DE68914876T2 - Dünnschichtwiderstand und Herstellungsverfahren. - Google Patents

Dünnschichtwiderstand und Herstellungsverfahren.

Info

Publication number
DE68914876T2
DE68914876T2 DE68914876T DE68914876T DE68914876T2 DE 68914876 T2 DE68914876 T2 DE 68914876T2 DE 68914876 T DE68914876 T DE 68914876T DE 68914876 T DE68914876 T DE 68914876T DE 68914876 T2 DE68914876 T2 DE 68914876T2
Authority
DE
Germany
Prior art keywords
thin film
manufacturing process
film resistance
resistance
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68914876T
Other languages
English (en)
Other versions
DE68914876D1 (de
Inventor
Kazuo Baba
Yoshiyuki Shiratsuki
Kumiko Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Publication of DE68914876D1 publication Critical patent/DE68914876D1/de
Application granted granted Critical
Publication of DE68914876T2 publication Critical patent/DE68914876T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/20—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by pyrolytic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/003—Thick film resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Electronic Switches (AREA)
  • Conductive Materials (AREA)
DE68914876T 1988-05-13 1989-05-11 Dünnschichtwiderstand und Herstellungsverfahren. Expired - Fee Related DE68914876T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63116444A JPH07105282B2 (ja) 1988-05-13 1988-05-13 抵抗体及び抵抗体の製造方法

Publications (2)

Publication Number Publication Date
DE68914876D1 DE68914876D1 (de) 1994-06-01
DE68914876T2 true DE68914876T2 (de) 1994-12-08

Family

ID=14687264

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68914876T Expired - Fee Related DE68914876T2 (de) 1988-05-13 1989-05-11 Dünnschichtwiderstand und Herstellungsverfahren.

Country Status (5)

Country Link
US (1) US5633035A (de)
EP (1) EP0341708B1 (de)
JP (1) JPH07105282B2 (de)
KR (1) KR0123907B1 (de)
DE (1) DE68914876T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04279003A (ja) * 1991-03-07 1992-10-05 Fuji Xerox Co Ltd 抵抗体膜形成用ペースト
US5510823A (en) * 1991-03-07 1996-04-23 Fuji Xerox Co., Ltd. Paste for resistive element film
AUPP599598A0 (en) * 1998-09-18 1998-10-08 Email Limited Self-regulating nanoscale heating element
JP3935687B2 (ja) * 2001-06-20 2007-06-27 アルプス電気株式会社 薄膜抵抗素子およびその製造方法
US7481953B2 (en) * 2004-09-01 2009-01-27 Tdk Corporation Thick-film resistor paste and thick-film resistor
WO2024096723A1 (ko) * 2022-11-05 2024-05-10 반암 주식회사 산화물 박막

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL83230C (de) * 1950-01-25
DE1490606A1 (de) * 1964-07-09 1970-07-16 Siemens Ag Elektrischer Schichtwiderstand mit geringem Temperaturbeiwert des elektrischen Widerstandes
USRE28820E (en) * 1965-05-12 1976-05-18 Chemnor Corporation Method of making an electrode having a coating containing a platinum metal oxide thereon
GB1195833A (en) * 1966-06-14 1970-06-24 Plessey Co Ltd Improvements in or relating to Resistors
US3619287A (en) * 1968-09-20 1971-11-09 Carrier Corp Process of producing an electrical resistor
US3620840A (en) * 1968-12-13 1971-11-16 Methode Dev Co Resistance material and resistance elements made therefrom
US3673117A (en) * 1969-12-19 1972-06-27 Methode Dev Co Electrical resistant material
US3681261A (en) * 1970-07-27 1972-08-01 Owens Illinois Inc Resistors,compositions,pastes,and method of making and using same
US3809797A (en) * 1971-11-16 1974-05-07 Du Pont Seal ring compositions and electronic packages made therewith
DE2233654A1 (de) * 1972-07-08 1974-01-24 Degussa Thermisch zersetzbare masse zur herstellung von elektrischen widerstaenden
JPS5477286A (en) * 1977-12-02 1979-06-20 Tdk Corp Manufacture of insoluble electrode
SU714508A1 (ru) * 1977-12-06 1980-02-05 Предприятие П/Я В-8574 Токопровод ща композици
US4330331A (en) * 1978-06-16 1982-05-18 Nippon Telegraph And Telephone Public Corporation Electric contact material and method of producing the same
US4302362A (en) * 1979-01-23 1981-11-24 E. I. Du Pont De Nemours And Company Stable pyrochlore resistor compositions
JPS5727506A (en) * 1980-07-25 1982-02-13 Central Glass Co Ltd Conductive paste
US4415624A (en) * 1981-07-06 1983-11-15 Rca Corporation Air-fireable thick film inks
US4362656A (en) * 1981-07-24 1982-12-07 E. I. Du Pont De Nemours And Company Thick film resistor compositions
US4476039A (en) * 1983-01-21 1984-10-09 E. I. Du Pont De Nemours And Company Stain-resistant ruthenium oxide-based resistors
CA1217927A (en) * 1983-04-15 1987-02-17 Tsutomu Nanao Inorganic composite material and process for preparing the same
DE3479053D1 (en) * 1983-10-28 1989-08-24 Ngk Spark Plug Co Gas sensor with ceramics substrate and method for producing the same
JPS60101701A (ja) * 1983-11-08 1985-06-05 Matsushita Electric Ind Co Ltd 針圧制御回路
JPS60102701A (ja) * 1983-11-10 1985-06-06 アルプス電気株式会社 厚膜抵抗層形成用ペ−スト
JPS60130494A (ja) * 1983-12-16 1985-07-11 Kitsudo:Kk ダイボンディング用導電性ペ−スト
US4539223A (en) * 1984-12-19 1985-09-03 E. I. Du Pont De Nemours And Company Thick film resistor compositions
JP2699381B2 (ja) * 1987-04-28 1998-01-19 富士ゼロックス株式会社 抵抗体の製造方法
JP2617110B2 (ja) * 1988-02-29 1997-06-04 富士ゼロックス株式会社 抵抗体の製造方法

Also Published As

Publication number Publication date
DE68914876D1 (de) 1994-06-01
EP0341708B1 (de) 1994-04-27
US5633035A (en) 1997-05-27
JPH07105282B2 (ja) 1995-11-13
EP0341708A2 (de) 1989-11-15
JPH01286402A (ja) 1989-11-17
KR0123907B1 (ko) 1997-12-09
EP0341708A3 (en) 1990-11-22
KR890017727A (ko) 1989-12-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee