DE68921793D1 - Vorrichtung zum Transportieren eines Wafers zu einem und von einem Polierkopf. - Google Patents
Vorrichtung zum Transportieren eines Wafers zu einem und von einem Polierkopf.Info
- Publication number
- DE68921793D1 DE68921793D1 DE68921793T DE68921793T DE68921793D1 DE 68921793 D1 DE68921793 D1 DE 68921793D1 DE 68921793 T DE68921793 T DE 68921793T DE 68921793 T DE68921793 T DE 68921793T DE 68921793 D1 DE68921793 D1 DE 68921793D1
- Authority
- DE
- Germany
- Prior art keywords
- wafer
- transporting
- polishing head
- polishing
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/208,685 US4944119A (en) | 1988-06-20 | 1988-06-20 | Apparatus for transporting wafer to and from polishing head |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68921793D1 true DE68921793D1 (de) | 1995-04-27 |
DE68921793T2 DE68921793T2 (de) | 1995-07-13 |
Family
ID=22775586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68921793T Expired - Fee Related DE68921793T2 (de) | 1988-06-20 | 1989-06-13 | Vorrichtung zum Transportieren eines Wafers zu einem und von einem Polierkopf. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4944119A (de) |
EP (2) | EP0347718B1 (de) |
JP (1) | JP2683279B2 (de) |
DE (1) | DE68921793T2 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5095661A (en) * | 1988-06-20 | 1992-03-17 | Westech Systems, Inc. | Apparatus for transporting wafer to and from polishing head |
US5018938A (en) * | 1990-05-18 | 1991-05-28 | At&T Bell Laboratories | Method and apparatus for separating chips |
US5193316A (en) * | 1991-10-29 | 1993-03-16 | Texas Instruments Incorporated | Semiconductor wafer polishing using a hydrostatic medium |
US5329732A (en) * | 1992-06-15 | 1994-07-19 | Speedfam Corporation | Wafer polishing method and apparatus |
USRE38878E1 (en) * | 1992-09-24 | 2005-11-15 | Ebara Corporation | Polishing apparatus |
EP0911115B1 (de) * | 1992-09-24 | 2003-11-26 | Ebara Corporation | Poliergerät |
US5733175A (en) | 1994-04-25 | 1998-03-31 | Leach; Michael A. | Polishing a workpiece using equal velocity at all points overlapping a polisher |
US5607341A (en) | 1994-08-08 | 1997-03-04 | Leach; Michael A. | Method and structure for polishing a wafer during manufacture of integrated circuits |
US5681215A (en) * | 1995-10-27 | 1997-10-28 | Applied Materials, Inc. | Carrier head design for a chemical mechanical polishing apparatus |
US6024630A (en) * | 1995-06-09 | 2000-02-15 | Applied Materials, Inc. | Fluid-pressure regulated wafer polishing head |
KR100487590B1 (ko) | 1995-08-21 | 2005-08-04 | 가부시키가이샤 에바라 세이사꾸쇼 | 폴리싱장치 |
US7097544B1 (en) | 1995-10-27 | 2006-08-29 | Applied Materials Inc. | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
US5804507A (en) * | 1995-10-27 | 1998-09-08 | Applied Materials, Inc. | Radially oscillating carousel processing system for chemical mechanical polishing |
US5738574A (en) * | 1995-10-27 | 1998-04-14 | Applied Materials, Inc. | Continuous processing system for chemical mechanical polishing |
US5762544A (en) * | 1995-10-27 | 1998-06-09 | Applied Materials, Inc. | Carrier head design for a chemical mechanical polishing apparatus |
US5762543A (en) * | 1995-11-30 | 1998-06-09 | Speedfam Corporation | Polishing apparatus with improved product unloading |
JP3580936B2 (ja) | 1996-02-26 | 2004-10-27 | 株式会社荏原製作所 | ポリッシング装置のプッシャー及びポリッシング装置 |
US6050884A (en) | 1996-02-28 | 2000-04-18 | Ebara Corporation | Polishing apparatus |
US6244946B1 (en) | 1997-04-08 | 2001-06-12 | Lam Research Corporation | Polishing head with removable subcarrier |
US6425812B1 (en) | 1997-04-08 | 2002-07-30 | Lam Research Corporation | Polishing head for chemical mechanical polishing using linear planarization technology |
US5893795A (en) * | 1997-07-11 | 1999-04-13 | Applied Materials, Inc. | Apparatus for moving a cassette |
US5865670A (en) * | 1997-09-30 | 1999-02-02 | Memc Electronic Materials, Inc. | Wafer demount apparatus |
EP0911114B1 (de) | 1997-10-20 | 2007-08-01 | Ebara Corporation | Poliervorrichtung |
US6884721B2 (en) * | 1997-12-25 | 2005-04-26 | Shin-Etsu Handotai Co., Ltd. | Silicon wafer storage water and silicon wafer storage method |
US5954888A (en) * | 1998-02-09 | 1999-09-21 | Speedfam Corporation | Post-CMP wet-HF cleaning station |
US6010392A (en) * | 1998-02-17 | 2000-01-04 | International Business Machines Corporation | Die thinning apparatus |
US5944588A (en) * | 1998-06-25 | 1999-08-31 | International Business Machines Corporation | Chemical mechanical polisher |
US6159083A (en) * | 1998-07-15 | 2000-12-12 | Aplex, Inc. | Polishing head for a chemical mechanical polishing apparatus |
US6074285A (en) * | 1998-08-06 | 2000-06-13 | National Science Council | Reciprocating friction drive-type ultra precision machine |
US6464571B2 (en) * | 1998-12-01 | 2002-10-15 | Nutool, Inc. | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein |
US7425250B2 (en) * | 1998-12-01 | 2008-09-16 | Novellus Systems, Inc. | Electrochemical mechanical processing apparatus |
US6409585B1 (en) | 1998-12-21 | 2002-06-25 | Ebara Corporation | Polishing apparatus and holder for holding an article to be polished |
US6066030A (en) * | 1999-03-04 | 2000-05-23 | International Business Machines Corporation | Electroetch and chemical mechanical polishing equipment |
US6716086B1 (en) * | 1999-06-14 | 2004-04-06 | Applied Materials Inc. | Edge contact loadcup |
US6666756B1 (en) | 2000-03-31 | 2003-12-23 | Lam Research Corporation | Wafer carrier head assembly |
US6358126B1 (en) | 2000-05-23 | 2002-03-19 | Ebara Corporation | Polishing apparatus |
US6398631B1 (en) | 2001-02-02 | 2002-06-04 | Memc Electronic Materials, Inc. | Method and apparatus to place wafers into and out of machine |
US7101253B2 (en) | 2002-08-27 | 2006-09-05 | Applied Materials Inc. | Load cup for chemical mechanical polishing |
US7044832B2 (en) | 2003-11-17 | 2006-05-16 | Applied Materials | Load cup for chemical mechanical polishing |
US7648622B2 (en) * | 2004-02-27 | 2010-01-19 | Novellus Systems, Inc. | System and method for electrochemical mechanical polishing |
JP4642532B2 (ja) | 2005-04-01 | 2011-03-02 | 不二越機械工業株式会社 | 研磨装置 |
KR102591914B1 (ko) * | 2016-11-25 | 2023-10-23 | 주식회사 케이씨텍 | 화학 기계적 연마 시스템의 기판 로딩 장치 |
CN107671713A (zh) * | 2017-11-16 | 2018-02-09 | 无锡海特精密模具有限公司 | 一种研磨装置 |
CN108527116A (zh) * | 2018-04-08 | 2018-09-14 | 乐康 | 一种自动抛光设备 |
CN108527117A (zh) * | 2018-04-08 | 2018-09-14 | 乐康 | 一种新型的自动抛光设备 |
US11705354B2 (en) | 2020-07-10 | 2023-07-18 | Applied Materials, Inc. | Substrate handling systems |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3841031A (en) * | 1970-10-21 | 1974-10-15 | Monsanto Co | Process for polishing thin elements |
US4193226A (en) * | 1977-09-21 | 1980-03-18 | Kayex Corporation | Polishing apparatus |
DE3514741A1 (de) * | 1985-04-24 | 1986-10-30 | Supfina Maschinenfabrik Hentzen Kg, 5630 Remscheid | Vorrichtung zum feinbearbeiten ebener flaechen von scheibenfoermigen werkstuecken mit unbearbeiteter auflageseite und geringer wandstaerke |
US4811522A (en) * | 1987-03-23 | 1989-03-14 | Gill Jr Gerald L | Counterbalanced polishing apparatus |
-
1988
- 1988-06-20 US US07/208,685 patent/US4944119A/en not_active Expired - Fee Related
-
1989
- 1989-06-13 EP EP89110665A patent/EP0347718B1/de not_active Expired - Lifetime
- 1989-06-13 EP EP91113965A patent/EP0464864A3/de not_active Withdrawn
- 1989-06-13 DE DE68921793T patent/DE68921793T2/de not_active Expired - Fee Related
- 1989-06-20 JP JP15813289A patent/JP2683279B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2683279B2 (ja) | 1997-11-26 |
EP0347718B1 (de) | 1995-03-22 |
EP0464864A3 (de) | 1994-12-21 |
EP0347718A2 (de) | 1989-12-27 |
EP0347718A3 (de) | 1991-01-02 |
EP0464864A2 (de) | 1992-01-08 |
DE68921793T2 (de) | 1995-07-13 |
JPH0248170A (ja) | 1990-02-16 |
US4944119A (en) | 1990-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |