DE68916420D1 - Fühler des Teildrucks eines Gases in einer Vakuumkammer. - Google Patents

Fühler des Teildrucks eines Gases in einer Vakuumkammer.

Info

Publication number
DE68916420D1
DE68916420D1 DE68916420T DE68916420T DE68916420D1 DE 68916420 D1 DE68916420 D1 DE 68916420D1 DE 68916420 T DE68916420 T DE 68916420T DE 68916420 T DE68916420 T DE 68916420T DE 68916420 D1 DE68916420 D1 DE 68916420D1
Authority
DE
Germany
Prior art keywords
gas
pressure sensor
vacuum chamber
partial pressure
partial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68916420T
Other languages
English (en)
Other versions
DE68916420T2 (de
Inventor
Carl A Gogol
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Inficon Inc
Original Assignee
Leybold Inficon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Inficon Inc filed Critical Leybold Inficon Inc
Application granted granted Critical
Publication of DE68916420D1 publication Critical patent/DE68916420D1/de
Publication of DE68916420T2 publication Critical patent/DE68916420T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Measuring Fluid Pressure (AREA)
DE68916420T 1989-05-08 1989-08-25 Fühler des Teildrucks eines Gases in einer Vakuumkammer. Expired - Lifetime DE68916420T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/348,955 US4988871A (en) 1989-05-08 1989-05-08 Gas partial pressure sensor for vacuum chamber

Publications (2)

Publication Number Publication Date
DE68916420D1 true DE68916420D1 (de) 1994-07-28
DE68916420T2 DE68916420T2 (de) 1994-10-13

Family

ID=23370294

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68916420T Expired - Lifetime DE68916420T2 (de) 1989-05-08 1989-08-25 Fühler des Teildrucks eines Gases in einer Vakuumkammer.

Country Status (4)

Country Link
US (1) US4988871A (de)
EP (1) EP0396843B1 (de)
JP (1) JP3086230B2 (de)
DE (1) DE68916420T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4304612C2 (de) * 1993-02-16 1995-03-16 Fraunhofer Ges Forschung Verfahren zur kontinuierlichen Messung der stofflichen Zusammensetzung des Dampfes einer Schmelze oder eines zu verdampfenden Materials im Vakuum
KR100571898B1 (ko) * 1998-07-14 2006-04-18 새티스 배큠 인더스트리스 버트리에브스-에이지 처리 진공실 내의 가스 압력을 보정하는 방법 및 장치
US7295015B2 (en) * 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
US7030619B2 (en) * 2004-02-19 2006-04-18 Brooks Automation, Inc. Ionization gauge
JP2006329662A (ja) * 2005-05-23 2006-12-07 Ulvac Japan Ltd 質量分析装置およびその使用方法
GB2441582A (en) * 2006-09-01 2008-03-12 Gencoa Ltd Process monitoring and control
US7768267B2 (en) * 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source
TWI654695B (zh) 2012-12-06 2019-03-21 英福康公司 真空工具及測量該真空工具的客真空室中的氛圍的方法
TWI539154B (zh) 2012-12-19 2016-06-21 英福康公司 雙重偵測殘餘氣體分析器
US20220334016A1 (en) * 2019-09-20 2022-10-20 Inficon ag Method for detecting pressure, and pressure sensor
CN112578426B (zh) * 2020-11-26 2022-09-20 中国工程物理研究院应用电子学研究所 一种可调节型阵列式法拉第筒

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1077458B (de) * 1956-01-28 1960-03-10 Siemens Reiniger Werke Ag Vorrichtung zur Untersuchung der Gaszusammensetzung in Hochvakuumanlagen
GB1013818A (en) * 1962-06-06 1965-12-22 Atomic Energy Commission Electron-beam vacuum gauge
DE1251554B (de) * 1962-07-09
US3327126A (en) * 1964-02-28 1967-06-20 Paul E V Shannon Emission spectrometer with cooled photomultiplier tube detector
US3609378A (en) * 1966-10-31 1971-09-28 Air Reduction Monitoring of vapor density in vapor deposition furnance by emission spectroscopy
US3829962A (en) * 1972-12-04 1974-08-20 Gte Automatic Electric Lab Inc Active trimming of film deposited oscillators
US4162404A (en) * 1974-04-29 1979-07-24 Extranuclear Laboratories, Inc. Method and apparatus for surface ionization monitor for particulates
US3945463A (en) * 1974-07-27 1976-03-23 Yamaha Hatsudoki Kabushiki Kaisha Lubrication system for motorcycles
US4036167A (en) * 1976-01-30 1977-07-19 Inficon Leybold-Heraeus Inc. Apparatus for monitoring vacuum deposition processes
DE2717436A1 (de) * 1976-04-26 1977-11-10 Varian Associates Verfahren und vorrichtung zur bestimmung des partialdruckes eines gases zur vakuummessung, leckanzeige, messung der niederschlagsrate o.dgl.
FR2408909A1 (fr) * 1977-11-15 1979-06-08 Commissariat Energie Atomique Source de vapeur metallique a debit reglable et application aux analyseurs ioniques
US4313057A (en) * 1977-11-28 1982-01-26 Gelbwachs Jerry A Ultrasensitive trace element analyzer
US4234790A (en) * 1979-02-01 1980-11-18 The Perkin-Elmer Corporation Photodetector heat stabilizer
US4321467A (en) * 1980-06-04 1982-03-23 Sri International Flow discharge ion source
US4555626A (en) * 1982-08-03 1985-11-26 Capintec Inc. Radiation shield in light detector and/or assembly
US4586368A (en) * 1985-04-05 1986-05-06 The United States Of America As Represented By The United States Department Of Energy Atmospheric pressure helium afterglow discharge detector for gas chromatography
US4692630A (en) * 1986-05-27 1987-09-08 Inficon Leybold-Heraeus Wavelength specific detection system for measuring the partial pressure of a gas excited by an electron beam

Also Published As

Publication number Publication date
US4988871A (en) 1991-01-29
DE68916420T2 (de) 1994-10-13
EP0396843A3 (de) 1991-08-07
JPH02307043A (ja) 1990-12-20
EP0396843B1 (de) 1994-06-22
JP3086230B2 (ja) 2000-09-11
EP0396843A2 (de) 1990-11-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee