DE68906475D1 - Verfahren zur beschichtung eines substrats mit einer metallschicht. - Google Patents

Verfahren zur beschichtung eines substrats mit einer metallschicht.

Info

Publication number
DE68906475D1
DE68906475D1 DE8989110200T DE68906475T DE68906475D1 DE 68906475 D1 DE68906475 D1 DE 68906475D1 DE 8989110200 T DE8989110200 T DE 8989110200T DE 68906475 T DE68906475 T DE 68906475T DE 68906475 D1 DE68906475 D1 DE 68906475D1
Authority
DE
Germany
Prior art keywords
coating
substrate
metal layer
metal
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989110200T
Other languages
English (en)
Other versions
DE68906475T2 (de
Inventor
Morris Anschel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE68906475D1 publication Critical patent/DE68906475D1/de
Application granted granted Critical
Publication of DE68906475T2 publication Critical patent/DE68906475T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/18Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • C23C14/205Metallic material, boron or silicon on organic substrates by cathodic sputtering
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
DE89110200T 1988-07-06 1989-06-06 Verfahren zur beschichtung eines substrats mit einer metallschicht. Expired - Fee Related DE68906475T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21584788A 1988-07-06 1988-07-06

Publications (2)

Publication Number Publication Date
DE68906475D1 true DE68906475D1 (de) 1993-06-17
DE68906475T2 DE68906475T2 (de) 1993-11-04

Family

ID=22804647

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89110200T Expired - Fee Related DE68906475T2 (de) 1988-07-06 1989-06-06 Verfahren zur beschichtung eines substrats mit einer metallschicht.

Country Status (4)

Country Link
US (1) US5372685A (de)
EP (1) EP0351533B1 (de)
JP (1) JP2602329B2 (de)
DE (1) DE68906475T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0382188A (ja) * 1989-08-25 1991-04-08 Kyocera Corp セラミック配線基板の製造方法
US5461203A (en) * 1991-05-06 1995-10-24 International Business Machines Corporation Electronic package including lower water content polyimide film
DE4130518A1 (de) * 1991-09-13 1993-03-18 Hoechst Ag Verfahren zur herstellung eines haftfesten verbundes von kupferschichten und aluminiumoxidkeramik ohne einsatz von haftvermittlern
US5763024A (en) * 1995-02-28 1998-06-09 Transfer Print Foils, Inc. Trim component including a metalized polyester film and substrate having curled edges
US6171714B1 (en) 1996-04-18 2001-01-09 Gould Electronics Inc. Adhesiveless flexible laminate and process for making adhesiveless flexible laminate
CA2327801A1 (en) * 2000-03-21 2001-09-21 Rocky L. Hilburn Copper on polymer component having improved adhesion
US6875318B1 (en) 2000-04-11 2005-04-05 Metalbond Technologies, Llc Method for leveling and coating a substrate and an article formed thereby
ES2239907B1 (es) 2004-03-26 2006-12-01 Analisi Tecnologica Innovadora Per A Processos Industrials Competitius, S.L. Procedimiento de cromado.
KR20140142123A (ko) * 2013-05-31 2014-12-11 삼성전자주식회사 다층박막의 제조방법, 다층박막이 형성된 부재, 및 이를 포함하는 전자제품.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR793015A (fr) * 1934-10-16 1936-01-15 Dispersion Cathodique S A Perfectionnements apportés à la dispersion cathodique
DE1514668B2 (de) * 1966-01-19 1977-05-12 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von chrom- silber-kontakten auf halbleiterbauelementen
JPS56118209A (en) * 1980-02-20 1981-09-17 Hitachi Ltd Conductor
US4342632A (en) * 1981-05-01 1982-08-03 The United States Of America As Represented By The Secretary Of The Army Method of metallizing a ceramic substrate
US4386116A (en) * 1981-12-24 1983-05-31 International Business Machines Corporation Process for making multilayer integrated circuit substrate
US4444848A (en) * 1982-01-04 1984-04-24 Western Electric Co., Inc. Adherent metal coatings on rubber-modified epoxy resin surfaces
US4517051A (en) * 1982-12-27 1985-05-14 Ibm Corporation Multi-layer flexible film module
US4544571A (en) * 1984-02-13 1985-10-01 Pennwalt Corporation Method of manufacture of EMI/RFI vapor deposited composite shielding panel
US4666874A (en) * 1984-10-01 1987-05-19 Mobil Oil Corporation Stereodifferentiating hydrocarbon conversion zeolite catalysts
US4629662A (en) * 1984-11-19 1986-12-16 International Business Machines Corporation Bonding metal to ceramic like materials

Also Published As

Publication number Publication date
EP0351533B1 (de) 1993-05-12
JP2602329B2 (ja) 1997-04-23
DE68906475T2 (de) 1993-11-04
JPH0247257A (ja) 1990-02-16
EP0351533A1 (de) 1990-01-24
US5372685A (en) 1994-12-13

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee