DE68913920D1 - Dampf- und Ionenquelle. - Google Patents
Dampf- und Ionenquelle.Info
- Publication number
- DE68913920D1 DE68913920D1 DE89420467T DE68913920T DE68913920D1 DE 68913920 D1 DE68913920 D1 DE 68913920D1 DE 89420467 T DE89420467 T DE 89420467T DE 68913920 T DE68913920 T DE 68913920T DE 68913920 D1 DE68913920 D1 DE 68913920D1
- Authority
- DE
- Germany
- Prior art keywords
- steam
- cathode
- ion source
- orifice
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
- H05H3/02—Molecular or atomic beam generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
- H01J27/14—Other arc discharge ion sources using an applied magnetic field
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8816012A FR2639756B1 (fr) | 1988-11-30 | 1988-11-30 | Source de vapeurs et d'ions |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68913920D1 true DE68913920D1 (de) | 1994-04-21 |
DE68913920T2 DE68913920T2 (de) | 1994-11-03 |
Family
ID=9372645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68913920T Expired - Lifetime DE68913920T2 (de) | 1988-11-30 | 1989-11-27 | Dampf- und Ionenquelle. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5025194A (de) |
EP (1) | EP0371894B1 (de) |
JP (1) | JPH03114122A (de) |
AT (1) | ATE103106T1 (de) |
DE (1) | DE68913920T2 (de) |
FR (1) | FR2639756B1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6271529B1 (en) | 1997-12-01 | 2001-08-07 | Ebara Corporation | Ion implantation with charge neutralization |
DE10062665A1 (de) | 2000-12-15 | 2002-06-20 | Bsh Bosch Siemens Hausgeraete | Magnetventil für einen Kältemittelkreislauf |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1209092A (fr) * | 1958-05-03 | 1960-02-29 | Commissariat Energie Atomique | Nouvelle source d'ions |
US3223885A (en) * | 1963-04-29 | 1965-12-14 | Gen Electric | Stabilization circuit for electron beam apparatus |
US3414702A (en) * | 1965-05-28 | 1968-12-03 | Gen Electric | Nonthermionic electron beam apparatus |
US3411035A (en) * | 1966-05-31 | 1968-11-12 | Gen Electric | Multi-chamber hollow cathode low voltage electron beam apparatus |
FR2595868B1 (fr) * | 1986-03-13 | 1988-05-13 | Commissariat Energie Atomique | Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques |
US4894546A (en) * | 1987-03-11 | 1990-01-16 | Nihon Shinku Gijutsu Kabushiki Kaisha | Hollow cathode ion sources |
FR2618602B1 (fr) * | 1987-07-22 | 1990-01-05 | Centre Nat Rech Scient | Source d'electrons |
-
1988
- 1988-11-30 FR FR8816012A patent/FR2639756B1/fr not_active Expired - Fee Related
-
1989
- 1989-11-27 DE DE68913920T patent/DE68913920T2/de not_active Expired - Lifetime
- 1989-11-27 AT AT89420467T patent/ATE103106T1/de not_active IP Right Cessation
- 1989-11-27 EP EP89420467A patent/EP0371894B1/de not_active Expired - Lifetime
- 1989-11-29 US US07/442,796 patent/US5025194A/en not_active Expired - Lifetime
- 1989-11-29 JP JP1310466A patent/JPH03114122A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0371894B1 (de) | 1994-03-16 |
FR2639756A1 (fr) | 1990-06-01 |
JPH03114122A (ja) | 1991-05-15 |
DE68913920T2 (de) | 1994-11-03 |
US5025194A (en) | 1991-06-18 |
ATE103106T1 (de) | 1994-04-15 |
FR2639756B1 (fr) | 1994-05-13 |
EP0371894A1 (de) | 1990-06-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: CZYBULKA, U., DIPL.-PHYS., PAT.-ANW., 81667 MUENCH |