DE68904302T2 - Vorrichtung zum messen einer achsenabweichung in einer kristallzieheinrichtung. - Google Patents

Vorrichtung zum messen einer achsenabweichung in einer kristallzieheinrichtung.

Info

Publication number
DE68904302T2
DE68904302T2 DE8989120041T DE68904302T DE68904302T2 DE 68904302 T2 DE68904302 T2 DE 68904302T2 DE 8989120041 T DE8989120041 T DE 8989120041T DE 68904302 T DE68904302 T DE 68904302T DE 68904302 T2 DE68904302 T2 DE 68904302T2
Authority
DE
Germany
Prior art keywords
measuring
axis difference
crystal drawing
drawing device
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989120041T
Other languages
English (en)
Other versions
DE68904302D1 (de
Inventor
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE68904302D1 publication Critical patent/DE68904302D1/de
Publication of DE68904302T2 publication Critical patent/DE68904302T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE8989120041T 1988-10-28 1989-10-28 Vorrichtung zum messen einer achsenabweichung in einer kristallzieheinrichtung. Expired - Fee Related DE68904302T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63273942A JPH0797014B2 (ja) 1988-10-28 1988-10-28 中心線ずれ量測定装置

Publications (2)

Publication Number Publication Date
DE68904302D1 DE68904302D1 (de) 1993-02-18
DE68904302T2 true DE68904302T2 (de) 1993-05-27

Family

ID=17534716

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989120041T Expired - Fee Related DE68904302T2 (de) 1988-10-28 1989-10-28 Vorrichtung zum messen einer achsenabweichung in einer kristallzieheinrichtung.

Country Status (4)

Country Link
US (1) US5020907A (de)
EP (1) EP0375882B1 (de)
JP (1) JPH0797014B2 (de)
DE (1) DE68904302T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726817B2 (ja) * 1990-07-28 1995-03-29 信越半導体株式会社 結晶径測定装置
US5282016A (en) * 1992-07-29 1994-01-25 Hughes Aircraft Company Optical alignment by use of arrays of reflective or diffractive optical elements and detectors
JPH07174512A (ja) * 1993-12-20 1995-07-14 Honda Motor Co Ltd 可動体の位置決め方法および装置
US5582642A (en) * 1995-06-20 1996-12-10 Memc Electronic Materials, Inc. Apparatus and method for adjusting the position of a pull wire of a crystal pulling machine
US5986748A (en) * 1998-08-21 1999-11-16 Seh America Inc Dual beam alignment device and method
CN103882529A (zh) * 2012-12-21 2014-06-25 有研光电新材料有限责任公司 一种晶体生长炉中籽晶与坩埚对中的调试方法及装置
CN103105136B (zh) * 2013-01-18 2015-12-09 中国葛洲坝集团股份有限公司 竖井滑模偏移监测装置
CN109343037A (zh) * 2018-11-27 2019-02-15 森思泰克河北科技有限公司 光探测器安装误差检测装置、方法和终端设备
CN115354389B (zh) * 2022-08-29 2023-05-09 中能兴盛(香河)机电设备有限公司 晶体生长炉坩埚驱动轴预对中装置及其控制方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3727055A (en) * 1970-09-24 1973-04-10 Gen Electric Optical positioning system
DE2349718A1 (de) * 1973-10-03 1975-04-24 Siemens Ag Vorrichtung zum ziehen von kristallen aus der schmelze
DE3012433C1 (de) * 1980-03-31 1981-10-01 Polygram Gmbh, 2000 Hamburg Vorrichtung zum Zentrieren fuer die Herstellung eines Mittellochs in Platten
JPS57192807U (de) * 1981-06-02 1982-12-07
US4480918A (en) * 1982-03-04 1984-11-06 The Charles Stark Draper Laboratory, Inc. Non-contact displacement sensing system for a compliance device
JPS598697A (ja) * 1982-07-02 1984-01-17 Toshiba Corp 半導体単結晶引上装置
JPS62111606U (de) * 1985-12-28 1987-07-16
JPH0747520B2 (ja) * 1986-04-22 1995-05-24 三菱マテリアル株式会社 単結晶引き上げ装置
US4747454A (en) * 1986-05-12 1988-05-31 Perryman J Philip External axis parallel alignment system
GB2195465A (en) * 1986-09-29 1988-04-07 Atomic Energy Authority Uk Misalignment detection

Also Published As

Publication number Publication date
EP0375882A1 (de) 1990-07-04
US5020907A (en) 1991-06-04
JPH0797014B2 (ja) 1995-10-18
JPH02120602A (ja) 1990-05-08
DE68904302D1 (de) 1993-02-18
EP0375882B1 (de) 1993-01-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee