DE68921342D1 - Versorgungsleitungsanordnung und -vorrichtung für ultrareines wasser. - Google Patents

Versorgungsleitungsanordnung und -vorrichtung für ultrareines wasser.

Info

Publication number
DE68921342D1
DE68921342D1 DE68921342T DE68921342T DE68921342D1 DE 68921342 D1 DE68921342 D1 DE 68921342D1 DE 68921342 T DE68921342 T DE 68921342T DE 68921342 T DE68921342 T DE 68921342T DE 68921342 D1 DE68921342 D1 DE 68921342D1
Authority
DE
Germany
Prior art keywords
supply line
pure water
line arrangement
ultra pure
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68921342T
Other languages
English (en)
Other versions
DE68921342T2 (de
Inventor
Tadahiro Ohmi
Michiya Kawakami
Tadashi Shibata
Masaru Umeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE68921342D1 publication Critical patent/DE68921342D1/de
Publication of DE68921342T2 publication Critical patent/DE68921342T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/22—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/006—Water distributors either inside a treatment tank or directing the water to several treatment tanks; Water treatment plants incorporating these distributors, with or without chemical or biological tanks
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/90—Ultra pure water, e.g. conductivity water

Landscapes

  • Water Supply & Treatment (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Pipeline Systems (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
DE68921342T 1988-06-29 1989-06-29 Versorgungsleitungsanordnung und -vorrichtung für ultrareines wasser. Expired - Fee Related DE68921342T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63162013A JPH0649187B2 (ja) 1988-06-29 1988-06-29 超純水供給配管装置
PCT/JP1989/000648 WO1990000155A1 (en) 1988-06-29 1989-06-29 Ultra-pure water supply piping arrangement apparatus

Publications (2)

Publication Number Publication Date
DE68921342D1 true DE68921342D1 (de) 1995-03-30
DE68921342T2 DE68921342T2 (de) 1995-06-22

Family

ID=15746393

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68921342T Expired - Fee Related DE68921342T2 (de) 1988-06-29 1989-06-29 Versorgungsleitungsanordnung und -vorrichtung für ultrareines wasser.

Country Status (5)

Country Link
US (1) US5160429A (de)
EP (1) EP0432265B1 (de)
JP (1) JPH0649187B2 (de)
DE (1) DE68921342T2 (de)
WO (1) WO1990000155A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2652301B2 (ja) * 1992-05-28 1997-09-10 株式会社荏原製作所 洗浄水製造装置
FR2693374B1 (fr) * 1992-07-10 1994-10-07 Sogoba Installation pour la délivrance d'un liquide stérile et procédé de stérilisation permanente.
US6110534A (en) * 1992-08-01 2000-08-29 Tadahiro Ohmi Method and apparatus for modifying surface material
DE4237651A1 (de) * 1992-11-07 1994-05-11 Uhde Gmbh Verfahren und Anlage zur Versorgung wenigstens eines Verbrauchspunktes mit flüssigen hochreinen Chemikalien
US5447640A (en) * 1993-06-28 1995-09-05 Permelec Electrode Ltd. Method and apparatus for sterilization of and treatment with ozonized water
US5376281A (en) * 1993-07-21 1994-12-27 Safta; Eugen Water purification system
US5573662A (en) * 1993-09-13 1996-11-12 Nomura Micro Science Co., Ltd. Apparatus for treatment of low-concentration organic waste water
KR0141059B1 (ko) * 1993-09-20 1998-06-01 코사이 아키오 액체공급시스템 액체공급방법
US5518624A (en) * 1994-05-06 1996-05-21 Illinois Water Treatment, Inc. Ultra pure water filtration
US5542441A (en) * 1994-08-03 1996-08-06 Yieldup International Apparatus for delivering ultra-low particle counts in semiconductor manufacturing
KR100251649B1 (ko) * 1997-04-22 2000-04-15 윤종용 반도체장치제조공정용초순수의제조를위한살균조성물 및 이를이용한초순수제조장치의살균방법
US5919357A (en) * 1997-05-20 1999-07-06 United States Filter Corporation Filter cartridge assembly
US5925240A (en) * 1997-05-20 1999-07-20 United States Filter Corporation Water treatment system having dosing control
US6348157B1 (en) 1997-06-13 2002-02-19 Tadahiro Ohmi Cleaning method
US6015493A (en) * 1997-07-14 2000-01-18 Teleparts International, Inc. Multiple filtration bypass method and apparatus for reducing particles in liquid distribution systems
JP4135780B2 (ja) * 1997-08-29 2008-08-20 ユーシーティー株式会社 薬液定量注入装置および方法
US6148847A (en) * 1999-03-25 2000-11-21 The Boc Group, Inc. Low vapor pressure gas distribution system and method
JP4483160B2 (ja) * 2002-07-18 2010-06-16 栗田工業株式会社 超純水供給設備
JP4762648B2 (ja) * 2005-08-30 2011-08-31 三和シヤッター工業株式会社 窓装置のロック装置
US8540872B1 (en) 2009-05-09 2013-09-24 Watertronics, LLC Portable water treatment plant
WO2014010628A1 (ja) * 2012-07-10 2014-01-16 東レ株式会社 造水方法および造水装置
JP6981331B2 (ja) * 2018-03-23 2021-12-15 栗田工業株式会社 超純水供給装置
JP7031538B2 (ja) * 2018-09-05 2022-03-08 栗田工業株式会社 超純水製造装置の運転方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129103A (ja) * 1983-12-19 1985-07-10 Hitachi Ltd 超純水製造装置
US4734201A (en) * 1984-08-20 1988-03-29 Oki Electric Industry Co., Ltd. Deionized water supplying system
US4595498A (en) * 1984-12-27 1986-06-17 Thomson Components-Mostek Corporation Water-polishing loop
JPS61220788A (ja) * 1985-03-27 1986-10-01 Hitachi Ltd 超純水製造装置の運転制御方法
JPS6234061U (de) * 1985-08-15 1987-02-28
JPS63283788A (ja) * 1987-05-13 1988-11-21 Mitsui Toatsu Chem Inc 超純水の製造使用方法およびそのための装置

Also Published As

Publication number Publication date
US5160429A (en) 1992-11-03
DE68921342T2 (de) 1995-06-22
WO1990000155A1 (en) 1990-01-11
EP0432265A4 (en) 1991-11-13
EP0432265A1 (de) 1991-06-19
JPH0649187B2 (ja) 1994-06-29
JPH0256293A (ja) 1990-02-26
EP0432265B1 (de) 1995-02-22

Similar Documents

Publication Publication Date Title
DE68921342D1 (de) Versorgungsleitungsanordnung und -vorrichtung für ultrareines wasser.
DE68923378T2 (de) Verbindungsvorrichtung für rohre.
DE3888629T2 (de) Tankvorrats- und Leckdetektionssystem.
DE68911202D1 (de) Trocknungsvorrichtung für Faulschlamm.
DE69023301T2 (de) Flüssigkeitsversorgungseinrichtung.
DE3888185D1 (de) Leitungstransformator.
DE3854679T2 (de) Supraleitfähiges Gerät.
DE68909164T2 (de) Stromversorgungsgerät.
DE68923458D1 (de) Kryogenvorrichtung.
NO881090L (no) Fremgangsmaate for aa hindre manganavsetning i vannledningssystemer.
DE68915943D1 (de) Umkehrschaltvorrichtung für gleichstrom.
NO891628L (no) Utleveringsanordning.
DE3879739T2 (de) Stromfuehrende leitung.
NO891816D0 (no) Elektrolyseinnretning.
DE69002653D1 (de) Kraftstoffzufuhreinrichtung.
DE68913868D1 (de) Supraleitender Transistor.
DK59889A (da) Rygstoetteanordning
DE69015783D1 (de) Kraftstoffzufuhrschlauch.
ATE83283T1 (de) Verteilvorrichtung.
DE68917706D1 (de) Schleifvorrichtung für Schienen.
DE69012338D1 (de) Kraftaufnahmevorrichtung.
DE3887862T2 (de) Cache-Speichervorrichtung.
NO905404L (no) Transportanordning for anvendelse i roeykehus.
DE58908678D1 (de) Leuchte für flüssigen Brennstoff.
FI904268A0 (fi) Anordning foer arbeten i t.ex. roerledningar.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee