Data acquisition and control apparatus for scanning probe systems
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
JP2952327B2 (ja) * 1997-07-16 1999-09-27 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
DE19754681A1 (de) * 1997-12-10 1999-06-17 Peter Heiland In einem Rastermodus abtastende Vorrichtung mit einer Kompensation des Störeinflusses vonmechanischen Schwingungen auf dem Abtastvorgang
US6953930B2 (en) * 2001-08-27 2005-10-11 Nippon Telegraph And Telephone Corporation Conductive transparent probe and probe control apparatus
JP5809850B2 (ja) * 2011-06-01 2015-11-11 オリンパス株式会社 画像処理装置
US10495665B2 (en) * 2016-09-19 2019-12-03 Zyvex Labs, Llc Methods, devices and systems for scanning tunneling microscopy control system design

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
US4747698A (en) * 1986-04-30 1988-05-31 International Business Machines Corp. Scanning thermal profiler
JPS643502A (en) * 1987-06-25 1989-01-09 Seiko Instr & Electronics Scanning type tunnel microscope
WO1989003510A1 (en) * 1987-10-09 1989-04-20 Hitachi, Ltd. Analyzer
US4823004A (en) * 1987-11-24 1989-04-18 California Institute Of Technology Tunnel and field effect carrier ballistics
US4870352A (en) * 1988-07-05 1989-09-26 Fibertek, Inc. Contactless current probe based on electron tunneling

Also Published As

Publication number Publication date
DE69022777T2 (de) 1996-03-14
JPH0312503A (ja) 1991-01-21
EP0401852B1 (de) 1995-10-04
US5036196A (en) 1991-07-30
EP0401852A3 (de) 1992-12-09
JP2880182B2 (ja) 1999-04-05
EP0401852A2 (de) 1990-12-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee