DE68913155T2 - Vorrichtung zur Messung der Achsenabweichung eines Kristallziehdrahtes. - Google Patents

Vorrichtung zur Messung der Achsenabweichung eines Kristallziehdrahtes.

Info

Publication number
DE68913155T2
DE68913155T2 DE68913155T DE68913155T DE68913155T2 DE 68913155 T2 DE68913155 T2 DE 68913155T2 DE 68913155 T DE68913155 T DE 68913155T DE 68913155 T DE68913155 T DE 68913155T DE 68913155 T2 DE68913155 T2 DE 68913155T2
Authority
DE
Germany
Prior art keywords
measuring
pull wire
axis deviation
crystal pull
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68913155T
Other languages
English (en)
Other versions
DE68913155D1 (de
Inventor
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE68913155D1 publication Critical patent/DE68913155D1/de
Application granted granted Critical
Publication of DE68913155T2 publication Critical patent/DE68913155T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE68913155T 1988-11-21 1989-11-20 Vorrichtung zur Messung der Achsenabweichung eines Kristallziehdrahtes. Expired - Fee Related DE68913155T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63294094A JPH0776144B2 (ja) 1988-11-21 1988-11-21 結晶引上ワイヤの偏芯量測定装置

Publications (2)

Publication Number Publication Date
DE68913155D1 DE68913155D1 (de) 1994-03-24
DE68913155T2 true DE68913155T2 (de) 1994-06-23

Family

ID=17803211

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68913155T Expired - Fee Related DE68913155T2 (de) 1988-11-21 1989-11-20 Vorrichtung zur Messung der Achsenabweichung eines Kristallziehdrahtes.

Country Status (4)

Country Link
US (1) US4969745A (de)
EP (1) EP0370440B1 (de)
JP (1) JPH0776144B2 (de)
DE (1) DE68913155T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2662803B1 (fr) * 1990-05-31 1992-09-04 Aerospatiale Dispositif et installation de cristallogenese pourvus de moyens d'observation.
JP2984958B2 (ja) * 1991-07-26 1999-11-29 東京エレクトロン株式会社 基板の枚葉検出装置
EP0599297B1 (de) * 1992-11-25 1998-05-20 Sumitomo Electric Industries, Limited Methode zum Erkennen von Verunreinigungen in geschmolzenem Kunststoff
US5729339A (en) * 1993-09-02 1998-03-17 Korea Atomic Energy Research Institute Swing angle measuring apparatus for swing free operation of crane
US5582642A (en) * 1995-06-20 1996-12-10 Memc Electronic Materials, Inc. Apparatus and method for adjusting the position of a pull wire of a crystal pulling machine
JP3099724B2 (ja) * 1996-03-15 2000-10-16 住友金属工業株式会社 シリコン単結晶のねじれ振動検知装置及びねじれ振動検知方法並びにそれを用いた単結晶の製造方法
US5986748A (en) * 1998-08-21 1999-11-16 Seh America Inc Dual beam alignment device and method
US20050066888A1 (en) * 2003-09-30 2005-03-31 Griggs Jesse B. Active dampening orbit stopper for Czochralski crystal growth
US20050087126A1 (en) * 2003-10-22 2005-04-28 Pratt Daniel F. Non-contact orbit control system for Czochralski crystal growth
KR101331753B1 (ko) 2012-07-19 2013-11-20 주식회사 엘지실트론 단결정 성장장치의 편심제어장치 및 그 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106770U (de) * 1980-12-24 1982-07-01
JPS598697A (ja) * 1982-07-02 1984-01-17 Toshiba Corp 半導体単結晶引上装置
JPS59109805A (ja) * 1982-12-16 1984-06-25 Matsushita Electric Ind Co Ltd 位置検出装置
JPH0711409B2 (ja) * 1985-02-27 1995-02-08 古河電気工業株式会社 長尺体の被覆偏心率測定方法
JPH0747520B2 (ja) * 1986-04-22 1995-05-24 三菱マテリアル株式会社 単結晶引き上げ装置
JPH0649631B2 (ja) * 1986-10-29 1994-06-29 信越半導体株式会社 結晶径測定装置
JPS6424089A (en) * 1987-07-21 1989-01-26 Shinetsu Handotai Kk Device for adjusting initial position of melt surface

Also Published As

Publication number Publication date
US4969745A (en) 1990-11-13
EP0370440A2 (de) 1990-05-30
DE68913155D1 (de) 1994-03-24
JPH0776144B2 (ja) 1995-08-16
EP0370440B1 (de) 1994-02-16
JPH02141491A (ja) 1990-05-30
EP0370440A3 (en) 1990-11-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee